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3.0 CVD DIAMOND PROCESSES 3.1 General Characteristics CVD Diamond 309 As mentioned above, the carbon species must be activated since at low pressure, graphite is thermodynamicaiiy stable, and without activation, only graphite would be formed (see Ch. 11, Sec. 3.2). Activation is obtained by two basic methods: high temperature and plasma, both of which requiring a great deal of energy. Several CVD processes based on these two methods are presently in use. These processes are continuously being expanded and improved and new ones are regularly proposed. The four most important at this time are: high-frequency (glow) plasma, plasma arc, thermal CVD, and combustion synthesis (oxy-acetylene torch). Their major characteristics are summarized in Table 13.4.t 6 l Table 13.4. Characteristics of Diamond Deposition Processes Activation Method Process Glow-discharge plasma Arc plasma Thermal Combustion Microwave RF DC Arc RFArc Hot-filament Torch Substrate Deposition Temperature Main Rate Control Product (0.1 (50- (0.1 Low - 10pm/h) High 1000pm/h) Low - 10pm/h) High Good Poor Plates Good Plates Poor Coating Coating Coating Coating Powder
310 Carbon, Graphite, Diamond, and Fullerenes 3.2 Types of Plasma Most diamond-deposition processes require a plasma. As the temperature of a gas is increased, its atoms are gradually ionized, that is, they are stripped of their electrons and a plasma is formed which consists of ions (positive charge), electrons (negative charge), and atoms that have not been ionized (neutral) J 21 1 Two types of plasma are currently used for the deposition of diamond: glow-discharge plasma (non-isothermal) and arc plasma (isothermal). Their characteristics are shown in Table 13.5 and are described in more detail in the following sections. Table 13.5. Characteristics of Plasmas for Diamond Deposition 1211 Plasma Type Frequency Power Flow rate Electron concentration Pressure Electron temperature Atom temperature Glow-Discharge Non-Isothermal (non-equilibrium) 50 kHz - 3.45 MHz and 2.45 GHz (microwave) 1 -100kW mg/s 109-ioi W 200 Pa-0.15 atm 500 K Arc Isothermal (equilibrium) -1 MHz 1 - 20 MW none 10 14 /cm 3 0.15-1 atm I^K
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HANDBOOK OF CARBON, GRAPHITE, DIAMO
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Contents 1 Introduction and General
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xii Contents 5.0 ELECTRICAL PROPERT
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xiv Contents 2.0 THE CVD OF PYROLYT
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xvi Contents 6.0 CERAMIC-MATRIX, CA
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xviii Contents 4.0 NATURAL AND HIGH
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xx Contents 2.0 STRUCTURE OF THE FU
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Preface ix technology, processes, e
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2 Carbon, Graphite, Diamond, and Fu
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10 Carbon, Graphite, Diamond, and F
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Synthetic Carbon and Graphite: Carb
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100 Carbon, Graphite, Diamond, and
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Vitreous Carbon 1.0 GENERAL CONSIDE
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8 Carbon Fibers 1.0 GENERAL CONSIDE
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Applications of Carbon Fibers 1.0 C
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10 Natural Graphite, Graphite Powde
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11 Structure and Properties of Diam
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Glossary Ablation: The removal of m
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Index Ablation 38 Absorption bands
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Copyright © 1993 by Noyes Publicat
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vi Series HANDBOOK OF CHEMICAL VAPO
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