Photonic crystals in biology - NanoTR-VI

PPPoster Session, Thursday, June 17Theme F686 - N1123Fabrication of Ta Nanohillock Array Using AAO/Ta Nanotemplate1222UNevin TaaltnUP P*, Sadullah ÖztürkP P, Necmettin KlnçP P, Zafer Ziya ÖztürkP21PKoç University, Department of Physics, 34450 Istanbul, TurkeyPGebze Institute of Technology, Department of Physics, 41400 Gebze-Kocaeli, TurkeyAbstract-In this study, Ta nanohillock arrays were fabricated with high surface area using AAO/Ta nanotemplate. AAO/Ta nanotemplate wasfabricated by using a two-step anodization of an Al film deposited on Ta foil using evaporation method. Ta nanohillocks were obtained viaanodization process as the nature of the Al-Ta bilayer. The characterization of the AAO/Ta nanotemplate and Ta nanohillock arrays weredetermined by Scanning Electron Microscopy (SEM) and Energy Dispersive X-Ray (EDX). As fabricated AAO/Ta nanotemplate wasapproximately 55 nm in diameters, Ta nanohillocks were obtained approximately 50 nm in diameters.Tantalum (Ta) is a attractive material for electronic industryas a capacitor due to it has a number of properties such asresistance to corrosion, low co-efficient of thermal expansionand high co-efficient of capacitance. Ta nanostructurescompared to Ta thin films are ideal for electronic devices asthey offer high surface area and high capacitive properties [1,2].In this study, Ta nanohillock arrays were fabricated withhigh surface area using AAO/Ta nanotemplate. AAO/Tananotemplate was fabricated by using a two-step anodizationof an Al film deposited on Ta foil using evaporation method.Al film was oxidized anodically in 0.3 M oxalic acid solution.Ta nanohillocks were obtained via anodization process as thenature of the Al-Ta bilayer. Fabrication of AAO/Tananotemplate and Ta nanohillocks were reported in details.The characterization of the AAO/Ta nanotemplate and Tananohillock arrays were determined by Scanning ElectronThe EDX spectrum from a fabricated Ta nanohillockconfirms the fabrication. The oxidation of the Ta foil resultsfrom Ta ions migrating outward and oxygen ions transportedthrough, and released from, the AAO barrier layer, whichdissolves at the tantala/alumina interface. The shape of the Tananohillocks depends on the nature of the Ta foil, anodisingsolution, and the resistivities of the tantala and alumina barrierlayer.Figure 2. EDX spectrum of a fabricated Ta nanohillock(a)In summary, simple fabrication of Ta nanohillocks usingAAO/Ta nanotemplate was reported in details. We believethat, this method offers a convenient route for fabrication ofother nanostructured capacitors.*Corresponding author: ntasaltin@ku.edu.tr[1] V. Surganov, A. Mozalev, Microelectron. Eng. 37/38 (1997) 329.[2] K. Shimizu, H. Habazaki, P. Skeldon, G.E. Thompson, G.C.Wood, J. Surf. Finish Soc. Jpn. 50 (1999) 2.Figure 1. (a) Top view of the Ta nanohillock array (b) Highmagnification top view of the Ta nanohillock array(b)Fabricated AAO/Ta nanotemplate was approximately 55 nmin diameters and as shown in Figure 1, Ta nanohillocks wereobtained approximately 50 nm in diameters. We couldcalculate the Ta nanohillocks density is approximately10 -21,2.10PPcmPP.6th Nanoscience and Nanotechnology Conference, zmir, 2010 648