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Stereo Scan 440 - DCU

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If preferred the beam alignment can be carried out by observing the screen<br />

brightness while in nonnal mode and adjusting the gun tilt and shift controls to<br />

produce the maximum screen brightness.<br />

Once the filament has been saturated and centred correctly, the system can be<br />

operated as normal and when, on SEM Shutdown, the Operating Conditions are<br />

saved. the system can be brought back to these operating conditions simply by<br />

pressing the RUNUP icon.<br />

~:.- It is worth noting that when SEM Standby is selected. the EHT is removed<br />

from the filament. but filament cu"ent continues to flow through it at a<br />

reduced level. thus keeping the filament wann and improving stability.<br />

Sample Changing<br />

When changing the sample. it is only necessary to close the column isolation<br />

valve before venting the chamber (the gun isolation valve should already be<br />

closed). The filament will remain on during this operation. but the EHT. will be<br />

turned off. When the chamber has been pumped out again and the vacuum ready<br />

state achieved. the column isolation valve can be re-opened. whereupon the EHT<br />

will be switched back on and the image restored. It is advisable at this point to<br />

check the beam alignment by adjusting the Gun tilt for maximum signal<br />

brightness.<br />

2.4 <strong>Scan</strong>ning Transmission Detector<br />

From an Operators' point of view, the S'lEM attachment is comprised of three<br />

main parts:<br />

The detector assembly. which houses the BSD diode. and should be<br />

fitted at the rear of the stage assembly. The detector assembly has a hole<br />

cut out of a metal plate. beneath which can be seen the detector diode.<br />

2. The STEM sample holder which fits onto the SEM ZTR module in place<br />

of the standard SEM carousel. This is a circular assembly. with a series<br />

of small holes on it's perimeter which accommodate the transmission<br />

samples which are held in special holders.<br />

3. The SlEM detector eleCbical feed-through, which is nonnally mounted<br />

on one of the .. ears" of the SEM chamber. The Operator must connect<br />

the cable coming from the SlEM detector to this feedthrough before use<br />

<strong>Stereo</strong>scan <strong>440</strong> Operator Manual

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