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Physical Principles of Electron Microscopy: An Introduction to TEM ...

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76 Chapter 3<br />

resolution (especially if the image is recorded by a camera over a period <strong>of</strong><br />

several seconds). But in order <strong>to</strong> view all possible regions <strong>of</strong> the specimen, it<br />

is also necessary <strong>to</strong> move the specimen horizontally over a distance <strong>of</strong> up <strong>to</strong><br />

3 mm if necessary.<br />

The design <strong>of</strong> the stage must also allow the specimen <strong>to</strong> be inserted in<strong>to</strong><br />

the vacuum <strong>of</strong> the <strong>TEM</strong> column without introducing air. This is achieved by<br />

inserting the specimen through an airlock, a small chamber in<strong>to</strong> which the<br />

specimen is placed initially and which can be evacuated before the specimen<br />

enters the <strong>TEM</strong> column. Not surprisingly, the specimen stage and airlock are<br />

the most mechanically complex and precision-machined parts <strong>of</strong> the <strong>TEM</strong>.<br />

There are two basic designs <strong>of</strong> the specimen stage: side-entry and <strong>to</strong>p-entry.<br />

In a side-entry stage, the specimen is clamped (for example, by a<br />

threaded ring) close <strong>to</strong> the end <strong>of</strong> a rod-shaped specimen holder and is<br />

inserted horizontally through the airlock. The airlock-evacuation valve and a<br />

high-vacuum valve (at the entrance <strong>to</strong> the <strong>TEM</strong> column) are activated by<br />

rotation <strong>of</strong> the specimen holder about its long axis; see Fig. 3-11a.<br />

One advantage <strong>of</strong> this side-entry design is that it is easy <strong>to</strong> arrange for<br />

precision motion <strong>of</strong> the specimen. Translation in the horizontal plane (x and<br />

y directions) and in the vertical (z) direction is <strong>of</strong>ten achieved by applying<br />

the appropriate movement <strong>to</strong> an end-s<strong>to</strong>p that makes contact with the pointed<br />

end <strong>of</strong> the specimen holder. Specimen tilt (rotation <strong>to</strong> a desired orientation)<br />

about the long axis <strong>of</strong> the rod is easily achieved by turning the outside end <strong>of</strong><br />

the specimen holder. Rotation about a perpendicular (horizontal or vertical)<br />

axis can be arranged by mounting the specimen on a pivoted ring whose<br />

orientation is changed by horizontal movement <strong>of</strong> a rod that runs along the<br />

inside <strong>of</strong> the specimen holder. Precise tilting <strong>of</strong> the specimen is sometimes<br />

required in order <strong>to</strong> examine the shape <strong>of</strong> certain features or <strong>to</strong> characterize<br />

the nature <strong>of</strong> microscopic defects in a crystalline material.<br />

A further advantage <strong>of</strong> the side-entry stage is that heating <strong>of</strong> a specimen<br />

is easy <strong>to</strong> arrange, by installing a small heater at the end <strong>of</strong> the specimen<br />

holder, with electrical leads running along the inside <strong>of</strong> the holder <strong>to</strong> a power<br />

supply located outside the <strong>TEM</strong>. The ability <strong>to</strong> change the temperature <strong>of</strong> a<br />

specimen allows structural changes in a material (such as phase transitions)<br />

<strong>to</strong> be studied at the microscopic level.<br />

Specimen cooling can also be achieved, by incorporating (inside the sideentry<br />

holder) a heat-conducting metal rod whose outer end is immersed in<br />

liquid nitrogen (at 77 K). If the temperature <strong>of</strong> a biological-tissue specimen<br />

is lowered sufficiently below room temperature, the vapor pressure <strong>of</strong> ice<br />

becomes low enough that the specimen can be maintained in a hydrated state<br />

during its examination in the <strong>TEM</strong>.

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