Effect of Post Metallization Annealing for La 2 O 3 Thin Film

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of PMA at 300 o C was maintained on a level with the one of as-deposition.And it was also found that the value of EOT in the case of PDA withplatinum upper electrodes became lower as compared with PMA at samecondition likewise for the results of aluminum upper electrodes.Figure 3.54 shows the values of the VFB shift versus annealingtemperature plot for La2O3 thin films with platinum upper electrodes. Itwas found that variations of VFB shift by PMA tended to recover up to 300 o C.However, it was observed that the VFB shifted toward negative side by PMAfrom 400 o C to 600 o C. And it was also observed that the VFB resulting fromPDA shifted toward negative side from the one of as-deposition likewise forthe results of aluminum upper electrodes.2Pt_PMA_300C_10min._N2Pt_PMA_400C_10min._N2Pt_PMA_500C_10min._N2Pt_PMA_600C_10min._N2Pt/La O / n-Si(100)/Al2 3Capacitance (µF/cm 2 )1250 o C depo HF-lastAs-depo. & PMA300 o C to 600 o C10min.N ambient2600 o C500 o C300 o C400 o CIdeal V FB0-1 0 1 2Voltage (V)Figure 3-52: The C-V characteristics dependent on the temperature of PMA- 76 -
4Pt/La O / n-Si(100)/Al2 3EOT [nm]32HF-last 250 o C depoT = 5.6 nmphyPt_As-depo.Pt_PDA_300C_10min._N2Pt_PMA_300C_10min._N2Pt_PMA_400C_10min._N2Pt_PMA_500C_10min._N2Pt_PMA_600C_10min._N210 200 400 600Annealing Temperature [ o C]Figure 3-53: The values of the EOT shift versus annealing temperature plot0Pt/La O / n-Si(100)/Al2 3V Shift [V]FB-0.2-0.4-0.6-0.80 200 400 600Annealing Temperature [ o C]HF-last 250 o C depoN ambience2Pt_As-depo.Pt_PDA_300C_10min._N2Pt_PMA_300C_10min._N2Pt_PMA_400C_10min._N2Pt_PMA_500C_10min._N2Pt_PMA_600C_10min._N2Figure 3-54: The values of the VFB shift versus annealing temperature plot- 77 -
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CONTENTSChapter 1 Introduction-----
Page 5 and 6:
Chapter 1Introduction-1 -
Page 7 and 8:
Miniaturization with a scaling fact
Page 9 and 10:
Table 1-2: Electrical Properties fo
Page 11 and 12:
LSI fabrication, such as activation
Page 13 and 14:
Table 1-4 shows the properties of t
Page 15 and 16:
1.3 Purpose of My StudyIt is consid
Page 17 and 18:
Chapter 2FabricationAndCharacteriza
Page 19 and 20:
2.1.1 1 Wet Cleaning Method of Sili
Page 21 and 22:
2.1.3 Molecular Beam Deposition (MB
Page 23 and 24:
2.1.4 Rapid Thermal Annealing (RTA)
Page 25 and 26:
2.1.5 Vacuum Evaporation MethodAlum
Page 27 and 28:
1 1 1 t 1 kTC = C + C = εε+ q ε
Page 29 and 30: In C-V curve, the two type of hyste
Page 31 and 32: 2.2.2 Leakage Current Density-Volta
Page 33 and 34: 2.2.3 Ellipsometry MethodEllipsomet
Page 35 and 36: 3.1 IntroductionIn this chapter, th
Page 37 and 38: 3.3 Electrical Characteristics in t
Page 39 and 40: Capacitance (µF/cm 2 )21Al/La O /
Page 41 and 42: Current Density [A/cm 2 ]10 2 10 1A
Page 43 and 44: 3.3.2 Effects of Chemical Oxidation
Page 45 and 46: 3.3.3 Dependence on the Annealing T
Page 47 and 48: Capacitance (µF/cm 2 )210Al_As-dep
Page 49 and 50: Capacitance (µF/cm 2 )210Al/La O /
Page 51 and 52: Al/La O / n-Si(100)/Al2 3 250 o C d
Page 53 and 54: As the summary of this sub-section,
Page 55 and 56: Current Density[A/cm 10 2 PDAAs-de
Page 57 and 58: Equivalent Oxide thickness [nm]32.5
Page 59 and 60: Figure 3-29 shows the plots of VFB
Page 61 and 62: 3.4.1.4 Dependence on the Ambience
Page 63 and 64: V Shift [V]FB0.60.40.20-0.2-0.4-0.6
Page 65 and 66: Capacitance (µF/cm 2 )21PDA 300 o
Page 67 and 68: case of aluminum electrodes as comp
Page 69 and 70: 3.4.2.2 Effects of Chemical Oxidati
Page 71 and 72: V Shift [V]FB-0.4-0.5-0.6-0.7-0.8-0
Page 73 and 74: 2.62.5EOT [nm]2.42.3As-depo.2.2PDA_
Page 75 and 76: Capacitance (µF/cm 2 )21Au_PMA_N2_
Page 77 and 78: 3.4.2.5 The comparison with the cas
Page 79: 3.4.3 Effects of PMA for Platinum U
Page 83 and 84: EOT [nm]2.82.62.42.221.81.6Pt/La O
Page 85 and 86: On the other hand, there was almost
Page 87 and 88: V Shift [V]FB0.2Pt/La O / n-Si(100)
Page 89 and 90: Capacitance (µF/cm 2 )21Pt/La O /
Page 91 and 92: Capacitance (µF/cm 2 )21Pt_As-depo
Page 93 and 94: Chapter 4Conclusions- 89 -
Page 95 and 96: 4.1.2 Summary of the Investigation
Page 97 and 98: Table 4-2: Summary of my investigat
Page 99 and 100: esults. The second is the time when
Page 101 and 102: AluminumAl 2 O 3 or LaAlO 3Al Al Al
Page 103 and 104: AcknowledgementIn the first place,
Page 105 and 106: Reference[1] International Technolo
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Effect of Post Metallization Annealing for La 2 O 3 Thin Film

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