10.07.2015 Views

Navy Electricity and Electronics Training Series - Historic Naval ...

Navy Electricity and Electronics Training Series - Historic Naval ...

Navy Electricity and Electronics Training Series - Historic Naval ...

SHOW MORE
SHOW LESS

Create successful ePaper yourself

Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.

The vacuum evaporation technique is most suitable for deposition of highly reactive materials, suchas aluminum, that are difficult to work with in air. The method is clean <strong>and</strong> allows a better contactbetween the layer of deposited material <strong>and</strong> the surface upon which it has been deposited. In addition,because evaporation beams travel in straight lines, very precise patterns may be produced.CATHODE-SPUTTERING.—A typical cathode-sputtering system is illustrated in figure 1-16.This process is also performed in a vacuum. A potential of 2 to 5 kilovolts is applied between the anode<strong>and</strong> cathode (source material). This produces a GLOW DISCHARGE in the space between the electrodes.The rate at which atoms are SPUTTERED off the source material depends on the number of ions thatstrike it <strong>and</strong> the number of atoms ejected for each ion bombardment. The ejected atoms are depositeduniformly over all objects within the chamber. When the sputtering cycle is completed, the vacuum in thechamber is released <strong>and</strong> the wafers are removed. The masks are then removed from the wafers, leaving adeposit that forms the passive elements of the circuit, as shown in figure 1-17.Figure 1-16.—Cathode-sputtering system.1-16

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!