Effect of Post Metallization Annealing for La 2 O 3 Thin Film
Effect of Post Metallization Annealing for La 2 O 3 Thin Film
Effect of Post Metallization Annealing for La 2 O 3 Thin Film
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Table 4-2: Summary <strong>of</strong> my investigation regarding to EOTDependence onTemperature-PDADependence onTemperature-PMAEOTAluminumGoldPlatinumDecrease not examined not examinedIncrease Decrease IncreaseChemical OxidationTreatment-PDANo Dependence No Dependencenot examinedChemical OxidationTreatment-PMADependence on<strong>Annealing</strong> Time-PDADependence on<strong>Annealing</strong> Time-PMAOxygenAmbience-PDACompared to NitrogenForming gasAmbience-PDACompared to NitrogenOxygenAmbience-PMACompared to NitrogenForming gasAmbience-PMACompared to NitrogenDecrease Decrease not examinedNo Dependence Increase not examinedSlight IncreaseDecreaseNo Dependence Slight IncreaseDecrease(Up to 10minutes)not examinedNo Dependence not examined No DependenceNo Dependence Decrease IncreaseNo Dependence not examined No Dependence- 93 -