29.08.2014 Views

Nanostructure Science and Technology - World Technology ...

Nanostructure Science and Technology - World Technology ...

Nanostructure Science and Technology - World Technology ...

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

306 Appendix D. Site Reports—Japan<br />

Site:<br />

ULVAC Japan, Ltd.<br />

Vacuum Metallurgical Company (VMC)<br />

516 Yokota, Sanbu-cho, Sanbu-gun<br />

Chiba 289-12, Japan<br />

Fax: (81) 467-87 3383<br />

Date Visited: 23 July 1997<br />

WTEC:<br />

Hosts:<br />

D. Shaw (report author), C. Koch, R.W. Siegel, C. Uyehara<br />

Dr. Chikara Hayashi<br />

Dr. Masaaki Oda<br />

BACKGROUND<br />

The Vacuum Metallurgical Company (VMC) is a subsidiary of ULVAC<br />

Japan, Ltd., which is a relatively large conglomerate of 30 companies<br />

employing over 3,500 people. The principal products of VMC include<br />

sputtering targets; complex shaped Ti-alloy cast parts; reactive <strong>and</strong><br />

refractory metal sheet, wire, <strong>and</strong> shapes; <strong>and</strong> service coating for processing<br />

equipment for semiconductors, display panels, etc.<br />

VMC’s ultrafine-particle (UFP) business is based on early work by Dr.<br />

Hayashi <strong>and</strong> colleagues on gas-phase particle nucleation (evaporation <strong>and</strong><br />

condensation) <strong>and</strong> deposition by using nanoparticles dispersed in tiny gas<br />

jets (in the 10 micron diameter range). VMC commercialized magnetic UFP<br />

in 1971, <strong>and</strong> Dr. Hayashi (at the time, president of ULVAC) served as the<br />

leader of a UFP project in Japan’s Exploratory Research in Advanced<br />

<strong>Technology</strong> (ERATO) program from 1981-1986. ERATO has been<br />

supported by the now renamed government organization, Japan <strong>Science</strong> <strong>and</strong><br />

<strong>Technology</strong> Corporation (JST). The UFP project investigated the physical,<br />

chemical, <strong>and</strong> biological properties of nanoparticles.<br />

Over the years, VMC has improved the magnetic UFP technique <strong>and</strong> now<br />

offers a large quantity of metallic <strong>and</strong> organic particles; gas-evaporation <strong>and</strong><br />

gas-deposition equipment for producing fine pattern of contacts <strong>and</strong><br />

conductive lines for electronic devices; <strong>and</strong> UFP paste (dispersed liquid)<br />

with coating system.<br />

RESEARCH AND DEVELOPMENT HIGHLIGHTS<br />

Although the basic design of the induction-heating chamber for the<br />

ultrafine-particle generation was developed by Hayashi <strong>and</strong> Oda in the

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!