Physical Principles of Electron Microscopy: An Introduction to TEM ...

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Index 201 Principal plane, 32, 80 Probe, electron, 17, 126 scanning, 21 Prism glass, 30 magnetic, 172 Pulse-height analysis, 163 Pump, cryo, 91 diffusion, 89 ion, 90 rotary, 88 turbomolecular, 90 Pupil of the eye, 3 Quantum number, 155 Quadrupole, 52, 54, 173 Raster scanning, 17, 126 Radiation damage, 151, 182 Ray diagram, 32, 34 Rayleigh criterion, 4, 81 Refractive index, 8, 30 Relativistic mass, 68 Replica, 103 Resist, 151 Resistor, bias, 61, 70 feedback, 69 Resolution, of eye, 5 of light microscope, 6 of retina, 4 of SEM, 144, 125, 126 of TEM, 82, 180, 182 Richardson law, 59 Ripple, 43, 49, 69 Ronchigram, 182 Rotation angle of image, 42 Rutherford scattering, 93, 193 Rydberg energy, 155 Saturated filament, 62 Scanning, digital, 127 raster, 126, 17 Scattering, 93 angular distribution, 97 cross section, 97 elastic, 96 inelastic, 96, 49 Scattering contrast, 80 Scintillator, 134 Secondary electrons, 17 Screen, SEM display, 128 TEM viewing, 85 Screening, 99 SEM, 17, 125 environmental, 149 low-voltage, 149 SE1 component, 143 Shadowing, 104, 136 Single scattering, 99 Spatial resolution, of the retina, 4 of the eye, 5 of a light microscope, 6 Specimen, amorphous, 100 cross-sectional, 124 insulating, 148 polycrystalline, 96 single-crystal, 112 TEM thickness, 101, 88 Specimen preparation, SEM, 147 TEM, 119 Specimen stage, 75, 57 Spectroscopy, Auger, 171 energy-loss, 172 x-ray, 161, 168 Staining, 6, 15, 101
202 Index Stacking fault, 114 Stage, side-entry, 76 top-entry, 77 STEM, 18, 177 Steradian, 65 Stigmator, 52 condenser, 74 objective, 82, 145 SEM, 145 STM, 21 Surface replica, 103 Symmetry, axial, 34�39 Symmetry, crystal, 112 Synchrotron source, 10 TEM, history, 11 construction, 57 Thickness fringes, 114 Thickness measurement, 174 Thin-film deposition, 122 Thin-lens approximation, 32 Thinning of specimens, 121 Topographic contrast, in SEM, 131 in STM, 22 Tunneling, 21, 63 Ultrafast microscopy, 188 Ultramicrotome, 101, 120 Unit cell, 110 Units of length, 1 Vacancy clusters, 114 Vacuum system, 88 Viewing screen, 85 Water window, 10 Wavelength, of electrons, 11, 117 of light, 2 Wehnelt electrode, 61 Wien filter, 183 Work function, 58 Working distance, 143 X-ray, bremsstrahlung, 160 characteristic, 158 X-ray microscope, 9 X-ray spectroscopy, 158, 143 XEDS, 161 XWDS, 168 Y-modulation, 25 Yield, backscattering, 137 fluorescence, 166 secondary-electron, 131 total-electron, 148 Z-contrast, 101 ZAF correction, 167 Zero-loss peak, 173 Zone plate, 9, 152
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Physical Principles of Electron Mic
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Ray F. Egerton Department of Physic
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Contents Preface xi 1. An Introduct
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Contents ix 7. Recent Developments
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xii Preface textbooks, such as Will
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2 1.1 Limitations of the Human Eye
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4 Chapter 1 parallel beam of light
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6 Chapter 1 Figure 1-3. One of the
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8 Chapter 1 Figure 1-5. Light-micro
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10 Chapter 1 Figure 1-7. Scanning t
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12 Chapter 1 Figure 1-8. Early phot
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14 Chapter 1 Figure 1-10. JEOL tran
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16 Chapter 1 hydrated. But high-ene
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18 Chapter 1 Figure 1-14. Scanning
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20 Chapter 1 Figure 1-16. Photograp
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22 Chapter 1 visible-light photons
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24 Chapter 1 Typically, the STM hea
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Chapter 2 ELECTRON OPTICS Chapter 1
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Electron Optics 29 a c b object len
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Electron Optics 31 � a n 2 ~1.5
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Electron Optics 33 We can define im
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Electron Optics 35 electron source
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Electron Optics 37 symmetry and use
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Electron Optics 39 As we said earli
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Electron Optics 41 2.4 Focusing Pro
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Electron Optics 43 � = [e/(8mE0)
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Electron Optics 45 image plane. Whe
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Electron Optics 47 procedure that i
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Electron Optics 49 The basic physic
