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ICMCTF 2012! - CD-Lab Application Oriented Coating Development

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content. Analyses of the oxidised coatings by X-ray diffraction and Raman<br />

spectroscopy revealed the formation of oxides, in the present case Cr2O3, at<br />

a temperature of 800°C if Fe was present as compared to 900-1000°C for<br />

the reference AlCrN coating.<br />

Fundamentals and Technology of Multifunctional Thin<br />

Films: Towards Optoelectronic Device <strong>Application</strong>s<br />

Room: Pacific Salon 3 - Session C1-1<br />

Recent Advances in Optical Thin Films<br />

Moderator: K. Khajurivala, Janos Technology<br />

Incorporated, US, R. Sczupak, Reynard Corporation, US<br />

10:00am C1-1-1 Manipulation of Photons by Photonic Crystals, S.<br />

Noda (snoda@kuee.kyoto-u.ac.jp), T. Asano, Kyoto University, Japan<br />

INVITED<br />

Photonic crystals are nanostructures for light with periodic refractive index<br />

change. They look like periodic air-hole arrays in regular patterns. By<br />

manipulating the patterns and developing two- or even three-dimensional<br />

structures, various and flexible manipulations of photons become possible.<br />

Our research has demonstrated that photonic crystals indeed allow to<br />

manipulate photons almost on demand and could contribute to broad<br />

applications including communication, information, storage, processing,<br />

and even global energy issues.<br />

For example, we have successfully demonstrated that photonic crystals can<br />

produce photonic nano-devices with the sizes less than 1/100,000 of<br />

conventional on-road devices while achieving excellent optical functions.<br />

These devices are very useful to increase the amount of information in<br />

optical communications. We have also shown that photonic crystals enable<br />

a nanocavity (a cage of light), which can confine light very strongly. The<br />

nanocavity can be used for slowing and even stopping light. In the present<br />

optical signal processing, light signals are at first converted to electronic<br />

signals to store the signals, and then re-converted to light signals. If we<br />

could directly store light as it is, the speed of the signal processing could be<br />

significantly increased. The nanocavity is also important for quantum<br />

information processing and communication, which are considered as the<br />

important candidates for the next generation communication and signal<br />

processing.<br />

Moreover, we have demonstrated that photonic crystals can produce an<br />

unprecedented type of lasers, which cannot be achieved by the conventional<br />

technologies. We found that the photonic-crystal lasers can oscillate in a<br />

perfect single mode in a broad area and produce on-demand beam patterns<br />

with desired characteristics. These results will lead to the realization of<br />

various types of novel light sources; for example, a light source with<br />

extremely high output powers, a super-resolution light source which can be<br />

focused much smaller than the wavelengths, and a light source which can<br />

trap and manipulate nontransparent materials such as small pieces of metals.<br />

These light sources achieved by the photonic-crystal lasers should be very<br />

important for laser processing systems, next generation DVD systems, and<br />

versatile optical tweezers systems, etc.<br />

Our works on photonic crystals will also contribute to address global energy<br />

issues. Photonic crystals can manage light emission and detection, which<br />

has great potentials to produce extremely high-efficient LEDs and solar<br />

cells. These are very important to save huge energies for lightings, and also<br />

to convert efficiently solar energy to electric one.<br />

References:<br />

(1) Noda, et al, Science 289, 604 (2000)., (2) Noda, et al, Nature 407, 608<br />

(2000)., (3) Noda, et al, Science 293, 1123 (2001)., (4) Song, Noda, et al,<br />

Science 300, 1537 (2003)., (5) Akahane, Noda, et al, Nature 425, 944<br />

(2003)., (6) Asano, Noda, Nature 429, doi:10.1038 (2004)., (7) Ogawa,<br />

Noda, et al, Science 305, 227 (2004)., (8) Fujita, Noda, et al, Science<br />

308,1296 (2005)., (9) Song, Noda, et al, Nature Materials 4, 207 (2005).,<br />

(10) Miyai, Noda, et al, Nature 441, 946 (2006)., (11) Noda, Science 314,<br />

260 (2006)., (12) Noda, et al, Nature Photonics 1, 449 (2007)., (13) Song,<br />

Noda, et al, Nature Materials 6, 862 (2007)., (14) Matsubara, Noda, et al,<br />

Science 319, 445 (2008)., (15) Noda, Fujita, Nature Photonics 3, 129<br />

(2009)., (16) Ishizaki, Noda, Nature 460, 367 (2009)., (17) Takahashi,<br />

Noda, et al, Nature Materials 8, 721 (2009)., (18) Kurosaka, Noda, et al,<br />

Nature Photonics, 4, 447 (2010).<br />

10:40am C1-1-3 Phase transformation, structures and properties of<br />

pure and carbon containing titania thin films annealed in air and in<br />

hydrogen, W.C. Lee, M. Wong (mswong@mail.ndhu.edu.tw), National<br />

Dong Hwa University, Taiwan<br />

Pure titania (TiO2) and carbon containing titania(C-TiO2) thin films were<br />

prepared by reactive sputtering titanium metal target and graphite target in<br />

