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Photonic crystals in biology

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Poster Session, Tuesday, June 15<br />

Theme A1 - B702<br />

Mechanical Transfer of Epitaxially Grown Graphene Layers from SiC to SiO x<br />

Mahmut Tosun, Cem Çelebi, Görkem Soyumer, Anıl Günay, Cenk Yanık, İsmet İ. Kaya<br />

Faculty of Eng<strong>in</strong>eer<strong>in</strong>g and Natural Sciences, Sabanci University, İstanbul 34956, Turkey<br />

Abstract – We study the epitaxial graphene production process from SiC to understand the effects of the parameters such as<br />

pressure and temperature as well as the duration of growth. Furthermore, we <strong>in</strong>vestigate the efficiency of transferr<strong>in</strong>g the<br />

graphene layers from SiC to other substrates by means of mechanical cleavage technique.<br />

Graphene, a recently discovered two dimensional<br />

material has been tak<strong>in</strong>g immense attraction <strong>in</strong><br />

research s<strong>in</strong>ce it presents novel physics and offers a<br />

new era <strong>in</strong> high frequency electronic devices [1].<br />

Although graphene can be produced by many<br />

different methods, epitaxial growth on SiC seems<br />

to be the most promis<strong>in</strong>g way of produc<strong>in</strong>g<br />

graphene for large scale <strong>in</strong>tegration [2]. AFM<br />

measurements of the graphene films show that they<br />

conform to the substrate that they stack. Therefore,<br />

<strong>in</strong> order to have higher mobilities, hav<strong>in</strong>g a<br />

smoother surface is essential [3]. Moreover, the<br />

<strong>in</strong>teraction of the graphene layers with the<br />

underly<strong>in</strong>g substrate is another key parameter <strong>in</strong> the<br />

quality of the graphene films. Therefore an efficient<br />

means of transferr<strong>in</strong>g the epitaxially grown<br />

graphene on to other substrates could improve<br />

garphene device fabrication processes [4].<br />

In this work, we analyzed the yield of graphene<br />

production process by epitaxial growth from SiC.<br />

Furthermore, we study the efficiency of<br />

transferr<strong>in</strong>g the produced graphene layers from SiC<br />

to SiO x . Epitaxial growth of graphene from SiC is<br />

done under high vacuum and high temperatures [5].<br />

Direct current heat<strong>in</strong>g is applied to n-type, H 2<br />

etched 4H-SiC samples. Carbon face of the SiC<br />

samples is chosen for the epitaxial growth due to<br />

hav<strong>in</strong>g rotational stack<strong>in</strong>g on this particular face<br />

which results <strong>in</strong> produc<strong>in</strong>g undoped s<strong>in</strong>gle layer<br />

graphene on the top most layer <strong>in</strong> multilayer films<br />

which ranges from 3 layers to 60 layers [6]. The<br />

growth pressure is varied between 10 -5 mbar to 10 -7<br />

mbar, the duration is varied between 10 m<strong>in</strong>utes to<br />

60 m<strong>in</strong>utes and the temperature is varied between<br />

1350C˚ and 1600C˚.<br />

Characterization of the graphene on SiC samples is<br />

done with Raman spectroscopy, atomic force<br />

microscopy (AFM) low energy electron diffraction<br />

(LEED) and auger electron spectroscopy (AES).<br />

Transfer of the graphene layers from SiC to SiO x is<br />

performed both at ambient pressure and under<br />

vacuum by mechanical cleavage technique. After<br />

the transfer, characterization steps are repeated to<br />

check the efficiency of the transfer.<br />

This work was supported by TUBITAK under<br />

Grant No. TBAG-107T855.<br />

[1] Geim, A.K. Graphene Status and Prospects.<br />

Science 324, 19 June 2009.<br />

[2] Geim, A.K. Novoselov K. S. Rise of Graphene.<br />

Nature Materials 6, March 2007.<br />

[3] Jernigan, [Glenn. Comparison of Epitaxial<br />

Graphene on Si-face and C-face 4H SiC Formed by<br />

Ultrahigh Vacuum and RF Furnace Production.<br />

Nanoletters 9, May 2009.<br />

[4] Caldwell, Joshua. Technique for the Dry<br />

Transfer of Epitaxial Graphene onto Arbitrary<br />

Substrates. ACSNano 4, 2010.<br />

[5]Heer, Walt de. Epitaxial Graphene. Solid State<br />

Communication 143, 2007.<br />

[6]Hass, J. The growth and morphology of epitaxial<br />

multilayer graphene. Journal of Physics:<br />

Condensed Matter 20, 2008.<br />

b.<br />

6th Nanoscience and Nanotechnology Conference, zmir, 2010 368

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