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research activities in 2007 - CSEM

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MICROELECTRONICS<br />

Christian Enz<br />

The <strong>research</strong> <strong>activities</strong> conducted <strong>in</strong> the field of Integrated<br />

Systems for Information Technology (ISIT) are focused on the<br />

design of highly <strong>in</strong>tegrated systems target<strong>in</strong>g low-power and<br />

low-voltage applications. The latter systems typically <strong>in</strong>clude<br />

complex microelectronics Systems-on-Chip (SoCs),<br />

embedd<strong>in</strong>g many functionalities on a s<strong>in</strong>gle chip, together with<br />

other heterogeneous devices such as RF passives,<br />

resonators and filters, silicon time basis and sensors <strong>in</strong>to<br />

advanced Systems-<strong>in</strong>-Package (SiPs). The <strong>research</strong> is<br />

organized around four different generic technology platforms:<br />

• Digital SoC platform<br />

• Sensory Information Process<strong>in</strong>g platform<br />

• Integrated RF Circuits and Systems platform<br />

• RF and Piezoelectric Components platform.<br />

The achievements made dur<strong>in</strong>g <strong>2007</strong> <strong>in</strong> these different<br />

platforms are discussed <strong>in</strong> more detail below.<br />

The Digital SoC platform aims at develop<strong>in</strong>g all the key digital<br />

components required <strong>in</strong> a SoC, <strong>in</strong>clud<strong>in</strong>g low-leakage<br />

memories and highly energy-efficient processors. The latter<br />

<strong>in</strong>clude the Macgic, a 4 MAC digital signal processor (DSP)<br />

developed for <strong>in</strong>tensive digital signal process<strong>in</strong>g and the<br />

icyflex, a 32-bit microcontroller core with additional DSP<br />

capabilities, for simple signal process<strong>in</strong>g. These processors<br />

have now reached a certa<strong>in</strong> degree of maturity and have<br />

started to be <strong>in</strong>tegrated <strong>in</strong> several <strong>in</strong>dustrial SoCs. As an<br />

example, four Macgic DSPs have successfully been used <strong>in</strong> a<br />

programmable multi-processor eng<strong>in</strong>e for an ultra low-power<br />

mobile digital TV. The icyflex has now become the heart of all<br />

<strong>CSEM</strong> SoCs replac<strong>in</strong>g the long-time used 8-bits CoolRISC<br />

microcontroller. It is also used <strong>in</strong> the new generation of digital<br />

vision sensors SoC called icycam.<br />

The Sensory Information Process<strong>in</strong>g platform implements<br />

powerful vision systems that are able to extract essential<br />

image features <strong>in</strong> real-time and at low-power. These features<br />

<strong>in</strong>clude the three most important <strong>in</strong>formation categories that<br />

are used by the basic operation of the human vision, namely,<br />

the contrast (<strong>in</strong>tensity variation), the direction of contrast<br />

(feature orientation) and the motion (spatio-temporal contrast<br />

variation). The new vision sensor platform has been migrated<br />

from the former 0.5 µm CMOS process towards a 0.18 µm<br />

process. In the former version, the contrast extraction and<br />

calculation was fully done <strong>in</strong> the analog doma<strong>in</strong>, mak<strong>in</strong>g it<br />

difficult to migrate. In order to take full advantage of<br />

technology scal<strong>in</strong>g, the core of the vision sensor architecture<br />

has been profoundly modified and is now essentially digital.<br />

This also allows tak<strong>in</strong>g advantage of the icyflex processor <strong>in</strong><br />

the newly designed icycam vision sensor SoC. The ability of<br />

vision sensors to process the image feature locally enables it<br />

to be used together with other vision sensors connected<br />

together with a rather low data rate wireless channel. Such a<br />

network allows perform<strong>in</strong>g data fusion of signals provided by<br />

several vision sensors and 3D cameras <strong>in</strong> order to track<br />

persons <strong>in</strong> build<strong>in</strong>gs. Another SoC <strong>in</strong>clud<strong>in</strong>g the icyflex is used<br />

