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Figure XI. 3 Whole mask steady state thermal balance subsystem<br />

The outputs are listed in table below.<br />

output port number output Unit<br />

1 Steady air temperature in the mask (for reference) °C<br />

2 Temperature of mask wall with heat dissipation °C<br />

Details of the contained “Mask wall temperature subsystem” and “Steady state mask air<br />

temperature subsystem” are shown below.<br />

XI.3.1 Steady state mask wall temperature subsystem<br />

This subsystem is to obtain the mask wall temperature. It is created based on Eq. (3.94).<br />

230

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