Physical Principles of Electron Microscopy: An Introduction to TEM ...

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Index 199 EELS, 172 Electromagnetic spectrum, visible region, 2 ultraviolet region, 8 x-ray region, 9 Electron, backscattered, 128 penetration depth, 129 primary, 17 secondary, 17, 128 Electron gun, 58 Electron range, 129 Electron volt (eV), 5, 67 Electron source, 65 virtual, 71 Elemental map, 143, 174 Emission of electrons, field, 62 Schottky, 62, 191 thermionic, 58 Energy, Fermi, 58 vacuum, 58 Energy loss, 95, 172 Energy spread, 48, 182 EPMA, 169 Escape depth, 131 Etching, 7, 122 Extinction distance, 115 Feedback, 22, 61, 70 FIB machine, 122 Field, depth of, 88, 145 Field emission, 19 Field of view, 6 Fluorescence yield, 166 Flyback, 127 Focal length, 32, 41 Focusing, dynamic, 147 ideal, 27 magnetic lens, 41 Focusing power, 41 Fourier transform, 187 Fresnel fringe, 116 Fringing field, 39 Gaussian image plane, 44 Gun, electron, 57 High-voltage generator, 68 Hologram, 184 Human vision, 2 Hysteresis effects, 82, 111 Impact parameter, 97, 191 Ionization edge, 173 Illumination conditions, 72 Illumination shift and tilt, 75 Illumination system, 57 Image, atomic-column, 179 backscattered, 137 CL, 141 cross-sectional, 124 definition, 27 EBIC, 139 Foucault, 119 Lorentz, 118 plan-view, 124 real, 2, 33 retinal, 2 secondary-electron, 131 specimen-current, 139 shadow, 185 single-atom, 20 stroboscopic, 141 virtual, 33 voltage-contrast, 141 Imaging lenses, 57, 78 Immersion lens, 8, 43, 78 Impact parameter, 97, 193 Interaction volume, 129 Inelastic scattering, 96
200 Index Inner-shell ionization, 174, 20 Iris of the eye, 3 k-factor, 166 Kinematics of scattering, 93 Lattice, 106 Lattice parameter, 110 Lens, convex, 30 diverging, 43 eye, 3 einzel, 35 electrostatic, 34 immersion, 8, 43 magnetic, 35 multipole, 180 quadrupole, 54, 52, 173 SEM, 125, 146 TEM condenser, 70 TEM imaging, 78 Lithography, 151 Lorentzian function, 41 Magnetic force, 35 Magnification, 28 angular, 4 empty, 6 minimum, 5 SEM, 128 TEM, 83 Mass-thickness, 129, 101 Maxwell, imaging rules, 27, 127 Microscope, atomic-force, 24 biological, 6, 79 compound, 5 electron, 11 high-voltage, 15 metallurgical, 7 photoelectron, 180 scanning electron, 17 scanning-tunneling, 21 STEM, 7, 11 Miller indices, 110 Misalignment, 40 Monochromator, 182 Monte Carlo calculations, 130 Multichannel analyzer, 163 Nanoprobe, 79, 126 Nanotechnology, 153 Noise, image, 128, 134, 136, 140 in XEDS, 165, 160, 162 O-rings, 40 Objective aperture, 82 Objective lens, 78, 126 Objective stigmator, 82 Optics, electron, 34 geometrical, 32 ion, 43 physical, 32 x-ray, 9, 152 Organelles, 15 Paraxial rays, 30 Phosphor screen, 85, 142 Photographic recording, 85 Photomultiplier tube, 134 Pixels, 128 Plane, back-focal, 32 principal, 32, 80 Plasmon excitation, 173 Point resolution, 47 Poisson statistics, 99 Polepieces, 39 Polycrystalline solid, 96 Post-field, 79 Pre-field, 78
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Physical Principles of Electron Mic
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Ray F. Egerton Department of Physic
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Contents Preface xi 1. An Introduct
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Contents ix 7. Recent Developments
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xii Preface textbooks, such as Will
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2 1.1 Limitations of the Human Eye
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4 Chapter 1 parallel beam of light
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6 Chapter 1 Figure 1-3. One of the
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8 Chapter 1 Figure 1-5. Light-micro
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10 Chapter 1 Figure 1-7. Scanning t
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12 Chapter 1 Figure 1-8. Early phot
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14 Chapter 1 Figure 1-10. JEOL tran
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16 Chapter 1 hydrated. But high-ene
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18 Chapter 1 Figure 1-14. Scanning
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20 Chapter 1 Figure 1-16. Photograp
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22 Chapter 1 visible-light photons
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24 Chapter 1 Typically, the STM hea
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Chapter 2 ELECTRON OPTICS Chapter 1
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Electron Optics 29 a c b object len
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Electron Optics 31 � a n 2 ~1.5
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Electron Optics 33 We can define im
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Electron Optics 35 electron source
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Electron Optics 37 symmetry and use
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Electron Optics 39 As we said earli
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Electron Optics 41 2.4 Focusing Pro
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Electron Optics 43 � = [e/(8mE0)
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Electron Optics 45 image plane. Whe