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Electron Optics 51 From Eq. (2.7),
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Electron Optics 53 y +V 1 +V 2 -V 2
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Electron Optics 55 point from the o
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58 Chapter 3 3.1 The Electron Gun T
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60 Chapter 3 The rate of electron e
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62 Chapter 3 electron emission curr
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64 Chapter 3 As seen from the right
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66 Chapter 3 � r r s r � (a) (b
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68 Chapter 3 Table 3-2. Speed v and
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70 Chapter 3 where G is a large amp
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72 Chapter 3 The second condenser (
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74 Chapter 3 Figure 3-9 summarizes
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76 Chapter 3 resolution (especially
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78 Chapter 3 The major advantage of
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80 Chapter 3 contrast (for a given
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82 Chapter 3 A more correct procedu
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84 Chapter 3 diffraction pattern (s
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86 Chapter 3 Nowadays, photographic
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88 Chapter 3 A related concept is d
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90 Chapter 3 molecules, imparting a
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92 Chapter 3 Frequently, liquid nit
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94 Chapter 4 -e -e -e -e +Ze Figure
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96 Chapter 4 � (a) elastic z x m
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98 Chapter 4 � b a (a) (b) Figure
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100 Chapter 4 fraction of electrons
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102 Chapter 4 whose composition or
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104 Chapter 4 replica crystallites
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106 Chapter 4 4.5 Diffraction Contr
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108 Chapter 4 remain undiffracted (
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110 Chapter 4 Close examination of
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112 Chapter 4 Unfortunately, the va
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114 Chapter 4 Crystals can also con
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116 Chapter 4 A simple example of p
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118 Chapter 4 High-magnification ph
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120 Chapter 4 At this stage it is c
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122 Chapter 4 All of the above meth
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124 Chapter 4 The procedures outlin
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126 Chapter 5 specimen scan coils o
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128 Chapter 5 functions with m and
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130 Chapter 5 inelastic collisions
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132 Chapter 5 Figure 5-5. Dependenc
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134 Chapter 5 Figure 5-7. (a) Secon
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136 Chapter 5 Because each secondar
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138 Chapter 5 Backscattered electro
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140 Chapter 5 Whereas Ip remains co
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142 Chapter 5 Figure 5-14. Red, gre
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144 Chapter 5 the SE2 and SE3 compo
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146 Chapter 5 just-observable loss
Page 156 and 157: 148 Chapter 5 Section 4-10. Films o
Page 158 and 159: 150 Chapter 5 A backscattered-elect
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Page 162 and 163: Chapter 6 ANALYTICAL ELECTRON MICRO
Page 164 and 165: Analytical Electron Microscopy 157
Page 184 and 185: 178 Chapter 7 Figure 7-1. Modified
Page 186 and 187: 180 Chapter 7 7.2 Aberration Correc
Page 188 and 189: 182 Chapter 7 Besides decreasing th
Page 190 and 191: 184 Chapter 7 7.4 Electron Holograp
Page 192 and 193: 186 Chapter 7 There are now many al
Page 194 and 195: 188 Chapter 7 holography could ther
Page 196 and 197: Appendix MATHEMATICAL DERIVATIONS A
Page 198 and 199: Mathematical Derivations 193 A.2 Im
Page 200 and 201: REFERENCES Binnig, G., Rohrer, H.,
Page 202 and 203: INDEX Aberrations, 3, 28 axial, 44
Page 204 and 205: Index 199 EELS, 172 Electromagnetic
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