Physical Principles of Electron Microscopy: An Introduction to TEM ...

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INDEX Aberrations, 3, 28 axial, 44 chromatic, 33, 48 correction of, 180 spherical, 33, 44 Acceleration of electrons, 67 AEM, 21, 155 Astigmatism, 51, 145 Atomic-force microscope, 24 Airlock, 76 Alignment, of multipoles, 180 of TEM, 12, 40, 75 Amorphous specimens, 100 Analytical microscopy, 155 Anode plate, 67 Aperture, condenser, 72 of the eye, 3 pressure-differential, 149 selected-area, 83 SEM objective, 147 TEM objective, 80 Areal density, 98, 166 Artifacts of image 23, 24, 148 Astigmatism, axial, 51 SEM, 145 TEM condenser, 74 TEM objective, 82, 116 Atom, Bohr model, 155 Rutherford model, 93 Auger electron, 166, 171 Autobias, 61 Axial symmetry, 34, 36 Azimuthal angle, 51, 34, 177 Back-focal plane, 32, 80 Backscattering, 129, 17 Backstreaming, 92 Bend contour, 114 Biological TEM, 79 Biological tissue, 102, 76, 15 Biprism, 185 Bloch waves, 115 Boersch effect, 67 Bohr radius, 155 Bragg reflection, 106 Bremsstrahlung x-rays, 20
198 Index Bright-field image, 100 Brightness, 65 conservation of, 66, 72 Camera length, 110 Cathode material, 60 Cathode-ray tube, 34, 127 Cathodoluminescence, 134 CCD camera, 86 Charging effects, 147 Cleavage, 120 Coefficient, backscattering, 137 chromatic, 51 spherical-aberration, 45 Coherence, 185 Coma, 54 Condenser aperture, 74, 72 Condenser lenses, 70 Condenser-objective lens, 79 Contamination, 92, 82, 152 Confusion, Airy disk of, 4 aberration disk, 33, 47, 49 disk of least, 46 focusing disk of, 28 Contrast, atomic-number, 101 diffraction, 106 light-microscope, 6 mass-thickness, 101 phase, 115 scattering, 101, 80 thickness-gradient, 104 topographical, 131�148 Convergence angle, 66, 72 Cornea, 2 Coulomb interaction, 93 Cross section for scattering, 97 Crossover, 71 Curvature of field, 29, 55 Dedicated STEM, 19, 177 Depth of field, in TEM, 88, 55 in SEM, 145, 18 Depth of focus, in TEM, 87 Defects, crystal, 14, 112, 122, 141 lens, 27, 30, 44, 185 Detector, ADF, 177 Everhart-Thornley, 135 in-lens, 136 Robinson, 138 solid-state, 138 x-ray, 161, 168, 9 Diaphragm, of the eye, 3 TEM condenser, 72 TEM objective, 80 Diffraction, light-optical, 3 electron, 106, 11 Diffraction contrast, 108 Diffraction pattern, 108 Dark-field image, 108 Dead time, 164 Disk of confusion, 4, 28, 33 Disk of least confusion, 46 Dislocations, 14, 112, 183 Dispersion, electron, 172 photon, 33, 142, 161, 168 Distortion, 28, 54 Drift, beam-current, 61 high-voltage, 70, 43, 49 illumination, 75 specimen, 75, 77, 78 STM, 24 Dynamics of scattering, 97
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Physical Principles of Electron Mic
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Ray F. Egerton Department of Physic
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Contents Preface xi 1. An Introduct
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Contents ix 7. Recent Developments
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xii Preface textbooks, such as Will
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2 1.1 Limitations of the Human Eye
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4 Chapter 1 parallel beam of light
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6 Chapter 1 Figure 1-3. One of the
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8 Chapter 1 Figure 1-5. Light-micro
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10 Chapter 1 Figure 1-7. Scanning t
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12 Chapter 1 Figure 1-8. Early phot
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14 Chapter 1 Figure 1-10. JEOL tran
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16 Chapter 1 hydrated. But high-ene
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18 Chapter 1 Figure 1-14. Scanning
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20 Chapter 1 Figure 1-16. Photograp
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22 Chapter 1 visible-light photons
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24 Chapter 1 Typically, the STM hea
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Chapter 2 ELECTRON OPTICS Chapter 1
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Electron Optics 29 a c b object len
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Electron Optics 31 � a n 2 ~1.5
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Electron Optics 33 We can define im
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Electron Optics 35 electron source
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Electron Optics 37 symmetry and use
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Electron Optics 39 As we said earli
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Electron Optics 41 2.4 Focusing Pro
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Electron Optics 43 � = [e/(8mE0)
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Electron Optics 45 image plane. Whe
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Electron Optics 47 procedure that i
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Electron Optics 49 The basic physic
