Stereo Scan 440 - DCU

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The specimen chamber of the Slereoscan 440 holds the specimen to be viewed in such a way that it may be freely manoeuvred during examination. The ~n stage which holds the specimen is attached to the door of the chamber and may be of the normal cartesian type or the Optional eucentric type. The cartesian stage pennits movements of lOOmm in both X and Y directions, 3Omm in the Z direction, 0 to 9(}° tilt and 360° rotation. Control of the stage move~nts may be either manual, from the front of the stage door. or motorised using the Optional stage motorisation package. The stage may be opened for examination once the vacuum within the chamber has been released. 1.1.2. The Vacuum System The operation of the electron optical column and specimen scanning is dependent not only on the presence of a vacuum, but also the degree of vacuum, i.e. the system is safely interlocked so that it is not possible to switch on any of the high voltages until an adequate vacuum is reached. The vacuum system is simple and efficient. A turbomolecular pump, backed by a rotary pump, is mounted on the lower face of the specimen chamber and commences pumping when the system is being evacuated and comes to rest during system venting. The electron gun and column are pumped through the tube running from the left side of the chamber up to the gun section. The only valve in this system is the air-admittance valve attached to the rear of the chamber, which automatically opens when venting is requested. Normal operating vacuum should be in the range to 10-4 to 10-6 torr. No water cooling is required. If the lanthanum hexaboride option is fitted. a greater degree of vacuum is required in the gun section and for this reason provision is made to independently pump the gun and column to a level of about 10-7 torr using an ion-getter pump The pump is mounted on the rear of the gun section and the column may be isolated during specimen exchange by the two valves associated with the LaB6 option. 1.1.3. The Control Console Complete software control of the Stereoscan 440 ~ that operation of the instrument is rather like operating a desktop computer - all operations are controlled through the moose and keyboard. Within the console of the microscope, the computer is used to communicate your operations and commands into actions by the SEM. The PC environment used is Microsofi@ WindowslM 3.11 and the SEM control application (LEO) runs within this well known and easy to use system. Section 1.2 provides an introduction to Window~ and how to use the system of Help provided. If you are unfamiliar Stereoscan 440 Operator Manual
Selecting Help from a Menu Where Help is displayed in a menu (e.g. at the extreme right of the LEO top window) selecting it will display the index to help relating to that window. Selecting Help from a Button Where a button labelled Help appears in a dialog box selecting it will display an index of help relating to the dialog box functions. Context Sensitive Help This is frequently the most useful method of using Help. To select this mode press the shift key and while holding it down press special function key Fl. While in Context sensitive help mode the cursor will be displayed as wherever help infonnation is provided. In this mode mouse selections do not perform their normal operations but display help on the specific item selected . A menu item - describes Some examples of what may be selected are:- . A window background - describes its function the function of the window . A displayed parameter - describes the parameter. and under what conditions it is enabled (useful to discover why a parameter is greyed out). . A toolbar Icon - describes it's function. its use and components . A Panel Background - describes To switch off Context help mode press the key while the context help cursor is displayed. Stereoscan 440 Opera/or Manual
Page 2 and 3: All reasonable steps have been take
Page 4 and 5: Instrument Photographic Choice of I
Page 6 and 7: iv Contents Chapter 5 - Maintenance
Page 10 and 11: The User Interface Overview The use
Page 12 and 13: 5. Panel Selection There is one oth
Page 14 and 15: B If B is pressed. the arrow keys m
Page 16 and 17: The top window, see Figure 1.3, pro
Page 18 and 19: Individual items can be selected or
Page 20 and 21: 1~1~ Chapter 1 Getting Started i '
Page 22 and 23: all the operating conditions of the
Page 24 and 25: 1-20 ~bapter 1 ~g S~ move the mouse
Page 26 and 27: FIgUre 1.10 Image of First Peak Set
Page 28 and 29: Chapter 2 This chapter contains the
Page 30 and 31: Chapter 1. Operation 2--3 " -- Scan
Page 32 and 33: Chapter 2. Operation 2.,.,5 ,- . ..
