CSEM Scientific and Technical Report 2008

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CMOS Color Sensing M. Schnieper, A. Luu-Dinh, P. Schueepp The proposal is to replace dye based pixel filters in color image sensors by replicated Zero Order Devices arranged in a Bayer pattern. These novel color filters are manufactured by wafer scale UV-replication. The manufacturing process is greatly simplified as only one single replication step and one thin film evaporation are required to manufacture all color filters and lift-off processes are completely avoided. In addition, the zero-order filters proposed here are completely stable even under harsh conditions. They completely avoid the bleaching problems associated with chemical dyes. Beside their obvious use as picture or recording cameras, color image sensors are used in a very wide range of applications. Today almost all cellular phones and many portable computers and similar electronic equipment have built in color sensors. The most common image sensors are CMOS and CCD devices which can be manufactured in large quantities at low cost. To convert these solid-state image sensors into color sensors, chemical color filters, i.e. dyes, are deposited directly onto the surface of the CMOS or CCD image sensor in a mosaic array of pixel-size filter elements. Photoresists are used to produce these filters by successively depositing and patterning each color layer. The choice of colors can vary from additive (R, G, B) to subtractive (C, M, Y) or combinations of both. Examples of such patterns which match the vision of the human eye are shown in Figure 1. Figure 1: Classical Bayer pattern layout a) CMY, b) RGB (Bayer pattern) Chemical dyes are susceptible to bleaching by UV-radiation which severely limits the useful lifetime of dye-based color filters. As the markets for color sensors are usually very price sensitive, a simpler and reliable color post processing is a further requirement. A new approach for the fabrication of subtractive (C, M, Y) color patterns on top of vision sensors is therefore proposed. Instead of dyes or resists, zero-order devices to fabricate the color patterns are used. Zero-order color filters are made by combining specific subwavelength gratings with an inorganic wave-guiding layer. The grating can be replicated on top of the image sensor by UV casting and the wave-guiding layer is deposited through thermal evaporation. The transmitted and reflected color depends on the correct choice of the grating parameters. By changing the grating period, the reflected color can be tuned over the entire visible spectrum. No dyes or pigments are needed in this approach, which therefore produces long term stable color filters, which are not prone to UV-bleaching. Combining several different gratings in a single replication tool allows fabrication of the zero-order filters with just one replication and one thermal evaporation step. The complexity of the patterning is integrated into one tool. Therefore, the fabrication of the replication tool is more difficult. Several imprint replication steps followed by etching and thermal evaporation steps are required to combine three different subwavelength gratings in the same tool. To avoid scattering losses, it is very important to minimize the step height between adjacent gratings. A SEM picture of a ORMOCER ® replication of this tool is presented in Figure 2. Figure 2: SEM pictures of a sol-gel replicated mould master made of a 3 gratings structure ZOD color filters replicated in ORMOCER ® are shown in Figure 3. These filters are very reliable and insensitive to UV exposure. Encapsulated samples are also not sensitive to mechanical use. It is possible to combine the process described above with microlens arrays replication using the same sol-gel materials but different tools. In such a way complex, highly integrated image sensors with customized spectral characteristics and optimized optical fill factors are obtained. Figure 3: Microscope images made in transmission mode of two final replicated ZOD color filter (CMY) patterns. a) a 60 µm pixel size; b) 30 µm pixel size 39
