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ICMCTF 2012! - CD-Lab Application Oriented Coating Development

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damage modes of TiN and TiAlN coated cutting tools and their mechanisms<br />

aiming to improve machinability of high-hardness die and mold steels. For<br />

this purpose, the wear surface and closs-section after cutting was<br />

investigated using FE-EPMA, TEM, and STEM. Particularly, the adhesive<br />

materials formed on the cutting edges were analyzed and tools damage was<br />

studies.<br />

EPMA analysis of tool-work interface showed that the belag was formed on<br />

the coating surface during cutting, which was Mn-Si-O or Al-O. Formation<br />

of the Mn-Si-O based belag could help increasing the cutting speed<br />

compared to formation of an Al-O based belag, while Al-O based belage<br />

was performed as protective layer against wear resistance. The belag<br />

formation was related to the chemical composition of work materials,<br />

chemical composition of the coatings and cutting temperature.<br />

BP-9 Annealing effects on nanostructure and mechanical properties of<br />

laminated Ta–Zr coatings, Y.I. Chen (yichen@mail.ntou.edu.tw), S.M.<br />

Chen, National Taiwan Ocean University, Taiwan<br />

The as-deposited laminated Ta–Zr coatings exhibited nanocrystalline or<br />

amorphous states, depending on the chemical compositions. As annealed in<br />

oxygen containing atmospheres, Zr oxidized preferentially. The hardness<br />

increased as the oxygen content in the coating increased, due to the<br />

formation of ZrO2. To behave as a protective coating applied in high<br />

temperature with an appropriate hardness, such as coatings on glass<br />

molding dies, the coating need to endure annealing treatment in an oxygen<br />

containing atmosphere at 600 o C. In this study, the periods of laminated<br />

coatings were controlled by rotating speeds of the substrate holder. T he<br />

annealing treatments were conducted at 600 o C under atmospheres of 20 and<br />

50 ppm O2-N2, respectively. The variations in crystalline structure,<br />

hardness, surface roughness and chemical composition profiles in depth<br />

after various annealing times were investigated. The lifetime of a protective<br />

Ta–Zr coating was justified by exposed the coating in a 50 ppm O2-N2<br />

environment to achieved a high hardness of 10 GPa and then annealed in a<br />

20 ppm O2-N2 atmosphere for long times.<br />

BP-10 Influence of thickness on mechanical and corrosion properties<br />

of Ti-Si-N coatings on D2 steel by unbalanced magnetron sputtering.,<br />

Y.K. Cheng, G.P. Yu, J.H. Huang (jhhuang@mx.nthu.edu.tw), National<br />

Tsing Hua University, Taiwan<br />

In order to fulfill the requirements in industrial applications, hard coatings<br />

possessing both high hardness and good corrosion resistance are demanded.<br />

Ti-Si-N is one of the coatings that have been extensively studied in recent<br />

years. Most studies on Ti-Si-N coatings were focused on the hardening<br />

mechanisms due to structure evolution, composition variation, or impurity<br />

effect; however, few studies have been performed on the relation between<br />

residual stress and thickness variation. In this study, a series of Ti-Si-N<br />

coatings were deposited on AISI D2 tool steel without interlayer using<br />

unbalanced magnetron sputtering at different deposition durations. The<br />

coating thickness of all specimens was larger than 1μm. The purpose of this<br />

study was to investigate the mechanical properties and corrosion resistance<br />

of the Ti-Si-N coatings. X-ray diffraction results showed that the thick Ti-<br />

Si-N coatings were composed of nanocrystalline TiN and amorphous Si3N4.<br />

<strong>Coating</strong> thickness was obtained from focused ion beam (FIB) measurement.<br />

X-ray photoelectron spectroscopy (XPS) was used to characterize the<br />

bonding state and compositions of the coatings. The hardness of the<br />

coatings was measured by nanoindentation. The residual stress was<br />

determined by modified sin 2 ψ x-ray diffraction and laser curvature methods<br />

to explore the residual stress state and stress distribution in the coatings.<br />

The adhesion of Ti-Si-N coatings was evaluated by scratch test. The<br />

influence of the coating thickness on corrosion resistance was evaluated by<br />

potentiodynamic scan and salt spray test. From the corrosion results, the<br />

thick Ti-Si-N coatings could effectively prevent the D2 steel from<br />

corrosion. The hardness of the coatings was related to the compositions and<br />

texture. The coating thickness was correlated to the residual stress, where a<br />

critical stress was found for the spallation of the coatings.<br />

BP-11 Effect of Nitrogen Flow Rate on The Structure And Mechanical<br />

Properties of TiZrN Thin Films by Unbalanced Magnetron Sputtering,<br />

C.W. Lu, J.H. Huang, G.P. Yu (gpyu@ess.nthu.edu.tw), National Tsing Hua<br />

University, Taiwan<br />

Nanocrystalline TiZrN films were produced using unbalanced magnetron<br />

sputtering. The aim of this study was to investigate the effect of nitrogen<br />

flow rate on the microstructure and properties of the TiZrN films with<br />

nitrogen flow controlled form 1.3 to 2.5 sccm. Thin films of TiZrN were<br />

deposited by magnetron unbalanced sputtering on our previous optimum<br />

coating conditions for TiZrN. The results of the variation of nitrogen flow<br />

rate did not significantly affect the film thickness. The major effects of the<br />

nitrogen flow rate were on the texture coefficient, N/(Ti, Zr) ratio, hardness,<br />

and resistivity of the TiZrN films. The texture coefficients could be<br />

calculated from the integrated intensity of the corresponding XRD peaks.<br />

Thursday Afternoon Poster Sessions 98<br />

The results indicated that (111) plane was the dominant preferred<br />

orientation for all TiZrN specimens. Two other peaks (200) and (220) of<br />

TiZrN films could be observed for the specimen at higher nitrogen flow<br />

rate. The N/(Ti, Zr) ratio of the TiZrN films increased with respect to the<br />

