Physical Principles of Electron Microscopy: An Introduction to TEM ...
Physical Principles of Electron Microscopy: An Introduction to TEM ...
Physical Principles of Electron Microscopy: An Introduction to TEM ...
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<strong>TEM</strong> Specimens and Images 119<br />
From the velocity triangle <strong>of</strong> Fig. 4-19a, the angle <strong>of</strong> deflection <strong>of</strong> the<br />
electron (due <strong>to</strong> the magnetic field inside the specimen) is<br />
�� tan� = vx /vz � vx /v = (e/m)(Bt/v) (4.26)<br />
Taking B = 1.5 T, t = 100 nm, v = 2.1 � 10 8 m/s, and m = 1.3 �10 -30 kg (for<br />
E0 = 200 keV), Eq. (4.26) gives �� 0.1 mrad. The deflection is therefore<br />
small but can be detected by focusing on a plane sufficiently far above or<br />
below the specimen (see Fig. 4-19a) so that the magnetic domains become<br />
visible, as in Fig. 4-19b.<br />
With the objective lens (focal length f ) turned on, this deflection causes<br />
a y-displacement (<strong>of</strong> each diffraction spot) equal <strong>to</strong> �� f at the objectiveaperture<br />
plane, due <strong>to</strong> electrons that have passed through adjacent domains.<br />
This can be sufficient <strong>to</strong> produce an observable splitting <strong>of</strong> the spots in the<br />
electron-diffraction pattern recorded from a crystalline specimen. If the <strong>TEM</strong><br />
objective aperture or illumination tilt is adjusted <strong>to</strong> admit only one spot from<br />
a pair, a Foucault image is produced in which adjacent magnetic domains<br />
appear with different intensity. Its advantage (over a Fresnel image) is that<br />
the image appears in focus and can have good spatial resolution, allowing<br />
crystalline defects such as grain boundaries <strong>to</strong> be observed in relation <strong>to</strong> the<br />
magnetic domains (Shindo and Oikawa, 2002).<br />
4.10 <strong>TEM</strong> Specimen Preparation<br />
We have seen earlier in this chapter that electrons are strongly scattered<br />
within a solid, due <strong>to</strong> the large forces acting on an electron when it passes<br />
through the electrostatic field within each a<strong>to</strong>m. As a result, the thickness <strong>of</strong><br />
a <strong>TEM</strong> specimen must be very small: usually in the range 10 nm <strong>to</strong> 1 �m.<br />
<strong>TEM</strong> specimen preparation involves ensuring that the thickness <strong>of</strong> at least<br />
some regions <strong>of</strong> the specimen are within this thickness range. Depending on<br />
the materials involved, specimen preparation can represent the bulk <strong>of</strong> the<br />
work<br />
involved in transmission electron microscopy.<br />
Common methods <strong>of</strong> specimen preparation are summarized in Fig. 4-20.<br />
Practical details <strong>of</strong> these techniques can be found in books such as Williams<br />
and Carter (1996) or Goodhew (1985). Here we just summarize the main<br />
methods, <strong>to</strong> enable the reader <strong>to</strong> get some feel for the principles involved.<br />
Usually the material <strong>of</strong> interest must be reduced in thickness, and the initial<br />
reduction involves a mechanical method. When the material is in the form<br />
<strong>of</strong> a block or rod, a thin (< 1 mm) slice can be made by sawing or cutting.<br />
For hard materials such as quartz or silicon, a “diamond wheel” (a fastrotating<br />
disk whose edge is impregnated with diamond particles) is used <strong>to</strong><br />
provide a relatively clean cut.