Index 201 Principal plane, 32, 80 Probe, electron, 17, 126 scanning, 21 Prism glass, 30 magnetic, 172 Pulse-height analysis, 163 Pump, cryo, 91 diffusion, 89 ion, 90 rotary, 88 turbomolecular, 90 Pupil <strong>of</strong> the eye, 3 Quantum number, 155 Quadrupole, 52, 54, 173 Raster scanning, 17, 126 Radiation damage, 151, 182 Ray diagram, 32, 34 Rayleigh criterion, 4, 81 Refractive index, 8, 30 Relativistic mass, 68 Replica, 103 Resist, 151 Resis<strong>to</strong>r, bias, 61, 70 feedback, 69 Resolution, <strong>of</strong> eye, 5 <strong>of</strong> light microscope, 6 <strong>of</strong> retina, 4 <strong>of</strong> SEM, 144, 125, 126 <strong>of</strong> <strong>TEM</strong>, 82, 180, 182 Richardson law, 59 Ripple, 43, 49, 69 Ronchigram, 182 Rotation angle <strong>of</strong> image, 42 Rutherford scattering, 93, 193 Rydberg energy, 155 Saturated filament, 62 Scanning, digital, 127 raster, 126, 17 Scattering, 93 angular distribution, 97 cross section, 97 elastic, 96 inelastic, 96, 49 Scattering contrast, 80 Scintilla<strong>to</strong>r, 134 Secondary electrons, 17 Screen, SEM display, 128 <strong>TEM</strong> viewing, 85 Screening, 99 SEM, 17, 125 environmental, 149 low-voltage, 149 SE1 component, 143 Shadowing, 104, 136 Single scattering, 99 Spatial resolution, <strong>of</strong> the retina, 4 <strong>of</strong> the eye, 5 <strong>of</strong> a light microscope, 6 Specimen, amorphous, 100 cross-sectional, 124 insulating, 148 polycrystalline, 96 single-crystal, 112 <strong>TEM</strong> thickness, 101, 88 Specimen preparation, SEM, 147 <strong>TEM</strong>, 119 Specimen stage, 75, 57 Spectroscopy, Auger, 171 energy-loss, 172 x-ray, 161, 168 Staining, 6, 15, 101
202 Index Stacking fault, 114 Stage, side-entry, 76 <strong>to</strong>p-entry, 77 S<strong>TEM</strong>, 18, 177 Steradian, 65 Stigma<strong>to</strong>r, 52 condenser, 74 objective, 82, 145 SEM, 145 STM, 21 Surface replica, 103 Symmetry, axial, 34�39 Symmetry, crystal, 112 Synchrotron source, 10 <strong>TEM</strong>, his<strong>to</strong>ry, 11 construction, 57 Thickness fringes, 114 Thickness measurement, 174 Thin-film deposition, 122 Thin-lens approximation, 32 Thinning <strong>of</strong> specimens, 121 Topographic contrast, in SEM, 131 in STM, 22 Tunneling, 21, 63 Ultrafast microscopy, 188 Ultramicro<strong>to</strong>me, 101, 120 Unit cell, 110 Units <strong>of</strong> length, 1 Vacancy clusters, 114 Vacuum system, 88 Viewing screen, 85 Water window, 10 Wavelength, <strong>of</strong> electrons, 11, 117 <strong>of</strong> light, 2 Wehnelt electrode, 61 Wien filter, 183 Work function, 58 Working distance, 143 X-ray, bremsstrahlung, 160 characteristic, 158 X-ray microscope, 9 X-ray spectroscopy, 158, 143 XEDS, 161 XWDS, 168 Y-modulation, 25 Yield, backscattering, 137 fluorescence, 166 secondary-electron, 131 <strong>to</strong>tal-electron, 148 Z-contrast, 101 ZAF correction, 167 Zero-loss peak, 173 Zone plate, 9, 152
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Physical Principles of Electron Mic
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Ray F. Egerton Department of Physic
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Contents Preface xi 1. An Introduct
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Contents ix 7. Recent Developments
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xii Preface textbooks, such as Will
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2 1.1 Limitations of the Human Eye
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4 Chapter 1 parallel beam of light
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6 Chapter 1 Figure 1-3. One of the
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8 Chapter 1 Figure 1-5. Light-micro
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10 Chapter 1 Figure 1-7. Scanning t
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12 Chapter 1 Figure 1-8. Early phot
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14 Chapter 1 Figure 1-10. JEOL tran
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16 Chapter 1 hydrated. But high-ene
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18 Chapter 1 Figure 1-14. Scanning
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20 Chapter 1 Figure 1-16. Photograp
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22 Chapter 1 visible-light photons
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24 Chapter 1 Typically, the STM hea
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Chapter 2 ELECTRON OPTICS Chapter 1
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Electron Optics 29 a c b object len
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Electron Optics 31 � a n 2 ~1.5
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Electron Optics 33 We can define im
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Electron Optics 35 electron source
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Electron Optics 37 symmetry and use
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Electron Optics 39 As we said earli
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Electron Optics 41 2.4 Focusing Pro
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Electron Optics 43 � = [e/(8mE0)
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Electron Optics 45 image plane. Whe
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Electron Optics 47 procedure that i
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Electron Optics 49 The basic physic
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Electron Optics 51 From Eq. (2.7),
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Electron Optics 53 y +V 1 +V 2 -V 2
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Electron Optics 55 point from the o
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58 Chapter 3 3.1 The Electron Gun T
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60 Chapter 3 The rate of electron e
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62 Chapter 3 electron emission curr
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64 Chapter 3 As seen from the right
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66 Chapter 3 � r r s r � (a) (b
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68 Chapter 3 Table 3-2. Speed v and
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70 Chapter 3 where G is a large amp
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72 Chapter 3 The second condenser (
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74 Chapter 3 Figure 3-9 summarizes
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76 Chapter 3 resolution (especially
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78 Chapter 3 The major advantage of
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80 Chapter 3 contrast (for a given
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82 Chapter 3 A more correct procedu
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84 Chapter 3 diffraction pattern (s
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86 Chapter 3 Nowadays, photographic
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88 Chapter 3 A related concept is d
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90 Chapter 3 molecules, imparting a
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92 Chapter 3 Frequently, liquid nit
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94 Chapter 4 -e -e -e -e +Ze Figure
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96 Chapter 4 � (a) elastic z x m
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98 Chapter 4 � b a (a) (b) Figure
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100 Chapter 4 fraction of electrons
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102 Chapter 4 whose composition or
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104 Chapter 4 replica crystallites
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106 Chapter 4 4.5 Diffraction Contr
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108 Chapter 4 remain undiffracted (
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110 Chapter 4 Close examination of
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112 Chapter 4 Unfortunately, the va
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114 Chapter 4 Crystals can also con
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116 Chapter 4 A simple example of p
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118 Chapter 4 High-magnification ph
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120 Chapter 4 At this stage it is c
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122 Chapter 4 All of the above meth
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124 Chapter 4 The procedures outlin
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126 Chapter 5 specimen scan coils o
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128 Chapter 5 functions with m and
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130 Chapter 5 inelastic collisions
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132 Chapter 5 Figure 5-5. Dependenc
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134 Chapter 5 Figure 5-7. (a) Secon
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136 Chapter 5 Because each secondar
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138 Chapter 5 Backscattered electro
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140 Chapter 5 Whereas Ip remains co
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142 Chapter 5 Figure 5-14. Red, gre
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144 Chapter 5 the SE2 and SE3 compo
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146 Chapter 5 just-observable loss
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