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CSEM Scientific and Technical Report 2008

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RESEARCH ACTIVITIES IN <strong>2008</strong><br />

Alex Dommann<br />

<strong>CSEM</strong> is proud to offer to its industrial clients a rich portfolio of<br />

technologies <strong>and</strong> a sound know-how of how to apply <strong>and</strong><br />

realize innovative products based on Micro- <strong>and</strong><br />

Nanotechnologies. To maintain this portfolio in a healthy state,<br />

the Swiss Federal <strong>and</strong> Cantonal Governments provide the<br />

necessary funding to run an applied research program. In the<br />

frame of the applied research nine multidisciplinary integrated<br />

projects (MIPs) built on several existing <strong>CSEM</strong> technologies<br />

were launched. MIPs are planned on a tight time-schedule of<br />

typically 2 years from the beginning to the realization of a<br />

demonstrator. Today, industries are looking for complete<br />

solutions. In particular, innovative products exhibit a<br />

technological complexity, which can seldom be h<strong>and</strong>led by a<br />

single technology provider. One of <strong>CSEM</strong> strengths is to offer<br />

this wide spectrum of technologies “under one roof”. Based on<br />

the market-oriented research strategy of <strong>CSEM</strong> nine MIPs<br />

were selected.<br />

TissueOptics – Portable Pulse Oximeter for Outdoor<br />

Activities<br />

Continuous <strong>and</strong> reliable pulse oximetry during motion for<br />

novel body locations which require a reflective measurement<br />

approach remains a scientific <strong>and</strong> technological challenge.<br />

The promising results help <strong>CSEM</strong> to strengthen further its<br />

position in the strategic pulse oximetry domain, as well as to<br />

enlarge its patent portfolio. Moreover, <strong>CSEM</strong> was able to<br />

launch a new application project for a position independent<br />

pulse oximeter. Within the framework of the European Space<br />

Agency Transfer Technology Program the applicability <strong>and</strong><br />

market potential for a pulse oximetry for newborn care will be<br />

evaluated.<br />

Riselon – Using IEEE 802.15.4 for Real-time Visual People<br />

Tracking<br />

In this article <strong>CSEM</strong> presents the realization of a real-time<br />

people tracking system focusing on the implementation of a<br />

suitable communication network, proper sensors preprocessing<br />

<strong>and</strong> fusion of the data harvested by the sensors.<br />

The concept was validated <strong>and</strong> a prototype installed covering<br />

the reception area of the <strong>CSEM</strong> building. This prototype<br />

network is now in operation at the reception area <strong>and</strong> serves<br />

as a show case.<br />

PackTime – Zero-level Packaging of Silicon Time-base for<br />

RTC <strong>and</strong> Reference Frequency Applications<br />

A complete system solution allowing the generation of an<br />

accurate clock from an uncompensated silicon resonator that<br />

is encapsulated in a miniature vacuum-sealed all-silicon<br />

package is presented. A 32 kHz clock with ±5 ppm accuracy<br />

over 0-50°C is demonstrated at 3 µA consumption.<br />

Applications for such clocks span miniature RTC systems <strong>and</strong><br />

MEMS-based wireless sensor networks, where a single<br />

resonator yields both RTC <strong>and</strong> reference frequency functions.<br />

BioTool – an Integrated Parallel Atomic Force Microscopy<br />

Platform for the Life Sciences<br />

An instrument that allows the acquisition in parallel of several<br />

atomic force microscopy images or force curves has been<br />

developed. Data acquisition uses one- or two-dimensional<br />

arrays of cantilevers, <strong>and</strong> can be performed in air or in liquid.<br />

First experimental measurements have demonstrated the<br />

functionality of the platform to operate 2D cantilever arrays in<br />

a liquid environment.<br />

Encoder – Nanometric Resolution Absolute Position<br />

Encoders<br />

A linear, rotary <strong>and</strong> 2D optical, absolute position encoder<br />

principle combines several competitive features such as 26 bit<br />

resolution per 100 mm over a practically infinite range. As an<br />

example, a linear encoder with VGA size image sensor can<br />

yield a 6 bits resolution, which corresponds to a 1’000’000 km<br />

range with a 1 nm resolution. Such solutions may provide a<br />

few cubic centimeter encoder solutions reaching a 1 MHz<br />

sampling rate.<br />

SUMO – SUrface MOdified Vision Systems<br />

In this project <strong>CSEM</strong> investigated the most promising<br />

combinations using replication <strong>and</strong> plasmonic techniques to<br />

achieve stable color, polarization, <strong>and</strong> magnification effects on<br />

top of image sensors. Other aspects include the integration of<br />

OLED light sources at the surface of an image sensor, the use<br />

of thin <strong>and</strong> thick Germanium layers for effective NIR (near-IR)<br />

<strong>and</strong> X-ray direct detectors, <strong>and</strong> finally the integration of a<br />

DSP-core as close as possible to the active imaging part to<br />

locally process huge amounts of raw image data.<br />

Tugon – Micro-spectrometer Demonstrator for Visible,<br />

Near- <strong>and</strong> Mid-infrared Spectroscopy<br />

MEMS based microspectrometers have a huge potential due<br />

to their flexibility, low cost, low mass, small volume <strong>and</strong> power<br />

savings. A compact MEMS-based spectrometer that can<br />

operate in the visible, near-infrared <strong>and</strong> mid-infrared<br />

wavelength ranges, was conceived, designed <strong>and</strong> tested. In<br />

preliminary tests the spectrometer performed measurements<br />

at 1500 nm. The system can acquire data at a rate of about<br />

1 kHz, providing a 1024 point spectrum in about 1 sec.<br />

SixSense – Six Dimensional Micro Sensor for Object<br />

Oriented Robotics<br />

Within the project a concept for generating six dimensional<br />

metrology feedbacks to control tactile movements was<br />

developed. The sensor works in a real absolute measuring<br />

mode <strong>and</strong> needs no reference cycle.<br />

Cost Efficient Energy Harvesting with Solar Isl<strong>and</strong>s<br />

Giant floating isl<strong>and</strong>s will be fitted with solar thermal panels<br />

which will convert solar energy into electricity <strong>and</strong>/or hydrogen.<br />

The aim of the project is to validate the concept <strong>and</strong> prepare<br />

the construction of large isl<strong>and</strong>s. A prototype was built in the<br />

desert of the United Arab Emirates.<br />

In <strong>2008</strong> <strong>CSEM</strong> filed 31 new patent applications, 40 invention<br />

reports were submitted for examination <strong>and</strong> an extension of<br />

20 patents on prior patent applications in different countries<br />

were filed in.<br />

7

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