handbook of carbon, graphite, diamond and fullerenes

xviii Contents
4.0 NATURAL AND HIGH-PRESSURE SYNTHETIC
DIAMOND PRODUCTION 290
4.1 Introduction 290
4.2 Gemstones and Industrial Diamond 290
4.3 Production of Natural Diamond 291
4.4 The Diamond Gemstone Market 292
4.5 High-Pressure Synthetic Diamond Production 292
5.0 INDUSTRIAL APPLICATIONS OF NATURAL AND
HIGH-PRESSURE SYNTHETIC DIAMONDS 292
5.1 Industrial Diamond Powder, Grit, and Stones 293
5.2 Diamond Cutting and Grinding Tools 294
5.3 Thermal Management (Heat Sink) Applications 297
5.4 Miscellaneous Applications 298
REFERENCES 300
13 CVD Diamond 302
1.0 INTRODUCTION 302
1.1 Historical Perspective 303
1.2 CVD-Diamond Coatings 303
2.0 DEPOSITION MECHANISM OF CVD DIAMOND 305
2.1 Basic Reaction 305
2.2 Deposition Mechanism and Model 305
2.3 Role of Atomic Hydrogen 306
2.4 Effect of Oxygen and Oxygen Compounds 307
2.5 Halogen-Based Deposition 308
3.0 CVD DIAMOND PROCESSES 309
3.1 General Characteristics 309
3.2 Types of Plasma 310
3.3 Glow-Discharge (Microwave) Plasma Deposition 311
3.4 Plasma-Arc Deposition 314
3.5 Thermal CVD (Hot Filament) 317
3.6 Combustion Synthesis (Oxy-Acetylene Torch) 318
3.7 Diamond from 12C Isotope 318
3.8 Nucleation and Structure 319
3.9 Substrate Preparation and Adhesion 319
3.10 Oriented and Epitaxial Growth 320
3.11 Morphology 321
4.0 PROPERTIES OF CVD DIAMOND 321
4.1 Summary of Properties 321
4.2 Thermal Properties 322
4.3 Optical Properties 323
4.4 Electronic and Semiconductor Properties 324
4.5 Mechanical Properties 324
4.6 Chemical Properties 324