II International Symposium on Carbon for Catalysis ABSTRACTS

PP-<strong>II</strong>-28
USING OF THE DETONATION NANODIAMONDS FOR THE RESTORATION OF
THE DEFECTED PIEZOELECTRICAL SUBSTRUCTURES
Yusova V.A., Semjonova O.V.
Technical University, Krasnoyarsk, Russia
e-mail: yuzova 2 @ rtf. kgtu. runnet. ru, kipr@rtfu.runnet.ru
The more number of the piezoelectric substructures on the stage of the cleaning, film
precipitation, optical lithography on the surface – acoustics waves (SAW) devices production
is reject as defective. Really, the whole defection of the substructures using in the
technological process exceed 50 percent. The technological process and the piezoelectric
substructures do have the more high cost. Therefore the defective substructures are processed
with the help of the regrinding and mechanical repolishing. The processing is the removal of
the surface layers having the small thickness. For all that the requirement on the surface
plane, parallelness, roughness, lack of the mechanical defections on the working surfaces
must be observed. The standard schemes of the piezoelectric materials grinding and
mechanical polishing (OST 4.054.058-84) do have the high speed of the material surface
layers removal. Therefore these schemes with the using of the polishing tool in the form of
the polirite (OST 4.054.058-84) or diamond (TU 48-4-244-74) suspensions or the diamond
pastes (GOST 25593-83) are not effective in the case of using of the substructures with the
small permit on the thickness.
In the present article the new scheme of the defective substructures restoration is
suggested.
The observation objects were the defected piezokvarse and lithium niobate substructures
with the size of 40 x 20 mm, the thickness of 1,90-1,95 mm and the permit of the thickness –
50-80 µm.
The substructures in the number of 10 were pasted on the metallic disk and were work up
by the grinding machine with the pneumatic regulation of pressure on the substructures. The
three substructure batches (at 30 each) of the each material were worked up. The four
schemes of the substructures processing differ from the abrasive instrument on the mechanical
polishing stage. The optical polirite (TU – 48-4244-73) and nanodiamond water suspensions
(TU 40-2067910-01-91, TU 40-2067910-04-91) with concentration 10 % mass. were
accordingly used in the schemes № 1 and № 2. These suspensions were cleaned of the solid
281