Integrated Organic Spectrometer on Chip M. Ramuz, D. Leuenberger, C. Winnewisser, G. Nisato A fully organic mini-spectrometer compatible with monolythical integration on optical or bio chips has been developed. It consists of a single-mode waveguide with integrated diffraction grating and a dense array of polymer photodiodes (PPDs) as sensing element. An organic mini-spectrometer represents an important building block for disposable low-cost bio- and chemical sensors. The past few years have seen great advances in lab-on-a-chip (LOC) technologies for genomic, proteomic, and enzymatic analysis [ 1] . The need for low-cost and disposable medical devices has driven the development of these LOC systems. The requirements for future systems can be summarized as follows: systems that are able to process multi-parameter measurements from small volumes of complex fluids with efficiency and speed, without the need for an expert operator. These systems should be inexpensive, but still accurate, reliable and portable. By integrating different functional units for reaction, detection, and separation into a microfluidic channel network, it could become feasible to realize one microchip comprising all features of a complete lab that could be used to perform complex reactions and analyses. Organic optoelectronic devices – due to their potential ease especially in regard to production processes - make them highly attractive for integrated, low cost and niche LOC applications. A major strength of organic optoelectronics, particularly polymer optoelectronics based on solution processing, is the possibility to deposit such semi-conducting inks by additive print processes in defined patterns and areas forming the desired integrated systems. Figure 1: Working principle of the biochip developed within the SEMOFS project. Light is coupled into single mode waveguide where it interacts with the analyte located inside fluidic channel. Changes in the spectrum of the guided light are detected by an array of PPDs [2] . Here, CSEM presents the integration of PPDs onto an optochip forming a hybrid photonic system. This work is partially supported by the European project SEMOFS [ 3] (Surface Enhanced Micro Optical Fluidic Systems) which aims for the development of a fully integrated disposable biosensor (Figure 1). Light from an optically pumped photoluminescent material is coupled evanescently into a single mode waveguide. Guided light interacts with the analyte located in the fluidic and is detected by the integrated mini-spectrometer. The grating acts as dispersive element and diffracts the guided light components to specific out-coupling angles according to their wavelength.The integration of the organic PPD array onto the chip allows to track – in an easy and cheap way – the spectra changes due to interaction with the analyte. PPDs have been optimized in order to be used as a mini organic spectrometer. External Quantum Efficiency (EQE) of 40 PL-material Light source Fluidics Sensing layer Waveguide Substrate Overlap between emission & waveguide mode PPD array 70%, on/off ratio of 10 6 , dark current below 10 nA/cm 2 at -1 V and a lifetime larger than 3000 hours have been obtained [4] . The spectral resolution is determined by the mask layout used to pattern the indium tin oxide (ITO) anode layer. One can define the spectral resolution as follows [2] : g Δλ = Λ Equation 1 d The spectral resolution is defined by the periodicity Λ, the length g of the grating, the distance d between the grating and the PPDs, and as well by the width of each individual PPD. The PPD array is read out by analog to digital converter and the measured spectrum is plotted in Figure 2. In order to verify the correct functioning of the organic spectrometer the spectrum at the out-coupling grating was alternatively measured by a conventional spectrometer. Figure 2: Spectra of the guided light achieved by the organic spectrometer (red-triangle marker) and by an inorganic spectrometer (blue-square marker). Each PPD pixel captures only a small part of the total spectrum; according to the out-coupling angle of the grating. Spectral resolution of Δ ≈ 7 nm FHWM is achieved with this set up. Further experiments with higher resolution ITO mask are currently under way and spectral resolution below 1 nm is expected. Developments of integrated micro optical solution relying on polymer light emitting diodes, waveguides and organic-based spectrometers; will enable alternative, disposable and low cost LOC systems. [1] J. Khandurina, A. Guttman, “Bioanalysis in microfluidic devices,” J Chromatography A., Vol. 943 (2002), 159–183 [2] M. Ramuz, D. Leuenberger, R. Pfeiffer, L. Bürgi, C. Winnewisser, “OLED and OPD-based mini-spectrometer integrated on a single-mode planar waveguide chip”, EPJAP [3] Surface Enhanced Micro Optical Fluidic Systems (SEMOFS), IST-FP6-016768; http://www.semofs.com/ [4] M. Ramuz, L. Bürgi, C. Winnewisser, P. Seitz, “High sensitivity organic photodiodes with low dark currents and increased lifetimes,” Organic Electronics, Vol. 9 (2008)
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Page 4 and 5: CONTENTS PREFACE 5 RESEARCH ACTIVIT
