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Formula 4-7<br />
Shot orifice<br />
Formula 4-8<br />
Shot angle<br />
Formula 4-9<br />
Maximum acceleration<br />
voltage U zmax<br />
Formula 4-10<br />
HF power<br />
www.pfeiffer-vacuum.net<br />
The filter thus acts as a high pass. As HF amplitude (V ) increases, ever-heavier types of ions<br />
become unstable, starting with the light masses, and are thus sorted out. This operating<br />
mode produces an integral spectrum.<br />
The shot conditions are crucial for transmission of ions through the filter.<br />
Ions parallel to the rod system must be shot in within the following diameter:<br />
1 M<br />
D = . r0 .<br />
2 �M<br />
The maximum shot angle must satisfy the condition:<br />
tgψ < 11.85 .<br />
2 r0 L 2<br />
and the energy must be as uniform as possible. The advantages of the Pfeiffer <strong>Vacuum</strong> ion<br />
sources described in 4.1.4.1 translate into high transparency and thus high sensitivity.<br />
In order for the amplitudes of the unstable ions to become large enough to strike the rods,<br />
where they are neutralized, these ions must perform a minimum number of oscillations in the<br />
separating field. The following equation applies for the maximum acceleration voltage in the<br />
Z direction:<br />
kg �M<br />
U zmax � 4.2 . 10 - 6 . L 2 . f 2 . M .<br />
A . s M<br />
In practical operation, the ratio U / V is activated as a function of the mass number in such a<br />
manner that the actual resolution �M / M, does not remain constant, but that instead the line<br />
width �M remains constant. This means that resolution increases proportionally to the mass<br />
number. Due to Formula 4-5 (V is proportional to M ), the quadrupole (as opposed to<br />
the sector field mass spectrometer) produces a linear mass scale.<br />
One point of major significance for a QMS is the required HF power. If C is used to designate<br />
the entire capacity of the system and Q to designate the factor quality of the power circuit,<br />
the required HF power<br />
C<br />
N � HF . M 2 . f 5 . r0 Q<br />
will increase with high powers of f and r 0 . An enlargement of field radius r 0 will lessen the<br />
occurring relative mechanical tolerances, thus resulting in improved behavior. Essentially, it is<br />
advantageous to select f and r as large as possible. <strong>How</strong>ever there are limits in this regard<br />
0 0<br />
due to the associated increase in HF power (Formula 4-10). While extending the rod system<br />
permits a lower operating frequency, the size of a production unit should not exceed certain<br />
dimensions.<br />
4<br />
Page 91<br />
<strong>Vacuum</strong><br />
<strong>Technology</strong>