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Stereo Scan 440 - DCU

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I~.." - Chapter 3 Advanced Operation 3'-9<br />

3.4. Specimen Charging<br />

Electrons incident upon the sample which do not escape as backscattered or<br />

secondary electrons are absorbed by the sample. Unless these absorbed electrons<br />

can fmd their way to ground (as in a conductive sample) they will remain in the<br />

sample resulting in a negative charge build up exhibited as one of the following<br />

image defects:-<br />

. Loss of image contrast (see Figure 3.4)<br />

. Very bright or dark areas (see Figure 3.5)<br />

. Image or beam shift (shearing) (see Figure 3.6)<br />

Dust and other debris on the sample surface can also charge up, and appear as a<br />

bright area on the image surrounded by a dark region. The charged debris may<br />

deflect secondary electron emission and sometimes the incident beam, causing<br />

dark region and possibly image 'shearing'(see Figure 3.6). H the sample itself is<br />

charging, beam deflection will occur during scanning, the effect being seen as a<br />

slow image drift followed by a jump back to its original position.<br />

FIgUIe 3.4 Loss of Contrast Due to Charging<br />

<strong>Stereo</strong>scan <strong>440</strong> Operator Manual

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