nitrogen flow rate, but increased slowly as nitrogen flow rate further<br />

increased. Hardness of TiZrN films first increased to its maximum of<br />

33.1GPa and then decreased as nitrogen flow rate further increased. The<br />

result showed that film hardness was not directly dependent on the (111)<br />

preferred orientation. The hardness of TiZrN thin films was due to solid<br />

solution strengthening and nanograin boundary sliding mechanism. The<br />

electrical resistivity and packing density of thin film related to the lattice<br />

defects. Similar to hardness, packing density also increased to a maximum<br />

at a critical nitrogen flow rate and the lowest resistivity corresponded to the<br />

highest packing density.<br />

BP-12 Ternary d-TixTa1-xN: An addition to superhard materials?, L.<br />

Koutsokeras, University of Ioannina, Greece, A. Skarmoutsou, National<br />

Technical University of Athens, Greece, G. Abadias, University of Poitiers,<br />

France, P. Psyllaki, Technological Education Institute of Piraeus, Greece,<br />

C. Charitidis, National Technical University of Athens, Greece, C. Lekka,<br />

P. Patsalas (ppats@cc.uoi.gr), University of Ioannina, Greece<br />

The quest of ultraperformant, hard protective coatings [1] is of major<br />

technological importance due to their applications in cutting tools,<br />

automotive and space industry, among others. Within this framework<br />

materials that exhibit hardness above 40 GPa are considered as superhard.<br />

Supehard materials are usually nanostructured, like the well known nc-<br />

TiN/a-Si3N4 [1]. Recently it was possible to grow the ternary compound d-<br />

TixTa1-xN [2] and its hardness has been measured to be as high as 42 GPa<br />

[3]; the later makes it a strong candidate for being a member of the group of<br />

superhard materials.<br />

In this work, we investigate the effects of composition and microstructure<br />

of d-TixTa1-xN coatings on their mechanical performance. The d-TixTa1-xN<br />

coatings have been grown by dual-cathode magnetron sputtering (DCMS)<br />

and dual ion beam sputtering (DIBS). The DIBS-grown samples exhibit<br />

globular grain morphology and similar grain sizes for all values of x. On the<br />

contrary, the DCMS-grown samples exhibit strong variations of their<br />

microstructure, from globular to strongly columnar, with varying x, as<br />

identified by X-ray Diffraction and Electron Microscopy analyses.<br />

Therefore, by comparing their mechanical performance we can discriminate<br />

the effects of composition and microstructure. The mechanical testing has<br />

been performed in terms of hardness measurements by nanoindentation,<br />

tribological testing by lateral force measurements and wear testing by ball<br />

on disk measurements. According to ab-initio calculations of the elastic<br />

moduli, the pure d-TaN was expected to be the hardest member of the d-<br />

TixTa1-xN family. However, the experimentally produced d-TaN coatings<br />

are defective and underdense [4,5]. Here we prove that alloying TiN with<br />

TaN improves the mechanical performance by stabilizing the rocksalt<br />

structure for Ta-rich ternary d-TixTa1-xN coatings, which are harder than<br />

their constituents (TiN, TaN). Indeed, the Ta-rich d-TixTa1-xN coatings were<br />

superior in most aspects of mechanical testing.<br />

[1] S. Veprek, J. Vac. Sci. Technol. A17, 2401 (1999).<br />

[2] L.E. Koutsokeras, G. Abadias, Ch.E. Lekka, G.M. Matenoglou, D.F.<br />

Anagnostopoulos, G.A. Evangelakis, P. Patsalas, Appl. Phys. Lett. 93,<br />

011904 (2008).<br />

[3] G. Abadias, L.E. Koutsokeras, S.N. Dub, G.N. Tolmachova, A. Debelle,<br />

T. Sauvage, and P. Villechaise<br />

J. Vac. Sci. Technol. A 28, 541 (2010).<br />

[4] C.-S. Shin, D. Gall, P. Desjardins, A. Vailionis, H. Kim, I. Petrov, J.E.<br />

Greene, M. Odén, Appl. Phys. Lett. 75, 3808 (1999).<br />

[5] G.M. Matenoglou, L.E. Koutsokeras, Ch.E. Lekka, G. Abadias, S.<br />

Camelio, G.A. Evangelakis, C. Kosmidis, and P. Patsalas, J. Appl. Phys.<br />

104, 124907 (2008).<br />

BP-13 Paramagnetic centers in hard graphite-like amorphous carbon,<br />

A. Viana, C. Marques (marques@ifi.unicamp.br), Universidade Estadual de<br />

Campinas, Brazil<br />

In this work we investigate the origin of paramagnetic centers in hard<br />

graphite-like amorphous carbon. The films were deposited by 1) plasma<br />

enhanced chemical vapor deposition (PECVD) using the decomposition of<br />

methane (CH4) and 2) sputtering, using an argon ion gun to sputter a pure<br />

graphite target. High concentration of sp 2 films was obtained adopting high<br />

bias in the PECVD technique. These films have small band gap (0.5-1.0eV)<br />

and hardness of approximately 15 GPa. The films prepared by the<br />

sputtering technique have sp 2 concentration of approximately 90 %, zero<br />

energy band gap and hardness of 20-30 GPa. Electron spin resonance (ESR)<br />

was performed at the X-band (9.4 GHz) microwave frequency using 100<br />

kHz field modulation. A non-saturating power of 5 mW was adopted. The<br />

ESR measurements revealed an unexpected low density of paramagnetic

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