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tesi R. Miscioscia.pdf - EleA@UniSA

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138 Exceptions in morphology-mobility relationship<br />

eq. 6 2<br />

μ(cm 2 V -1 s -1 )<br />

0.07<br />

0.06<br />

0.05<br />

0.04<br />

0.03<br />

0.02<br />

0.01<br />

5<br />

T MN and μ are calculated after Esseni's I ch extraction<br />

PFTEOS:TEOS/PMMA<br />

PFTEOS:TEOS<br />

PMMA 400nm<br />

0.00<br />

0 500 1000 1500 2000 2500<br />

T MN (K)<br />

figure 22: trend inversion in mobility/EMN dependance shown by the comparison between PMMA<br />

(black squares) and PFTEOS:TEOS samples.<br />

Then, if we refer to estimated TMN for PMMA and<br />

PFTEOS:TEOS samples extracted after Esseni’s modeling of Ich, we<br />

can summarize this results in the table 7.<br />

Sample T MN(K) σ<br />

PMMA 115nm 2264 0.49<br />

PMMA 225nm 1685 0.36<br />

PMMA 420nm 649 0.14<br />

PFTEOS:TEOS 270nm 574 0.12<br />

PFTEOS:TEOS/PMMA 270nm 526 0.11<br />

table 7: Gaussian DOS variance estimation by means of MNR application in PMMA and<br />

PFTEOS:TEOS samples<br />

PMMA 225nm<br />

PMMA 115nm

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