research activities in 2007 - CSEM

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In order to optimize the performances of the resonator and guarantee long-term frequency stability, one needs to perform hermetic packaging under reduced pressure. The rear side of the resonators is closed hermetically by low temperature fusion bonding (with Si wafer) or by anodic bonding (with Pyrex). Both methods require an extremely smooth surface of the wafer. The resonator chips are then vacuum encapsulated using silicon caps (ultimately working ICs) and AuSn (80% wt Au) soldering technology. Metallic alloy materials provide both low-permeability sealing characteristics as well as electrical conduction for the resonator driving interconnects. The AuSn electroplating process was carried out at the Fraunhofer Institute for Reliability and Microintegration (IZM FhG). Vacuum sealing of the resonator chips is done through a twostep process: • Tacking of the sealing cap on the resonator chip at a temperature below the AuSn melting point using flip-chip • Reflow under vacuum in a dedicated oven The tacking methodology proved to be successful. Taguchi runs using thermo-compression parameters (temperature, force, dwelling time) as variable experimental factors were carried out. Reflow process development, where resulting vacuum level is monitored through Q factor measurements, is on-going. A differential oscillator structure has been chosen to minimize the circuit power dissipation despite the large shunt capacitance of the resonator (~10 pF). A programmable fractional divider is used to generate a thermally compensated 32768 Hz clock from the 960 kHz oscillator signal that drifts by -28 ppm/°C. The output of a high resolution temperature sensor integrated on the same die is used by a sequencer to implement an open-loop compensation algorithm that requires initial calibration of the resonator absolute frequency and thermal drift. The state machine has been implemented on an external FPGA to yield greater flexibility. Communication with the IC to read the thermal sensor indication and update the fractional divider ratio is ensured via a serial bus interface. Figure 4 shows a photograph of a miniature packaged resonator that has been glued above the IC mounted over a printed circuit board. The close vicinity of the resonator and the thermal sensor located within the IC minimize any thermal gradient that would affect the compensation accuracy. Extensive testing of the IC with the miniature packaged resonators will be initiated once satisfactory vacuum levels are reached within the micro-cavity to assess the performance of the thermo-compensated time-base. Figure 4: Photograph showing a chip on board assembly of a miniature time-base [1] J. Baborowski, et al., “Piezoelectrically Activated Silicon Resonators”, IEEE Frequency Control Symposium, 1210-1213 (June 2007) [2] B. Kim, et al., “Si-SiO2 Composite MEMS Resonators in CMOS Compatible Wafer-Scale Thin-Film Encapsulation”, IEEE Frequency Control Symposium, 1214-1219 (June 2007) [3] J.M. Mayor, et al., “Micro-Vibration Analysis Setup for MEMS and MOEMS Characterization”, in this report, page 72 17
TissueOptics – Portable SpO2 Monitor: a Fast Response Approach Tested in an Altitude Chamber C. Verjus, V. Neuman, J. Solà I Caros, O. Grossenbacher, S. Dasen, O. Chételat Altitude is hazardous for the human body, with the oxygen delivery to the cells being jeopardized. The prototype of an advanced oxygen saturation monitoring sensor, embedded in a commercial earphone, has been successfully tested in an altitude chamber. Oxygen is vital to maintain the basic metabolism of cells in the human body: in the absence of oxygen for a prolonged amount of time, cells would die. In critical situations like aviation, severe hypoxia periods reduce oxygen delivery, leading subjects to unconsciousness and compromising the security of the crew. Thus, continuous monitoring of oxygen delivery to cells is a relevant indicator of the health of a person. For healthy people under normal oxygen delivery situations, about 98% of haemoglobin (Hb) in the blood combines with oxygen to form oxy-haemoglobin (HbO2). The so-called arterial oxygen saturation (SaO2) is calculated as the ratio of HbO2 to total haemoglobin (Hb + HbO2). When this saturation parameter is assessed by means of optical non-invasive techniques it is commonly known as SpO2. Pulse oximetry is a widespread, non-invasive method used in clinical environments to determine arterial oxygen saturation. Two light beams of different wavelengths are injected into the skin surface and transmitted or backscattered parts of them are retrieved. The technique is then based on the photoplethysmographic effect (measurement of a change of volume by optical means) and on the local characteristics of the absorption curves of hemoglobin and oxy-hemoglobin at two different wavelengths. SpO2 sensor products are available today, but they are incompatible with comfortable and non-obtrusive long-term monitoring. CSEM has launched a strategic activity to develop oximeter probes for different body positions (finger ring, ear cartilage, sternum, etc.). Figure 1: Comparison between the blood oxygen saturation given by the reference sensor from Biopac and calculated by the CSEM sensor during the whole test. TissueOptics is a CSEM Multidisciplinary Integrated Project aiming at improving its expertise of non-invasive optical measurements in human tissue. One of the innovations already developed in this project is a dedicated electronic 18 including a servo-controlled loop