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Physical Principles of Electron Microscopy: An Introduction to TEM ...

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24<br />

Chapter 1<br />

Typically, the STM head is quite small, a few centimeters in dimensions;<br />

small size minimizes temperature variations (and therefore thermal drift) and<br />

forces mechanical vibrations (resonance) <strong>to</strong> higher frequencies, where they<br />

are more<br />

easily damped.<br />

The STM was developed at the IBM Zurich Labora<strong>to</strong>ry (Binnig et al.,<br />

1982) and earned two <strong>of</strong> its inven<strong>to</strong>rs the 1986 Nobel prize in Physics<br />

(shared with Ernst Ruska, for his development <strong>of</strong> the <strong>TEM</strong>). It quickly<br />

inspired other types <strong>of</strong> scanning-probe microscope, such as the a<strong>to</strong>mic force<br />

microscope (AFM) in which a sharp tip (at the end <strong>of</strong> a cantilever) is<br />

brought sufficiently close <strong>to</strong> the surface <strong>of</strong> a specimen, so that it essentially<br />

<strong>to</strong>uches it and senses an intera<strong>to</strong>mic force. For many years, this principle had<br />

been applied <strong>to</strong> measure the roughness <strong>of</strong> surfaces or the height <strong>of</strong> surface<br />

steps, with a height resolution <strong>of</strong> a few nanometers. But in the 1990’s, the<br />

instrument was refined <strong>to</strong> give near-a<strong>to</strong>mic resolution.<br />

Initially, the z-motion <strong>of</strong> the cantilever was detected by locating an STM<br />

tip immediately above. Nowadays it is usually achieved by observing the<br />

angular deflection <strong>of</strong> a reflected laser beam while the specimen is scanned in<br />

the x- and y-directions; see Fig. 1-18b. AFM cantilevers can be made (from<br />

silicon nitride) in large quantities, using the same kind <strong>of</strong> pho<strong>to</strong>lithography<br />

process that yields semiconduc<strong>to</strong>r integrated circuits, so they are easily<br />

replaced when damaged or contaminated. As with the STM, scanning-force<br />

images must be examined critically <strong>to</strong> avoid misleading artifacts such as<br />

multiple-tip effects.<br />

The mechanical force is repulsive if the tip is in direct contact with the<br />

sample, but at a small distance above, the tip senses an attractive (van der<br />

Waals) force. Either regime may be used <strong>to</strong> provide images. Alternatively, a<br />

4-quadrant pho<strong>to</strong>detec<strong>to</strong>r can sense <strong>to</strong>rsional motion (twisting) <strong>of</strong> the AFM<br />

cantilever, which results from a sideways frictional force, giving an image<br />

that is essentially a map <strong>of</strong> the local coefficient <strong>of</strong> friction. Also, with a<br />

modified tip, the magnetic field <strong>of</strong> a sample can be moni<strong>to</strong>red, allowing the<br />

direct imaging <strong>of</strong> magnetic data-s<strong>to</strong>rage media materials for example.<br />

Although is more difficult <strong>to</strong> obtain a<strong>to</strong>mic resolution than with an STM,<br />

the AFM has the advantage that it does not require a conducting sample. In<br />

fact, the AFM can operate with its tip and specimen immersed in a liquid<br />

such as water, making the instrument valuable for imaging biological<br />

specimens. This versatility, combined with its high resolution and relatively<br />

moderate cost, has enabled the scanning probe microscope <strong>to</strong> take over some<br />

<strong>of</strong> the applications previously reserved for the SEM and <strong>TEM</strong>. However,<br />

mechanically scanning large areas <strong>of</strong> specimen is very time-consuming; it is<br />

less feasible <strong>to</strong> zoom in and out (by changing magnification) than with an

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