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ICMCTF 2012! - CD-Lab Application Oriented Coating Development

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Exhibition<br />

Room: Golden Ballroom - Session EX<br />

Exhibition Keynote<br />

Tuesday Morning, April 24, <strong>2012</strong><br />

9:40am EX-1 Rotatable Magnetrons, Today and Tomorrow, R. De<br />

Gryse, Ghent University, Belgium INVITED<br />

The continuously increasing demand for a higher quality of life requires the<br />

fabrication of products with improved functionality at ever decreasing<br />

prices. Moreover, environmental awareness requires that these products are<br />

manufactured with so-called “clean“, technologies. These demands have led<br />

to a rapid technological progress within the thin film industry. Physical<br />

Vapor Deposition (PVD) has been proven able to cope with these<br />

requirements, and within the PVD family, magnetron sputtering in all its<br />

varieties is probably the best known and most widely spread deposition<br />

technology. This success is mainly due to the thin film quality,<br />

reproducibility, and flexibility, as well as the scalability of the sputtering<br />

process. The concept of magnetron sputtering has been used under many<br />

different forms. Probably the best known implementation of magnetically<br />

assisted sputtering is to be found in the “classics“ such as in the planar<br />

magnetrons, either circular or rectangular. However, magnetically assisted<br />

sputtering is also used in many other forms such as inverted magnetrons,<br />

cylindrical-post magnetrons, cylindrical hollow cathode magnetrons, facing<br />

target magnetrons and rotatable cathode magnetrons. This last variety, the<br />

rotatable magnetron, is maybe the least known to the general public but<br />

most intensively used in large area coating applications like in web coating<br />

and glass coating. In this instance, we will focus on rotatable magnetrons,<br />

and their benefits and drawbacks, in addition to their peculiarities. For<br />

example, it turns out that in reactive sputtering their behavior is quite<br />

different in comparison to a rectangular magnetron of similar dimensions.<br />

Also, new trends in rotatable magnetron sputtering will be discussed from a<br />

technological point of view, as well as from the viewpoint of market<br />

demands.<br />

Tuesday Morning, April 24, <strong>2012</strong> 38

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