Stereo Scan 440 - DCU

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"".~-I Chapter 3 Advanced Operation ~l: Figure 3.6/mage Shearing Due to Charging Figure 3.7 Relationship Between Primary Energy Eo and Total Electron Yield T Stereoscan 440 Ooerator Manual
The total electron yield can also be increased by tilting the specimen. A tilt in the region of 20 to 40 will greatly reduce charging. The other most important factor affecting charging is electron "dose rate". This can be defined as the total number of primary electrons per unit area of the specimen as a function of time. In other words, the scan speed of the beam is critically important. It can be seen that on some beam sensitive materials a fast scan speed gives a good screen image with good contrast and topography (see Figure 3.8(a» whilst a slow scan speed, ie for live photography, (see Figure 3.8(b» causes the image to display the defects mentioned previously. The following diagrams illustrate this effect. i~ ~ n I ~ FIgUre 3.8(a) Taken at a fast scan speed The above shows a sample of Ceramic In this case, the image store can be used to acquire the image, with noise reduction if necessary, at a fast scan speed. The stored image can then be photographed or stored to disk. Stereoscan 440 Operator Manual r:I
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All reasonable steps have been take
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Instrument Photographic Choice of I
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iv Contents Chapter 5 - Maintenance
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The specimen chamber of the Slereos
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The User Interface Overview The use
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5. Panel Selection There is one oth
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B If B is pressed. the arrow keys m
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The top window, see Figure 1.3, pro
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Individual items can be selected or
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1~1~ Chapter 1 Getting Started i '
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all the operating conditions of the
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1-20 ~bapter 1 ~g S~ move the mouse
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FIgUre 1.10 Image of First Peak Set
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Chapter 2 This chapter contains the
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Chapter 1. Operation 2--3 " -- Scan
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Chapter 2. Operation 2.,.,5 ,- . ..
Page 34 and 35: , , Chapter 1. ~ - 2-- 7 ""a-uu"" 1
Page 36 and 37: 1. Admit air to the gun. Open the g
Page 38 and 39: Automatic Stage lnitialise The stag
Page 40 and 41: For LaB,:- 1 Press the Emission but
Page 42 and 43: ~I.~ Chapter 2 Operation -'--"=-,'Z
Page 44 and 45: 2-18 Chapter 1. Operation - - - - a
Page 46 and 47: 2-20 Chapter 2. Operation. 1 2 t Se
Page 48 and 49: 2-22 Chapter 1. Operation If the wo
Page 50 and 51: 2-24 Chapter 2 Operation The Zone T
Page 52 and 53: Quad Mode Quad mode is selected fro
Page 54 and 55: 2-28 Chapter 2 Operation . - -, , "
Page 56 and 57: On the histogram display there is a
Page 58 and 59: Panels A panel is a special kind of
Page 60 and 61: current text string). In addition t
Page 62 and 63: Micron Markers Two types of micron
Page 64 and 65: Graticule and Crosshairs Graticule
Page 66 and 67: HRRU Camera This sets the type of c
Page 68 and 69: 2..42 Cbapter 1. Operation ~ I It h
Page 70 and 71: current when the image was saved. T
Page 72 and 73: 2-46 Chapter 2 Operation The Clipbo
Page 74 and 75: Having now become familiar with the
Page 76 and 77: high a probe current, thus the acce
Page 78 and 79: , Chapter 3 Advanced Operation 3-5
Page 80 and 81: 3. The retractable backscattered el
Page 82 and 83: I~.." - Chapter 3 Advanced Operatio
Page 86 and 87: " Chapter 3 Advanced Operation 3-13
Page 88 and 89: Non-Volatile, Non-Conductors If it
Page 90 and 91: The solvent is then allowed to evap
Page 92 and 93: Chapter 3 Advanced ~OD 3-19 -c - -
Page 94 and 95: Other Menu Features The display of
Page 96 and 97: Points and Steps In addition to the
Page 98 and 99: Confirm This instruction check that
Page 100 and 101: ._~ Chapter c" ~ 3 Advanced Operati
Page 102 and 103: Remove Removing a macro from a libr
Page 104 and 105: The position in the list can be con
Page 106 and 107: Install The install option copies t
Page 108 and 109: Chapter 3 AdvancedOperati on 3-35 3
Page 110 and 111: I I PARAMETER I En"ECT OPTIMUM COMM
Page 112 and 113: 4.5. Good Housekeeping, i.e. keepin
Page 114 and 115: Chapter -. 4 System Management - +3
Page 116 and 117: 4.1.5. Directory Contents I \nGA i
Page 118 and 119: 4.3. The User Directory Concept A u
Page 120 and 121: I this be reql!i~. File Types, e.g.
