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Superconducting Technology Assessment - nitrd

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ELEMENT 2006<br />

2007 2008 2009 2010<br />

Pilot Line<br />

1st Gen Process<br />

2nd Gen Process<br />

Establish Facility<br />

Prelim Des.<br />

Rules<br />

Proc.<br />

Elements Est.<br />

1st Wafer<br />

Lots<br />

Proc.<br />

Qualified<br />

Prelim Des.<br />

Rules<br />

Proc.<br />

Elements Est.<br />

1st Wafer<br />

Lots<br />

Phase Out<br />

Proc.<br />

Qualified<br />

1st Wafer<br />

Lots<br />

3rd Gen Process<br />

Process Control<br />

Monitor 1(PCM1)<br />

Prelim Des.<br />

Rules<br />

Proc.<br />

Elements Est.<br />

Verification<br />

Vehicles<br />

Std. Eval. Vehicle<br />

1 (SEV1)<br />

PCM2<br />

SEV2<br />

PCM2<br />

SEV2<br />

Manufacturing<br />

Line<br />

1st Gen Process<br />

Establish Facility<br />

Transfer to Volume<br />

Process<br />

Phase Out<br />

2nd Gen Process<br />

Transfer to Volume<br />

Process<br />

Support<br />

Activities<br />

Screening<br />

Low Volume Chip<br />

Screening<br />

Cryo Wafer<br />

Screening<br />

Mfg Volume<br />

Screening<br />

Packaging<br />

1.25”<br />

Carriers<br />

Demo<br />

Carriers<br />

Figure 4-6. Timeline for development of SCE manufacturing capability.<br />

4.6.2 ROADMAP AND FACILITIES STRATEGY – MANUFACTURING FACILITIES<br />

Manufacturing RSFQ IC chips of the required complexity and in the required volumes for petaflops-scale computing<br />

will require investment, both recurring and nonrecurring. The recurring costs are associated with operation of the<br />

fabrication facility, tool maintenance, and accommodation of new tools. These include the costs of staffing<br />

the facility. The nonrecurring costs are mainly associated with the procurement cost of the fabrication tools and<br />

one-time facilities upgrades.<br />

Comparison with the SIA roadmap suggests that 1992 semiconductor technology is comparable to that needed<br />

for petaflops. Advanced lithography tools, such as deep-uv steppers, will provide easy transition to sub-micron<br />

feature sizes with excellent alignment, resolution, and size control. CMP for both oxides and metals will be important<br />

as the number of interconnects increase and feature sizes decrease. Timely procurement of the tools will be necessary<br />

to achieve the technology goals in the time frame indicated.<br />

At present, there are no true production lines for SCE chips anywhere in the world. In discussing the required<br />

manufacturing facilities, the panel assumed a baseline process with 0.8 µm diameter, 20 kA/cm 2 , 5 Nb wiring layers,<br />

and 1,000,000 JJs/chip. In such a facility, SCE IC chip production is expected to fall between 10,000 and 30,000<br />

KGD per year.<br />

92

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