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Electron Optics 47 procedure that i
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Electron Optics 49 The basic physic
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Electron Optics 51 From Eq. (2.7),
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Electron Optics 53 y +V 1 +V 2 -V 2
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Electron Optics 55 point from the o
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58 Chapter 3 3.1 The Electron Gun T
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60 Chapter 3 The rate of electron e
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62 Chapter 3 electron emission curr
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64 Chapter 3 As seen from the right
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66 Chapter 3 � r r s r � (a) (b
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68 Chapter 3 Table 3-2. Speed v and
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70 Chapter 3 where G is a large amp
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72 Chapter 3 The second condenser (
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74 Chapter 3 Figure 3-9 summarizes
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76 Chapter 3 resolution (especially
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78 Chapter 3 The major advantage of
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80 Chapter 3 contrast (for a given
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82 Chapter 3 A more correct procedu
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84 Chapter 3 diffraction pattern (s
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86 Chapter 3 Nowadays, photographic
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88 Chapter 3 A related concept is d
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90 Chapter 3 molecules, imparting a
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92 Chapter 3 Frequently, liquid nit
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94 Chapter 4 -e -e -e -e +Ze Figure
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96 Chapter 4 � (a) elastic z x m
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98 Chapter 4 � b a (a) (b) Figure
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100 Chapter 4 fraction of electrons
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102 Chapter 4 whose composition or
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104 Chapter 4 replica crystallites
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106 Chapter 4 4.5 Diffraction Contr
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108 Chapter 4 remain undiffracted (
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110 Chapter 4 Close examination of
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112 Chapter 4 Unfortunately, the va
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114 Chapter 4 Crystals can also con
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116 Chapter 4 A simple example of p
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118 Chapter 4 High-magnification ph
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120 Chapter 4 At this stage it is c
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122 Chapter 4 All of the above meth
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124 Chapter 4 The procedures outlin
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126 Chapter 5 specimen scan coils o
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128 Chapter 5 functions with m and
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130 Chapter 5 inelastic collisions
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132 Chapter 5 Figure 5-5. Dependenc
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134 Chapter 5 Figure 5-7. (a) Secon
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136 Chapter 5 Because each secondar
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138 Chapter 5 Backscattered electro
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140 Chapter 5 Whereas Ip remains co
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142 Chapter 5 Figure 5-14. Red, gre
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144 Chapter 5 the SE2 and SE3 compo
Page 154 and 155: 146 Chapter 5 just-observable loss
Page 156 and 157: 148 Chapter 5 Section 4-10. Films o
Page 158 and 159: 150 Chapter 5 A backscattered-elect
Page 160 and 161: 152 Chapter 5 One example of this p
Page 162 and 163: Chapter 6 ANALYTICAL ELECTRON MICRO
Page 164 and 165: Analytical Electron Microscopy 157
Page 184 and 185: 178 Chapter 7 Figure 7-1. Modified
Page 186 and 187: 180 Chapter 7 7.2 Aberration Correc
Page 188 and 189: 182 Chapter 7 Besides decreasing th
Page 190 and 191: 184 Chapter 7 7.4 Electron Holograp
Page 192 and 193: 186 Chapter 7 There are now many al
Page 194 and 195: 188 Chapter 7 holography could ther
Page 196 and 197: Appendix MATHEMATICAL DERIVATIONS A
Page 198 and 199: Mathematical Derivations 193 A.2 Im
Page 200 and 201: REFERENCES Binnig, G., Rohrer, H.,
Page 202 and 203: INDEX Aberrations, 3, 28 axial, 44
Page 206 and 207: Index 201 Principal plane, 32, 80 P
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