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Stereo Scan 440 - DCU

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Now that the stage has been correctly positioned over the S1EM detector it is<br />

now simply a case of providing the correct SEM operating conditions to provide<br />

good S1EM imaging for the sample being investigated. Typical working<br />

conditions would be<br />

kV<br />

IProbe<br />

WD<br />

20-40kV<br />

5-5OpA<br />

5 - 12rnm (WD is limited by the height of STEM Detector)<br />

All of these parameters depend on the type of work being undertaken and the<br />

resolution required.<br />

The next step is to select the QBSD detector (the SlEM is a BSD variant using<br />

the same input into the SEM) from the Select Signal A in the Detector pull down<br />

panel selected from the Men" Line, and to ensure that the SlEM detector diode<br />

quadrant configuration has been set correctly which is as follows :-<br />

Ql = OFF Q2 = INVERT Q3 = NORMAL Q4=OFF<br />

To achieve STEM imaging all that is now required is to set the Brightness and<br />

Contrast settings to provide the correct video levels for your sample.<br />

2.5 Specimen Current Monitor<br />

The Specimen Current Monitor (SCM) is both a specimen current measurement<br />

tool and an imaging device that can also provide an image of absorbed current<br />

from a sample. It is mounted on the left hand side of the chamber and connects to<br />

the specimen contact feed through on the stage door in place of the specimen<br />

touch alarm cable.<br />

Operation<br />

Image Mode<br />

Select the Specimen Current panel from the Detector menu (not<br />

available on software version VO2.0l). Alternatively, select the<br />

following from the Status! menu - SCM mode, SCM range, SCM<br />

Image, SCM Measure and Specimen I.<br />

2. Obtain a secondary electron image and bring it to focus.<br />

3. Select SCM from the Select Signal A field in the Detector menu<br />

<strong>Stereo</strong>scan <strong>440</strong> Operator Manual

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