Effect of Post Metallization Annealing for La 2 O 3 Thin Film
Effect of Post Metallization Annealing for La 2 O 3 Thin Film
Effect of Post Metallization Annealing for La 2 O 3 Thin Film
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Capacitance (µF/cm 2 )21As-depo.AlAuPMA450 o CAs-depo.PMA300 o C0-2 -1 0 1 2Voltage (V)Figure 3-51: The comparison <strong>of</strong> electrical behavior after PMAbetween gold and aluminum upper electrodes.- 74 -