and an offset correction to improve the dynamic range of pulse oximetry sensors. Figure 2: Test subject in the cockpit mock-up and computer logging of the reference blood oxygen saturation value from the Biopac and the value measured with the CSEM sensor. The measurements were conducted during the cockpit ventilation assessment tests of SolarImpulse [1] in the altitude chamber of the Fliegerärztliches Institut der Luftwaffe FAI/AMC Schweiz in Dübendorf. Two tests were performed on this occasion with two different test subjects. The tests aimed at obtaining in the shortest time possible the cockpit air composition for oxygen and carbon dioxide, as it will change at high altitude. Each test lasted about 4 hours. The time for a climb to 3000 m was around 20-30 minutes. The altitude chamber is internally ventilated, in order to provide normal atmosphere conditions in the environment of the cockpit mock up. A Biopac Sensor, using a fingertip probe, connected to a laptop computer logging the measured values acts as a reference for the CSEM SpO2 sensor. The CSEM SpO2 sensor uses an earlobe probe integrated into an earphone. The results calculated in real time by the CSEM sensor are fully in agreement with the reference values from the Biopac. [1] www.solarimpulse.com
Page 1 and 2: centre suisse d’électronique et
Page 4 and 5: CONTENTS PREFACE 5 RESEARCH ACTIVIT
Page 6: PREFACE Dear Reader, In this report
Page 9 and 10: TissueOptics - Portable SpO2 Monito
Page 11 and 12: Counterfeit - Machine Readable Cove
Page 13 and 14: ArrayFM - An Atomic Force Microscop
Page 15 and 16: Encoder - Nanometric Optical Absolu
Page 17: PackTime - Zero-Level Packaging of
Page 21 and 22: spectrometer applications so CSEM h
Page 23 and 24: As a first step, CSEM is building s
Page 25 and 26: Data Fusion for Wireless Distribute
Page 27 and 28: A High-Performance 2.4 GHz RF Front
Page 29 and 30: Quasi-Harmonic Quadrature CMOS Rela
Page 31 and 32: icycam, a System-On Chip (SoC) for
Page 34 and 35: PHOTONICS Nicolas Blanc The Photoni
Page 36 and 37: Optoelectronic Test Equipment for I
Page 38 and 39: Compact Illumination Modules Based
Page 40 and 41: Efficient Screening and Formulation
Page 42: Optical Fill Factor Enhancement for
Page 45 and 46: Dissolved Oxygen Sensor with Self-C
Page 47 and 48: Metal Micro-Parts Fabrication F. Ca
Page 49 and 50: Towards an Optical Switch with J-ag
Page 51 and 52: Towards Plasmon Enhanced Detectors
Page 53 and 54: Sol-Gel based Nanoporous Layers as
Page 55 and 56: Nanoporous Membranes for Medical Di
Page 57 and 58: Parallel Nanoscale Dispensing of Li
Page 59 and 60: Detection Methods for Nanotoxicolog
Page 61 and 62: Composite Materials for Bone Implan
Page 63 and 64: Smart Wound Dressing with Integrate
Page 65 and 66: Food Safety with the Help of a Mini
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NANOMEDICINE Peter Seitz Mandated b
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X-Ray Microscopy and Micrometer-Res
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Micro-Vibration Analysis Setup for
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the signals with a reference to sta
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Prediction of Neurocardiovascular E
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Continuous Arterial Blood Pressure
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UWB Antenna with Improved Bandwidth
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A Wireless Sensor Network for Fire
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A MAC Protocol for UWB-IR Wireless
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Wireless Sensor Networks for Monito
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Wearable Systems to Protect Rescuer
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NanoHand - A System for Automated N
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Isolation and Reversible Immobiliza
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Sensor and Connector Integration in
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Pressure Sensing Strip - Packaging
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Optical / Fluidic Integration of Si
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PRN-cw Backscatter Lidar Prototype
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Quality Control A. Dommann, A. Ibza
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[18] A.-C. Pliska, C. Bosshard "Adh
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[21] E. Onillon, P. Theurillat, A.
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A. Bonfiglio, N. Carbonaro, C. Chuz
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H. Heinzelmann "CSEM and CSEM Brazi
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C. Piguet "High Level Energy and Po
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J. Solà I Caros "Annual meeting of
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8241.2 DCPP-NM SOLID Solid on Liqui
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LISA-PAAM Development, demonstratio
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University Institute Professor Fiel
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128 Title of lecture Context Locati
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Name Professor / University Theme /
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C. Piguet Member of the Board of th
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research activities in 2007 - CSEM

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