Page 34 and 35: , , Chapter 1. ~ - 2-- 7 ""a-uu"" 1
Page 36 and 37: 1. Admit air to the gun. Open the g
Page 38 and 39: Automatic Stage lnitialise The stag
Page 40 and 41: For LaB,:- 1 Press the Emission but
Page 42 and 43: ~I.~ Chapter 2 Operation -'--"=-,'Z
Page 44 and 45: 2-18 Chapter 1. Operation - - - - a
Page 46 and 47: 2-20 Chapter 2. Operation. 1 2 t Se
Page 48 and 49: 2-22 Chapter 1. Operation If the wo
Page 50 and 51: 2-24 Chapter 2 Operation The Zone T
Page 52 and 53: Quad Mode Quad mode is selected fro
Page 54 and 55: 2-28 Chapter 2 Operation . - -, , "
Page 56 and 57: On the histogram display there is a
Page 58 and 59:
Panels A panel is a special kind of
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current text string). In addition t
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Micron Markers Two types of micron
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Graticule and Crosshairs Graticule
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HRRU Camera This sets the type of c
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2..42 Cbapter 1. Operation ~ I It h
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current when the image was saved. T
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2-46 Chapter 2 Operation The Clipbo
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Having now become familiar with the
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high a probe current, thus the acce
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, Chapter 3 Advanced Operation 3-5
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3. The retractable backscattered el
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I~.." - Chapter 3 Advanced Operatio
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"".~-I Chapter 3 Advanced Operation
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" Chapter 3 Advanced Operation 3-13
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Non-Volatile, Non-Conductors If it
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The solvent is then allowed to evap
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Chapter 3 Advanced ~OD 3-19 -c - -
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Other Menu Features The display of
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Points and Steps In addition to the
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Confirm This instruction check that
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._~ Chapter c" ~ 3 Advanced Operati
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Remove Removing a macro from a libr
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The position in the list can be con
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Install The install option copies t
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Chapter 3 AdvancedOperati on 3-35 3
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I I PARAMETER I En"ECT OPTIMUM COMM
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4.5. Good Housekeeping, i.e. keepin
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Chapter -. 4 System Management - +3
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4.1.5. Directory Contents I \nGA i
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4.3. The User Directory Concept A u
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I this be reql!i~. File Types, e.g.
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6-12 Chapter 6 Fault Diagnosis The
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5-2 Chapter 5 Maintenance 5.1.2. Ai
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STEEL AND ST ~S STEEL, COPPER AND m
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5-6 Chapter 5 Maintenance Cleaning
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Cleaning the Aperture Assembly Vent
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PC Related Faults PC related proble
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6-4 Chapter 6 Fault Diagnosis , .".
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6-6 Chapter 6 Fault Diagnosis The I
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6-8 Chapter 6 Fault Diagnosis . 4.
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6-10 Chapter 6 Fault Diagnosis! "I
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This file contains the configuratio
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Please report the problem. F All..E
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Stereoscan 440 Operator Manual NVRA
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6-20 Chapter 6 Fault Diagnosis 4 WW
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Code numbers greater than 40 indica
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WINDOWSTM APPUCA nON ERROR When a W
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Introduction As new Window~ applica
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Appendix ~ The Stereoscan 440 PC! A
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" c., Appeudb C Expansion via the P
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Appendix D Reporting software probl
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Service Manager - SEM Harry M azal
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B-2 Appendix E Options- . Operation
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Controls Angular Measurement The an
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Angular Measurement Each measuremen
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The position of the box can be adju
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I Set the magnification to the requ
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Positioning the Poin~ In Move mode
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&14 Appendix E Options I II Image D
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~ AMaxB This function freezes the i
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Histogram Equalisation The histogra
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Overview The input LUT is used to p
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E-22 Appendix E Options Sawtooth Th
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A group box at the top left of the
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" The communication port used by th
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Selection I The signal mixing panel
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E- 30 Appendix E Options Select one
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E-32 Appendix E Qptions . . High Us
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. The stage Move window comprises a
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Keyboard Control The cursor (arrow)
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E-38 Ap~ ~ Options In addition Macr
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Grainl Grain2 actionedl I To indica
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The function is provided as part of
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Operation Selection Operation of th
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Stage Scan Invalid This indicates i
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E-48 Appendix E Options ~-",,-;,,~_
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Freeze This function will freeze th
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1.21 Trackerbal/ Introduction This
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Controls Display the pop up control
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Operation Configuration XRay Interf
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E-58 Appendix E Options 11_- X Ray
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Intensity Dot Map Set Up In dot map
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The Linescan data is displayed in a
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E-64 AppeDdjx E ~oos ... ~~ full sc
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Annotation A set of annotation labe
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2. 2.1 Stage Motorisation The stage
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Camera Image Select between Live, S
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If the box marked Fast is selected,
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Remove the Camera assembly from the
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~--~- ~- , -~~::~ '#:r: .TungsIen F
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.,, , or_~ :---1 ' ' --~... 'FG'-~-
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Figures 9,10,11,12 Emission Images
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Assembly Assembly . of the STEM det
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4. Select SCM Image from the Specim
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~ ~ ~ ~ E I I I I I I Stereoscan 44
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DOS, 4-1 Dose rate, 3-12 Dual magni
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1-4 Index Rotary pump Oil. 5-2 Oil
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Appendices s+Shift ff ~ I ARRO~ ~ys
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