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tesi R. Miscioscia.pdf - EleA@UniSA

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Table of acronyms and symbols ______151<br />

PFTEOS 1H,1H,2H,2H-Perfluorodecyl<br />

triethoxysilane<br />

PMMA Poly(methyl methacrylate)<br />

PVP Polyvinyl phenol<br />

Ra Mean Roughness nm<br />

Rq Root Mean Square Roughness nm<br />

RPM Revolutions per minute<br />

RPSQM Revolutions per squared minute<br />

SAM Self-Assembled Monolayer<br />

SAMT Self-Assembled MulTilayer<br />

SCS Semiconductor Characterization<br />

System<br />

SEM Scanning Electron Microscope<br />

SiNx Silicon Nitride<br />

TEOS Tetraethyl Orthosilicate<br />

TGBC Top-Gate/Bottom-Contacts<br />

TGTC Top-Gate/Top-Contacts<br />

TMN Meyer-Neldel Temperature K<br />

UV Ultra-Violet (radiation)<br />

VLSI Very Large Scale Integration<br />

WF Workfunction eV<br />

µFE Field-effect mobility cm 2 /V -1 s -1<br />

µc-Si Micro-crystalline silicon

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