Page 6: PREFACE Dear Reader, In this report
Page 9 and 10: TissueOptics - Portable Pulse Oxime
Page 11 and 12: PackTime - Zero-level Packaging of
Page 13 and 14: BioTool - an Integrated Parallel At
Page 15 and 16: SUMO - SUrface MOdified Vision Syst
Page 17 and 18: SixSense - Six Dimensional Micro Se
Page 20 and 21: MICROELECTRONICS Christian Enz The
Page 22 and 23: Hand Detection Using Boosted Classi
Page 24 and 25: A Low-power 32-bit Dual-MAC 120 µW
Page 26 and 27: Design of RF Passives in 65 nm CMOS
Page 28 and 29: Effect of Size on the Performance o
Page 30: Wireless Sensor Networks Built Usin
Page 33 and 34: Massively Parallel Optical Tomograp
Page 35 and 36: High-speed Imagers P. Buchschacher,
Page 37 and 38: Applications of X-ray Phase Contras
Page 39: Enhanced Visual Chemical Sensor Bas
Page 44 and 45: NANOTECHNOLOGY & LIFE SCIENCES Harr
Page 46 and 47: Polarization Imaging using Nanostru
Page 48 and 49: Plasmon Based All Optical Switch R.
Page 50 and 51: Gold Nanorings from Block Copolymer
Page 52 and 53: J-aggregates inside Mesoporous Meta
Page 54 and 55: Batch Fabrication of Ultrathin Nano
Page 56 and 57: A Liquid Delivery System for Single
Page 58 and 59: On-chip Electrical Characterization
Page 60 and 61: Surfaces that Regulate Cell Growth
Page 62 and 63: Sensing Optical Fibres for Integrat
Page 64 and 65: Miniaturization of an Integrated Op
Page 66 and 67: NANOMEDICINE Peter Seitz The Europe
Page 68 and 69: High-Efficiency X-ray Microscopy an
Page 70 and 71: A Universal Protein Assembler H. Ze
Page 72 and 73: A Microfluidic Chip for Cytotoxicol
Page 74 and 75: The CSEM Electrical Impedance Tomog
Page 76: DNA-fragment Binding Studies on the
Page 79 and 80: Fall Detector in Wrist Device M. Be
Page 81 and 82: Distributed Electronics for Wearabl
Page 83 and 84: Using IEEE 802.15.4 for Athlete Con
Page 85 and 86: Compressed Sensing: Multi-user Impu
Page 87 and 88: Efficient Information Dissemination
Page 89 and 90: A Remote Reconfiguration Mechanism
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European Large Telescope M5 Field S
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Integration and Tests of the Config
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Reaction Sphere for Attitude Contro
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Compact Cell Atomic Clocks and Semi
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Guidance Navigation and Control Sys
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100
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Low Cost Micro Metrology Concept P.
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Static Micromixer with Minimized De
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A Noninvasive Sensor for Fluidic Pr
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Integrated ESR Sensors R. Jose Jame
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Laser Micromachining for Microfluid
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Low-cost Packages for Ultrabright L
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Small Volume Production S. Jeannere
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Engineering of Thin Film Crystallin
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New Technology Platforms Alex Domma
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[18] S. Jeanneret, A. Dommann, N. F
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Proceedings [1] C. Arm, S. Gyger, J
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[37] A. Ridolfi, O. Chételat, J. K
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A. Dommann "Reliability and test fo
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A. Meister, J. Przybylska, P. Niede
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P. Seitz "Advanced Scientific Imagi
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9495.1 LAF CFMCW - Coherent Frequen
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FP6 - NMP NANOSECURE Advanced nanot
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Industrial Property Creativity In 2
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University Institute Professor Fiel
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C. Piguet Microélectronique pour S
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PhD Funded by CSEM Name Professor /
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H. Heinzelmann Evaluator, Austrian
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Headquarters CSEM Centre Suisse d
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CSEM Scientific and Technical Report 2008

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