Photonic crystals in biology
Photonic crystals in biology
Photonic crystals in biology
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Poster Session, Tuesday, June 15<br />
Theme A1 - B702<br />
Characterization of Deposited Pd-Zr Th<strong>in</strong> Films By Moleculer Beam Epitaxy<br />
1 *, Abdullah Cahit Karaoglanli 1 and Esref Avci 3<br />
1 Department of Metallurgy and Materials Eng<strong>in</strong>eer<strong>in</strong>g, Sakarya 54187, TURKEY<br />
2 Department of Metallurgy and Materials Engi<br />
Abstract-The results of MBE growth and anneal<strong>in</strong>g of Pd-Zr alloys are described <strong>in</strong> this study. The th<strong>in</strong> films of Pd- Zr alloy s have been<br />
deposited onto Si wafers.Pd80-20Zr, Pd81-19Zr, Pd83-17Zr and Pd85-15Zr th<strong>in</strong> films have been pre heated at 60 °C for 1 hour ,<strong>in</strong> addition we<br />
applied heat treatment at 400 °C and 800 °C for 24 hours. The characterization of the manufactured th<strong>in</strong> films before and after heat treatment<br />
processes have been performed by scann<strong>in</strong>g electron microscopy (SEM), X-ray diffractometer (XRD) and EDX analysis.<br />
Molecular beam epitaxy is also used for the deposition of<br />
some types of semiconductors. MBE (molecular beam<br />
epitaxy) techniques allow the epitaxial growth of different<br />
compounds.<br />
Dop<strong>in</strong>g of Si molecular beam epitaxy (MBE) layers at low<br />
growth temperatures is a widely accepted method[1].The<br />
atoms or molecules <strong>in</strong> the gas deposit on the substrate to<br />
form the grow<strong>in</strong>g solid layer. Typically, each element is<br />
delivered <strong>in</strong> a separately controlled beam, so the choice of<br />
elements and their relative concentrations may be adjusted<br />
for any given layer, thereby def<strong>in</strong><strong>in</strong>g the composition and<br />
electrical characteristics of that layer layer composition[2].<br />
In this study, the th<strong>in</strong> films of Pd-Zr alloys have been<br />
deposited onto Si wafers. We used for the substrate [111]-<br />
oriented Si s<strong>in</strong>gle crystal wafers. Pd80-20Zr, Pd81-19Zr,<br />
Pd83-17Zr and Pd85-15Zr th<strong>in</strong> films were pre heated at<br />
60 °C for 1 hour. In adition to this, we applied to the samples<br />
a heat treatment at 400 °C and 800 °C for 24 hours.<br />
The characterization of the manufactured th<strong>in</strong> films before<br />
and after heat treatment processes have been performed by<br />
scann<strong>in</strong>g electron microscopy (SEM), X-ray diffractometer<br />
(XRD) and EDX analysis.<br />
The results of analysis showed that nanocrystall<strong>in</strong>es has<br />
been modificated <strong>in</strong> the range of 400 °C and 800 °C.<br />
This study was supported by Forschungzentrum Karlsruhe,<br />
*Correspond<strong>in</strong>g author: eliftastaban@gmail.com<br />
[1] [Thompson, K.D. Hobart, M.E. Twigg, S.L. Rommel, N. J<strong>in</strong>,<br />
P.R. Berger, R. Lake, A.C.Seabaugh, P.H. Chi, D.S. Simons, Th<strong>in</strong><br />
Solid Films 380 (2000) 145.,<br />
[2] www.veeco.com<br />
6th Nanoscience and Nanotechnology Conference, zmir, 2010 278