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CONTENTSChapter 1 Introduction-----
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Chapter 1Introduction-1 -
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Miniaturization with a scaling fact
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Table 1-2: Electrical Properties fo
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LSI fabrication, such as activation
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Table 1-4 shows the properties of t
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1.3 Purpose of My StudyIt is consid
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Chapter 2FabricationAndCharacteriza
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2.1.1 1 Wet Cleaning Method of Sili
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2.1.3 Molecular Beam Deposition (MB
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2.1.4 Rapid Thermal Annealing (RTA)
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2.1.5 Vacuum Evaporation MethodAlum
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1 1 1 t 1 kTC = C + C = εε+ q ε
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In C-V curve, the two type of hyste
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2.2.2 Leakage Current Density-Volta
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2.2.3 Ellipsometry MethodEllipsomet
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3.1 IntroductionIn this chapter, th
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3.3 Electrical Characteristics in t
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Capacitance (µF/cm 2 )21Al/La O /
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Current Density [A/cm 2 ]10 2 10 1A
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3.3.2 Effects of Chemical Oxidation
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3.3.3 Dependence on the Annealing T
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Capacitance (µF/cm 2 )210Al_As-dep
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Capacitance (µF/cm 2 )210Al/La O /
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Al/La O / n-Si(100)/Al2 3 250 o C d
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As the summary of this sub-section,
- Page 55 and 56: Current Density[A/cm 10 2 PDAAs-de
- Page 57 and 58: Equivalent Oxide thickness [nm]32.5
- Page 59 and 60: Figure 3-29 shows the plots of VFB
- Page 61 and 62: 3.4.1.4 Dependence on the Ambience
- Page 63 and 64: V Shift [V]FB0.60.40.20-0.2-0.4-0.6
- Page 65 and 66: Capacitance (µF/cm 2 )21PDA 300 o
- Page 67 and 68: case of aluminum electrodes as comp
- Page 69 and 70: 3.4.2.2 Effects of Chemical Oxidati
- Page 71 and 72: V Shift [V]FB-0.4-0.5-0.6-0.7-0.8-0
- Page 73 and 74: 2.62.5EOT [nm]2.42.3As-depo.2.2PDA_
- Page 75 and 76: Capacitance (µF/cm 2 )21Au_PMA_N2_
- Page 77 and 78: 3.4.2.5 The comparison with the cas
- Page 79 and 80: 3.4.3 Effects of PMA for Platinum U
- Page 81 and 82: 4Pt/La O / n-Si(100)/Al2 3EOT [nm]3
- Page 83 and 84: EOT [nm]2.82.62.42.221.81.6Pt/La O
- Page 85 and 86: On the other hand, there was almost
- Page 87 and 88: V Shift [V]FB0.2Pt/La O / n-Si(100)
- Page 89 and 90: Capacitance (µF/cm 2 )21Pt/La O /
- Page 91 and 92: Capacitance (µF/cm 2 )21Pt_As-depo
- Page 93 and 94: Chapter 4Conclusions- 89 -
- Page 95 and 96: 4.1.2 Summary of the Investigation
- Page 97 and 98: Table 4-2: Summary of my investigat
- Page 99 and 100: esults. The second is the time when
- Page 101 and 102: AluminumAl 2 O 3 or LaAlO 3Al Al Al
- Page 103 and 104: AcknowledgementIn the first place,
- Page 105: Reference[1] International Technolo