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XI.3.1.1 Mask outer surface thermal resistance subsystem<br />

The subsystem for outer surface natural convection is shown in Figure XV 1. As<br />

discussed in chapter 3, the outer surface convection is considered as only exists on the<br />

triangular wall since the rectangular side walls are silicon seal and foam insulated.<br />

The inputs are listed in table below.<br />

Input port number Input Unit<br />

1 Length of the triangular plate outer surface m<br />

2 Half width of the triangular plate outer surface m<br />

3 Temperature of mask wall with heat dissipation °C<br />

4 Ambient air temperature °C<br />

Figure XI. 5 Mask outer surface thermal resistance subsystem<br />

XI.3.1.2 Mask inner surface thermal resistance subsystem<br />

The subsystem for outer surface natural convection is shown above. Again the inner<br />

surface convection is also considered as only exists on the triangular wall.<br />

Figure XI. 6 Mask inner surface thermal resistance subsystem<br />

The inputs are listed in table below.<br />

232

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