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Nanostructure Science and Technology - World Technology ...

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Appendix D. Site Reports—Japan 275<br />

hard collision); to identify a cluster source; <strong>and</strong> deal with cooling <strong>and</strong><br />

filtration will require specific knowledge for installation to operate<br />

effectively.<br />

To realize soft l<strong>and</strong>ing <strong>and</strong>/or hard collision deposition of clusters on a<br />

substrate, <strong>and</strong> to have ion optics to accelerate <strong>and</strong> deaccelerate ionized<br />

clusters will require specific designing skill.<br />

To control the assembled parameters (parameters to control selfdiffusion,<br />

migration <strong>and</strong>/or coalescence of deposited clusters, as well as the<br />

surface crystallinity of the substrate), including introduction of regular steps<br />

<strong>and</strong>/or kinks <strong>and</strong> termination of crystal bonds of surface atoms, will require<br />

extensive systematic research.<br />

Current Status<br />

These investigations have just begun with the cluster groups in Japan, the<br />

United States, <strong>and</strong> Europe, <strong>and</strong> the work is at a fundamental stage. Rapid<br />

progress will be expected within three to five years if certain research<br />

resources are available.<br />

Time Scale to Completion <strong>and</strong> Manufacturability<br />

It is difficult to estimate the time scale for ultimate application. This will<br />

be very much affected by the nanoscale requirements by semiconductor <strong>and</strong><br />

memory industries. We must identify needs for large capacity <strong>and</strong> high<br />

speed memory requiring relatively small amounts of power.<br />

R&D Philosophy<br />

Our philosophy, directions, <strong>and</strong> basic concept are described in published<br />

brochures.<br />

Overall Japanese R&D Activities on Cluster Engineering<br />

I don’t know the overall R&D of nanotechnology throughout Japan. The<br />

definition of nanotechnology should be defined clearly. As far as I am<br />

concerned with cluster engineering in Japan, here are the other leading<br />

laboratories <strong>and</strong>/or persons working in this area:<br />

1. JRCAT <strong>and</strong> NAIR (AIST, MITI) at Tsukuba: Atom Technologies group,<br />

particularly Dr. Y. Kanayama, (“Atom Technologies” project is a typical<br />

national project on nanostructures <strong>and</strong> being well funded by AIST, MITI)<br />

2. Metal & Inorganic Material Institute, Tohoku Univ. at Sendai: Profs. K.<br />

Suzuki, K. Sumiyama <strong>and</strong> A. Kasuya. They are funded by “Strategic

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