argon–oxygen plasma at 100 °C or below. The as-deposited thin films were<br />

amorphous and subsequently annealed at various temperatures of 300~800<br />

°C in air and H2 atmosphere. The effects of annealing on the thin films were<br />

systematically studied in terms of phase transformation, activation energy,<br />

crystallinity, oxygen vacancies and their optical and photocatalytic<br />

properties. The as-deposited TiO2 transform to anatase at much lower<br />

temperature than C-TiO2. At the same temperature, the H2-annealed films<br />

achieve better crystallinity than the air-annealed. The activation energies of<br />

phase transformation for amorphous to anatase were obtained and the<br />

values are 126 and 47 KJ/mole for air- and H2-annealed pure TiO2,<br />

respectively. The result shows that C-TiO2 need more energy for phase<br />

transformation than pure-TiO2, and the H2 atmosphere was able to lower the<br />

activation energy. Photocatalytic properties of these films were<br />

characterized by degradation of methylene blue under irradiation of visible<br />

light, and the C-TiO2 film annealed at 800°C in H2 possesses the best<br />

performance.<br />

11:00am C1-1-4 Effect of Laser Power on the Microstructure and<br />

Photoluminescence of Silicon-rich Nitride Thin Films by Magnetron<br />

Sputtering, C.K. Chung (ckchung@mail.ncku.edu.tw), C.H. Li, T.S. Chen,<br />

Y.T. Lin, National Cheng Kung University, Taiwan<br />

The silicon nanocrystals embedded in dielectric matrix has been extensively<br />

studied due to quantum confinement effect and luminescence center for a<br />

dramatic improvement of the light generation efficiency in Si nanostructure<br />

for potential applications in Si-based optoelectronic integration circuit .<br />

Beside, in order to form the Si nanocrystals, conventional furnace annealing<br />

at high temperature (over 1000 ° C ) and sufficiently long time on the entire<br />

sample leads to undesirable effects for device production in the post process<br />

. In the article, the CO2 laser annealing method through local heating on<br />

selected area was applied to produce Si nanocrystals from silicon-rich<br />

nitride (SRN) thin films prepared by RF magnetron sputtering via the SRN<br />

target. The various power of CO2 laser irradiation was used for studying the<br />

evolution of micro structure and photoluminescence (PL) of SRN films.<br />

Grazing Incidence X-ray Diffraction, Fourier transform infrared<br />

transmittance spectra, energy dispersive spectroscopy, Transmission<br />

electron microscopy, Raman and photoluminescence spectrum were utilized<br />

to characterize the microstructure and PL behavior of films. The Si<br />

nanocrystals in SRN films are obtained by focusing on sample at a laser<br />

power of 6 W . A broad PL spectrum is observed and suggested the origins<br />

from electro-hole pair recombination in Si nanocrystals or luminescence<br />

center in the band tail. The relationship between the laser power,<br />

microstructure and PL behavior of SRN films is discussed and established.<br />

11:20am C1-1-5 ZnO light-emitting diodes and laser diodes, X.W. Sun<br />

(exwsun@ntu.edu.sg), Nanyang Technological University, Singapore<br />

INVITED<br />

In this paper, we present our recent works on ZnO light-emitting devices<br />

including homojunction nanorod light-emitting diodes, optically pumped<br />

whispering-gallery-mode (WGM) lasing and electrically driven WGM<br />

heterojunction laser diodes.<br />

Firstly, by applying plasma immersion ion implantation to modify the<br />

surface of ZnO nanorods grown from pure Zn and oxygen without catalyst,<br />

we found that the electronic defects only reside on the surface. This makes<br />

them easy to be doped to p-type. Then by ion implantation of As and P, we<br />

realized efficient pure UV emitting LEDs. For optically pumped WGM<br />

lasing, we clearly observed the evolution from spontaneous to stimulated<br />

emission from ZnO disks. The lasing process has pronounced excitonic<br />

signature, that is, inelastic exciton-exciton scattering. The observed lasing<br />

modes match well with the theoretical values derived from WGM lasing.<br />

The proof-of-concept sensing application based on ZnO WGM lasing is<br />

also demonstrated. Lastly, we fabricated the ZnO microrod/GaN<br />

heterojunction laser diode, the EL emission mechanism for this diode was<br />

discussed. At the current 12 mA, the WGM lasing with distinct multiplemode<br />

structure was realized. This study indicates that the hexagonal ZnO<br />

microstructure is of potential in microlaser diodes.<br />

3 Monday Morning, April 23, <strong>2012</strong>

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