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ICMCTF 2012! - CD-Lab Application Oriented Coating Development

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transparent conducting layers. However, the potential for this technique to<br />

produce large area, low-defect ZnO films for electronic devices has largely<br />

been overlooked.<br />

We report on the structural, optical and electrical characteristics of ZnO<br />

films deposited on a-plane sapphire substrates by FCVA. These films<br />

exhibit desirable properties including high transparency, moderate intrinsic<br />

carrier concentrations (10 17 – 10 18 cm -3 ), Hall mobility up to 10 cm 2 /Vs and<br />

low surface roughness (with RMS values typically

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