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tesi R. Miscioscia.pdf - EleA@UniSA

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Chapter 4 123<br />

mobility with the dimension of grains and thus of grain boundaries as<br />

Horowitz et Al. [3] have shown for thiophenes and also in previous<br />

works. The analysis of mobility curves versus gate bias (gate voltagedependent<br />

mobility) has been performed for PMMA samples and<br />

extended for a 225nm PMMA insulator treated in CF4 plasma and<br />

subsequently in PFTEOS:TEOS and a bufferized<br />

PFTEOS:TEOS/PMMA sample.<br />

In the case of PMMA/CF4 treated sample the gate voltage<br />

dependent µFE has showed a typical behavior of dielectrics when<br />

surface treatments are performed. A maximum in the µFE and a value<br />

higher than the equivalent untreated sample can be observed in figure<br />

8.<br />

μ (cm 2 /Vs)<br />

0.20<br />

0.15<br />

0.10<br />

0.05<br />

0.00<br />

-0.05<br />

-20 -15 -10 -5 0 5<br />

V G (V)<br />

figure 8: the effect of CF4 plasma surface treatment on PMMA dielectric. The mobility exhibits a<br />

maximum point and values greater than a plain PMMA OTFT. (PMMA thickness: 225nm)<br />

As it can be seen in figure 8, the untreated PMMA dielectric<br />

exhibits a behavior almost linear for higher gate fields, obeying to the<br />

Necliudov’s empirical model[28] reported in eq. 3 which was already<br />

known for amorphous silicon (a-Si)[30] and its subsequent<br />

developments for PMMA-based OTFTs[29].<br />

eq. 3 <br />

<br />

<br />

<br />

PMMA 225nm<br />

PMMA 225nm - CF4

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