handbook of carbon, graphite, diamond and fullerenes

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Molded Graphite 115 • Barrel-type wafer holders for epitaxial deposition (Fig. 5.15) • Liners for electron-beam evaporation • Rresistance-heated jigs for brazing and glass-to-metal sealing • Electrodes for polycrystalline-silicon deposition • Boats for reduction heating of germanium oxide • Anodes for power tubes and high-voltage rectifiers In some of these applications, it is necessary to coat the surface of the molded graphite with a more inert coating such as pyrolytic graphite, boron nitride (BN) or silicon carbide (SiC), to prevent contamination and reaction with the graphite at high temperature. The coating is usually done by CVD as reviewed in Ch. 7. Quartz-lined Graphite Crucible Seed Crystal Graphite Support Clip wwwwwv^ Rotary Chuck Growing Crystal Graphite s Heater Figure 5.14. Czochralski apparatus for crystal growth of silicon. Molten Silicon
116 Carbon, Graphite, Diamond, and Fullerenes Figure 5.15. Graphite barrel holder for semiconductor wafer processing. (Photograph courtesy Sign Great Lakes Corp., Niagara Falls, NY.) 4.4 Electrical Applications Electrical applications of molded graphite are well established and the material has been a standard for many years due to its chemical inertness, good electrical conductivity and ability to withstand the heat of electrical arcing with minimum damage. The following is a list of current applications: • Brushes for electric motors • Current-collecting shoes for railroad conductor rails • Heating elements for high-temperature furnaces • Electrodes for lighting, electrical-discharge machining (EDM), and electric-arc furnaces • Fuel-cell components • Anodes, cathodes, and buss bars of zinc-chloride, zincbromide, and other advanced batteries
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HANDBOOK OF CARBON, GRAPHITE, DIAMO
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Contents 1 Introduction and General
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xii Contents 5.0 ELECTRICAL PROPERT
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xiv Contents 2.0 THE CVD OF PYROLYT
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xvi Contents 6.0 CERAMIC-MATRIX, CA
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xviii Contents 4.0 NATURAL AND HIGH
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xx Contents 2.0 STRUCTURE OF THE FU
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Preface ix technology, processes, e
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2 Carbon, Graphite, Diamond, and Fu
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10 Carbon, Graphite, Diamond, and F
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Page 137 and 138: Vitreous Carbon 1.0 GENERAL CONSIDE
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8 Carbon Fibers 1.0 GENERAL CONSIDE
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Applications of Carbon Fibers 1.0 C
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10 Natural Graphite, Graphite Powde
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11 Structure and Properties of Diam
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12 Natural and High-Pressure Synthe
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13 CVD Diamond 1.0 INTRODUCTION The
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15 The Fullerene Molecules 1.0 GENE
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Glossary Ablation: The removal of m
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Index Ablation 38 Absorption bands
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Copyright © 1993 by Noyes Publicat
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vi Series HANDBOOK OF CHEMICAL VAPO
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