Photonic crystals in biology - NanoTR-VI

Poster Session, Thursday, June 17Theme F686 - N1123The Design and Analysis of Novel MEMS Force AmplifierErgin KOSA 1 Umit SONMEZ 1 , Huseyin KIZIL 2 , Levent TRABZON 1,*1 Mechanical Engineering, Istanbul Technical University, Istanbul 34437, Turkey2 Metallurgical and Materials Engineering, Istanbul Technical University, Istanbul 34469, TurkeyAbstract — The compliant micro mechanisms achieve high amplification of forces that can be used as cutting forcein micro- and nano-fabrication. We designed a novel and simple micro-compliant system by SOI-MUMPs technology so thatinput force is multiplied by 11.1 times at the output.It is preferable to amplify the force of any actuator in microscaleapplications [1]. In this paper, we aim to get forceamplification by means of novel micro-compliant mechanism.The range of force amplifications in micro-compliant systemmakes it possible to explore very interesting applications inmicro- and nano-fabrication and unique research topics inmicro- and nano-technology. There are several approaches tofabricate micro-compliant systems and surfacemicromachining is one of the most utilized technology tofabricate micro-complaint system [2]One of the most crucial points in design of micro-compliantsystem is the elastic deformation of materials in the forceamplification scheme [3,4]. There are many advantages ofcompliant mechanisms, such as; no friction at the joints,monolithic structure, no wear under operating conditions, nolubrication needed and high precision [5,6]. Moreover, itenables us to manufacture the mechanism with less and singleparts without joints. This paper includes design, simulationand optimization of the micro compliant force amplifier. Therigid body model of micro mechanism is derived and positionanalysis is run by MATLAB and simulation of the microsystemis run by ANSYS.The system is designed by SOI-MUMPs fabricationtechnology [7]. The thickness and width of the elastic jointsare 25 and 3 microns, respectively. The system is composed oftwo stages with long rigid beams. The length of rigid beams inthe first stage is 500 and 600 μm and length of the rigid beamsin the second stage are 700 and 800 μm. Two rigid beams arelinked to each other by compliant hinges with length of 100 to300 μm. The micro compliant mechanisms are operated atsmall degrees at about from 0 to 10 degrees in which it isexpected to get high amplification factor. The amplificationfactor is defined as A=F /Fout in where the F in is input forceapplied to the system and F out is the output force obtainedfrom the micro mechanism.We designed various hingegeometries at the conjunction of the rigid beams, such astriangle, rectangle, and straight beams with small curvature.We analyzed each different design of micro amplifier atdifferent conditions.We aimed at examining the effect of curvature and length ofdifferent complaint hinges so that we designed flexible hingesin 150, 200, 300 microns lengths and we observed that whenthe length of beams decreases from 300 to 150 microns, theamplification factor increases. Moreover, the height of curveon the hinges improves magnification of forces as it decreasesfrom 30 microns to 10 microns.Since we utilize the SOI-MUMPs processes, theoptimization of micro-compliant system is limited by thefabrication design rules. The optimization also depends on theinput force and stiffness of materials so that different stiffnessFig. 1: Amplification factors for straight, triangular and rectangularhinges with different lengthsat the output point enables us to get a range of amplificationfactors.As a conclusion, we have designed a novel micro-compliantmechanism by SOI-MUMPs technology with different hingegeometries. We found that the amplification of factor is 9.9,8.5 and 7.8 for straight beams with length of 150, 200 and 300μm, respectively, as shown in Fig.1. The straight beams havesmall offset at the center and it is only 10 μm in height for all.The hinges with rectangle and triangle shapes, theamplifications are 11.1 and 8.9, respectively. Moreover,amplifications of the 200 μm straight beam with 10, 20, 30 μmoffsets at the center are 8.5, 7.0, 6.0, respectively. Thus, theoffset at the center and the length of straight beams affect themagnification factor of compliant system.* Corresponding Author: levent.trabzon@itu.edu.tr[1]M. B. Parkinson, B. D. Jensen and K. Kurabayashi, Proceedings ofDETC’01(2001)[2]J. Li, Z.S. Liu, C.Lu, Q. X. Zhang and A.Q.Liu, The 13th InternationalConference on Solid-State Sensors, Actuators and Microsystems (2005)[3] C. F. Lin and C. J. Shih, Tamkang Journal of Science and Engineering,Vol. 9, No 3, pp. 215-222 (2006)[4]G. Chena and Larry L. Howell, Precision Engineering 33 pp.268–274(2009)[5]C. B. W. Pedersen and A. A. Seshia, Journal of Micromechanics andMicroengineering pp. 234, (2004)[6]S. Kota, J. Hetrick, Z. Li and L. Saggere, IEEE/ASME Transaction onMechatronics, Vol.4, No:4 (1999).[7] www.memscap.com/mumps/documents/SOIMUMPs.dr.v4.pdf,14.03.20106th Nanoscience and Nanotechnology Conference, zmir, 2010 691