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Stereo Scan 440 - DCU

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3. The retractable backscattered electron detector occupies a fmite space<br />

beneath the fmallens. All parts of the sample should therefore be just<br />

clear, particularly when the dete~r is to be moved in or out of position.<br />

A safe working distance is 12mm.<br />

,4.- The geometry used for X-ray analysis, at a 350 take-off angle, dictates<br />

that the surface to be analysed should be at a working distance of 25mm.<br />

~ An improvement in depth of focus, the vertical distance over which the<br />

sample appears to be in focus, can usually be made by increasing the<br />

working distance. An increased working distance has the effect of<br />

decreasing the angular aperture of the electron beam. (See Figure 3.3)<br />

BEAM<br />

FIgUre 3.3 Enhancement of Depth of Focus<br />

Item 5 above directly conflicts with item 1. However, improvements in depth of<br />

focus are usually required at relatively low magnifications where the minimal<br />

loss of resolution caused by using a longer working distance would not be<br />

noticed. Depth of focus can also be improved by using a smaller aperture, say<br />

30Jlm or 20Jffi1, or by selecting Optibeam depth of focus mode. This selects the<br />

lens settings which give the greatest depth of focus while maintaining the<br />

selected probe current.<br />

<strong>Stereo</strong>scan <strong>440</strong> Operator Manual

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