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Electron Optics 51 From Eq. (2.7),
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Electron Optics 53 y +V 1 +V 2 -V 2
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Electron Optics 55 point from the o
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58 Chapter 3 3.1 The Electron Gun T
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60 Chapter 3 The rate of electron e
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62 Chapter 3 electron emission curr
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64 Chapter 3 As seen from the right
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66 Chapter 3 � r r s r � (a) (b
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68 Chapter 3 Table 3-2. Speed v and
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70 Chapter 3 where G is a large amp
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72 Chapter 3 The second condenser (
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74 Chapter 3 Figure 3-9 summarizes
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76 Chapter 3 resolution (especially
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78 Chapter 3 The major advantage of
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80 Chapter 3 contrast (for a given
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82 Chapter 3 A more correct procedu
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84 Chapter 3 diffraction pattern (s
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86 Chapter 3 Nowadays, photographic
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88 Chapter 3 A related concept is d
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90 Chapter 3 molecules, imparting a
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92 Chapter 3 Frequently, liquid nit
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94 Chapter 4 -e -e -e -e +Ze Figure
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96 Chapter 4 � (a) elastic z x m
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98 Chapter 4 � b a (a) (b) Figure
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100 Chapter 4 fraction of electrons
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102 Chapter 4 whose composition or
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104 Chapter 4 replica crystallites
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106 Chapter 4 4.5 Diffraction Contr
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108 Chapter 4 remain undiffracted (
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110 Chapter 4 Close examination of
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112 Chapter 4 Unfortunately, the va
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114 Chapter 4 Crystals can also con
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116 Chapter 4 A simple example of p
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118 Chapter 4 High-magnification ph
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120 Chapter 4 At this stage it is c
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122 Chapter 4 All of the above meth
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124 Chapter 4 The procedures outlin
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126 Chapter 5 specimen scan coils o
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128 Chapter 5 functions with m and
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130 Chapter 5 inelastic collisions
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132 Chapter 5 Figure 5-5. Dependenc
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134 Chapter 5 Figure 5-7. (a) Secon
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136 Chapter 5 Because each secondar
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138 Chapter 5 Backscattered electro
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140 Chapter 5 Whereas Ip remains co
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142 Chapter 5 Figure 5-14. Red, gre
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Page 154 and 155: 146 Chapter 5 just-observable loss
Page 156 and 157: 148 Chapter 5 Section 4-10. Films o
Page 158 and 159: 150 Chapter 5 A backscattered-elect
Page 160 and 161: 152 Chapter 5 One example of this p
Page 162 and 163: Chapter 6 ANALYTICAL ELECTRON MICRO
Page 164 and 165: Analytical Electron Microscopy 157
Page 184 and 185: 178 Chapter 7 Figure 7-1. Modified
Page 186 and 187: 180 Chapter 7 7.2 Aberration Correc
Page 188 and 189: 182 Chapter 7 Besides decreasing th
Page 190 and 191: 184 Chapter 7 7.4 Electron Holograp
Page 192 and 193: 186 Chapter 7 There are now many al
Page 194 and 195: 188 Chapter 7 holography could ther
Page 196 and 197: Appendix MATHEMATICAL DERIVATIONS A
Page 198 and 199: Mathematical Derivations 193 A.2 Im
Page 200 and 201: REFERENCES Binnig, G., Rohrer, H.,
Page 204 and 205: Index 199 EELS, 172 Electromagnetic
Page 206 and 207: Index 201 Principal plane, 32, 80 P
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