for nanometric absolute position encod<strong>in</strong>g. Such m<strong>in</strong>iaturized<br />

optical encoders have a great potential for applications <strong>in</strong><br />

robotics, automation and mach<strong>in</strong>e tools.<br />

The Integrated RF Circuits and Systems platform ma<strong>in</strong>ly<br />

targets ultra low-power short-range and low data rate<br />

applications. A new development platform has been<br />

eng<strong>in</strong>eered for the design of narrow-band RF transceivers<br />

operat<strong>in</strong>g <strong>in</strong> the 868 MHz and 915 MHz ISM bands. It <strong>in</strong>cludes<br />

an <strong>in</strong>tegrated front-end IC with a low-IF super-heterodyne<br />

receiver architecture and a newly designed direct modulation<br />

RF transmitter. The on-chip analog baseband uses a phaseto-digital<br />

converter and is followed by a digital baseband<br />

implemented <strong>in</strong> a FPGA <strong>in</strong> order to keep a maximum of<br />

flexibility. This platform allows experiment<strong>in</strong>g on different<br />

modulation schemes. The efficient comb<strong>in</strong>ation of MEMS such<br />

as BAW resonators and ICs has always been a strong<br />

<strong>research</strong> topic <strong>in</strong> the field of ultra low-power radio design.<br />

After hav<strong>in</strong>g realized a BAW RF front-end, the BAW is also<br />

used <strong>in</strong> the frequency synthesizer. A new architecture is<br />

proposed to take advantage of the low-phase noise but<br />

circumvent the limited frequency tun<strong>in</strong>g range of the BAW<br />

VCO. It uses a quasi-harmonic relaxation oscillator featur<strong>in</strong>g a<br />

large tun<strong>in</strong>g range compensat<strong>in</strong>g the limited one of the RF<br />

VCO. This architecture is similar to the one used <strong>in</strong> the radio<br />

that will be used with<strong>in</strong> the PackTime MIP.<br />

The new radio and synthesizer architectures mentioned above<br />

rely heavily on the BAW and silicon resonators developed <strong>in</strong><br />

the RF and Piezoelectric Components platform. These<br />

devices take advantage of the AℓN th<strong>in</strong> film piezo-electric<br />

technology available at <strong>CSEM</strong>. Silicon MEMS resonators can<br />

potentially achieve similar performance to crystal quartz with a<br />

smaller size. However, they suffer from the high temperature<br />

coefficient of silicon and imperatively have to be compensated<br />

<strong>in</strong> temperature. This can be done electronically by us<strong>in</strong>g an<br />

on-chip temperature sensor or by deposit<strong>in</strong>g an additional<br />

layer of proper thickness made of SiO2 hav<strong>in</strong>g a positive<br />

temperature coefficient. Two families of Si-resonators have<br />

been developed: temperature compensated 20 to 140 KHz<br />

flexural resonators and high-Q 1 MHz extensional resonators.<br />

These MEMS are activated thanks to an AℓN piezoelectric<br />

layer, mak<strong>in</strong>g them compatible with the voltages used <strong>in</strong><br />

SoCs.<br />

The four technology platforms are evolv<strong>in</strong>g towards ever more<br />

complex systems comb<strong>in</strong><strong>in</strong>g the different technologies. In this<br />

sense there is clearly a convergence of the overall <strong>research</strong><br />

activity <strong>in</strong> this field. This concentration should help to solve the<br />

important challenges that lie ahead. Among those we can<br />

mention the migration towards ultra deep sub-micron CMOS<br />

process, with its <strong>in</strong>herent leakage and parameter variability<br />

issues. Also, the packag<strong>in</strong>g rema<strong>in</strong>s the ma<strong>in</strong> issue for<br />

comb<strong>in</strong><strong>in</strong>g MEMS and SoC together for new low-power and<br />

ultra m<strong>in</strong>iaturized systems. It is the believe of <strong>CSEM</strong> that the<br />

Integrated Systems for Information Technology platform is<br />

well armed to face and solve these important challenges!<br />

23

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