Page 122 and 123: 6-12 Chapter 6 Fault Diagnosis The
Page 124 and 125: 5-2 Chapter 5 Maintenance 5.1.2. Ai
Page 126 and 127: STEEL AND ST ~S STEEL, COPPER AND m
Page 128 and 129: 5-6 Chapter 5 Maintenance Cleaning
Page 130 and 131: Cleaning the Aperture Assembly Vent
Page 132 and 133: PC Related Faults PC related proble
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6-4 Chapter 6 Fault Diagnosis , .".
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6-6 Chapter 6 Fault Diagnosis The I
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6-8 Chapter 6 Fault Diagnosis . 4.
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6-10 Chapter 6 Fault Diagnosis! "I
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This file contains the configuratio
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Please report the problem. F All..E
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Stereoscan 440 Operator Manual NVRA
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6-20 Chapter 6 Fault Diagnosis 4 WW
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Code numbers greater than 40 indica
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WINDOWSTM APPUCA nON ERROR When a W
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Introduction As new Window~ applica
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Appendix ~ The Stereoscan 440 PC! A
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" c., Appeudb C Expansion via the P
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Appendix D Reporting software probl
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Service Manager - SEM Harry M azal
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B-2 Appendix E Options- . Operation
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Controls Angular Measurement The an
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Angular Measurement Each measuremen
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The position of the box can be adju
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I Set the magnification to the requ
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Positioning the Poin~ In Move mode
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&14 Appendix E Options I II Image D
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~ AMaxB This function freezes the i
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Histogram Equalisation The histogra
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Overview The input LUT is used to p
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E-22 Appendix E Options Sawtooth Th
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A group box at the top left of the
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" The communication port used by th
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Selection I The signal mixing panel
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E- 30 Appendix E Options Select one
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E-32 Appendix E Qptions . . High Us
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. The stage Move window comprises a
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Keyboard Control The cursor (arrow)
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E-38 Ap~ ~ Options In addition Macr
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Grainl Grain2 actionedl I To indica
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The function is provided as part of
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Operation Selection Operation of th
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Stage Scan Invalid This indicates i
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E-48 Appendix E Options ~-",,-;,,~_
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Freeze This function will freeze th
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1.21 Trackerbal/ Introduction This
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Controls Display the pop up control
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Operation Configuration XRay Interf
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E-58 Appendix E Options 11_- X Ray
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Intensity Dot Map Set Up In dot map
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The Linescan data is displayed in a
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E-64 AppeDdjx E ~oos ... ~~ full sc
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Annotation A set of annotation labe
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2. 2.1 Stage Motorisation The stage
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Camera Image Select between Live, S
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If the box marked Fast is selected,
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Remove the Camera assembly from the
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~--~- ~- , -~~::~ '#:r: .TungsIen F
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.,, , or_~ :---1 ' ' --~... 'FG'-~-
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Figures 9,10,11,12 Emission Images
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Assembly Assembly . of the STEM det
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4. Select SCM Image from the Specim
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~ ~ ~ ~ E I I I I I I Stereoscan 44
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DOS, 4-1 Dose rate, 3-12 Dual magni
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1-4 Index Rotary pump Oil. 5-2 Oil
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Appendices s+Shift ff ~ I ARRO~ ~ys
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