Physical Principles of Electron Microscopy: An Introduction to TEM ...

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Ray F. Egerton Department of Physics, University of Alberta 412 Avadh Bhatia Physics Laboratory Edmonton, Alberta, Canada T6G 2R3 Library of Congress Control Number: 2005924717 ISBN-10: 0-387-25800-0 Printed on acid-free paper. ISBN-13: 978-0387-25800-0 © 2005 Springer Science+Business Media, Inc. All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, Inc., 233 Spring St., New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed in the United States of America. (EB) 987654321 springeronline.com
To Maia
Page 2 and 3: Physical Principles of Electron Mic
Page 6 and 7: Contents Preface xi 1. An Introduct
Page 8 and 9: Contents ix 7. Recent Developments
Page 10 and 11: xii Preface textbooks, such as Will
Page 12 and 13: 2 1.1 Limitations of the Human Eye
Page 14 and 15: 4 Chapter 1 parallel beam of light
Page 16 and 17: 6 Chapter 1 Figure 1-3. One of the
Page 18 and 19: 8 Chapter 1 Figure 1-5. Light-micro
Page 20 and 21: 10 Chapter 1 Figure 1-7. Scanning t
Page 22 and 23: 12 Chapter 1 Figure 1-8. Early phot
Page 24 and 25: 14 Chapter 1 Figure 1-10. JEOL tran
Page 26 and 27: 16 Chapter 1 hydrated. But high-ene
Page 28 and 29: 18 Chapter 1 Figure 1-14. Scanning
Page 30 and 31: 20 Chapter 1 Figure 1-16. Photograp
Page 32 and 33: 22 Chapter 1 visible-light photons
Page 34 and 35: 24 Chapter 1 Typically, the STM hea
Page 36 and 37: Chapter 2 ELECTRON OPTICS Chapter 1
Page 38 and 39: Electron Optics 29 a c b object len
Page 40 and 41: Electron Optics 31 � a n 2 ~1.5
Page 42 and 43: Electron Optics 33 We can define im
Page 44 and 45: Electron Optics 35 electron source
Page 46 and 47: Electron Optics 37 symmetry and use
Page 48 and 49: Electron Optics 39 As we said earli
Page 50 and 51: Electron Optics 41 2.4 Focusing Pro
Page 52 and 53: Electron Optics 43 � = [e/(8mE0)
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Electron Optics 45 image plane. Whe
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Electron Optics 47 procedure that i
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Electron Optics 49 The basic physic
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Electron Optics 51 From Eq. (2.7),
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Electron Optics 53 y +V 1 +V 2 -V 2
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Electron Optics 55 point from the o
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58 Chapter 3 3.1 The Electron Gun T
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60 Chapter 3 The rate of electron e
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62 Chapter 3 electron emission curr
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64 Chapter 3 As seen from the right
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66 Chapter 3 � r r s r � (a) (b
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68 Chapter 3 Table 3-2. Speed v and
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70 Chapter 3 where G is a large amp
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72 Chapter 3 The second condenser (
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74 Chapter 3 Figure 3-9 summarizes
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76 Chapter 3 resolution (especially
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78 Chapter 3 The major advantage of
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80 Chapter 3 contrast (for a given
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82 Chapter 3 A more correct procedu
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84 Chapter 3 diffraction pattern (s
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86 Chapter 3 Nowadays, photographic
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88 Chapter 3 A related concept is d
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90 Chapter 3 molecules, imparting a
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92 Chapter 3 Frequently, liquid nit
Page 102 and 103:
94 Chapter 4 -e -e -e -e +Ze Figure
Page 104 and 105:
96 Chapter 4 � (a) elastic z x m
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98 Chapter 4 � b a (a) (b) Figure
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100 Chapter 4 fraction of electrons
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102 Chapter 4 whose composition or
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104 Chapter 4 replica crystallites
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106 Chapter 4 4.5 Diffraction Contr
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108 Chapter 4 remain undiffracted (
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110 Chapter 4 Close examination of
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112 Chapter 4 Unfortunately, the va
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114 Chapter 4 Crystals can also con
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116 Chapter 4 A simple example of p
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118 Chapter 4 High-magnification ph
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120 Chapter 4 At this stage it is c
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122 Chapter 4 All of the above meth
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124 Chapter 4 The procedures outlin
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126 Chapter 5 specimen scan coils o
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128 Chapter 5 functions with m and
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130 Chapter 5 inelastic collisions
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132 Chapter 5 Figure 5-5. Dependenc
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134 Chapter 5 Figure 5-7. (a) Secon
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136 Chapter 5 Because each secondar
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138 Chapter 5 Backscattered electro
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140 Chapter 5 Whereas Ip remains co
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142 Chapter 5 Figure 5-14. Red, gre
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144 Chapter 5 the SE2 and SE3 compo
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146 Chapter 5 just-observable loss
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148 Chapter 5 Section 4-10. Films o
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150 Chapter 5 A backscattered-elect
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152 Chapter 5 One example of this p
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Chapter 6 ANALYTICAL ELECTRON MICRO
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Analytical Electron Microscopy 157
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178 Chapter 7 Figure 7-1. Modified
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180 Chapter 7 7.2 Aberration Correc
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182 Chapter 7 Besides decreasing th
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184 Chapter 7 7.4 Electron Holograp
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186 Chapter 7 There are now many al
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188 Chapter 7 holography could ther
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Appendix MATHEMATICAL DERIVATIONS A
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Mathematical Derivations 193 A.2 Im
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REFERENCES Binnig, G., Rohrer, H.,
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INDEX Aberrations, 3, 28 axial, 44
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Index 199 EELS, 172 Electromagnetic
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Index 201 Principal plane, 32, 80 P
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