BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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Extraction Strategiesdevice performance quite well. Values extracted in this manner will now havesome physical relevance.6.2 Extraction StrategiesTwo different strategies are available for extracting parameters: the single deviceextraction strategy and group device extraction strategy. In single deviceextraction strategy, experimental data from a single device is used to extract acomplete set of model parameters. This strategy will fit one device very well butwill not fit other devices with different geometries. Furthermore, single deviceextraction strategy can not guarantee that the extracted parameters are physical. Ifonly one set of channel length and width is used, parameters related to channellength and channel width dependencies can not be determined.BSIM3v3 uses group device extraction strategy. This requires measured data fromdevices with different geometries. All devices are measured under the same biasconditions. The resulting fit might not be absolutely perfect for any single devicebut will be better for the group of devices under consideration.6.3 Extraction Procedure6.3.1 Parameter Extraction RequirementsOne large size device and two sets of smaller-sized devices are needed toextract parameters, as shown in Figure 6-1.6-2 BSIM3v3.2.2 Manual Copyright © 1999 UC Berkeley
Extraction ProcedureWOrthogonal Set of W and LW minL minLarge W and LLFigure 6-1. Device geometries used for parameter extractionThe large-sized device (W ≥ 10µm, L ≥ 10µm) is used to extractparameters which are independent of short/narrow channel effects andparasitic resistance. Specifically, these are: mobility, the large-sized devicethreshold voltage V Tideal , and the body effect coefficients K 1 and K 2 whichdepend on the vertical doping concentration distribution. The set of deviceswith a fixed large channel width but different channel lengths are used toextract parameters which are related to the short channel effects. Similarly,the set of devices with a fixed, long channel length but different channelwidths are used to extract parameters which are related to narrow widthBSIM3v3.2.2 Manual Copyright © 1999 UC Berkeley 6-3
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BSIM3v3.2.2 MOSFET ModelUsers’ Ma
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Table of ContentsCHAPTER 1: Introdu
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CHAPTER 6: Parameter Extraction 6-1
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APPENDIX C: References C-1APPENDIX
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CHAPTER 1: Introduction1.1 General
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Non-Uniform Doping and Small Channe
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Mobility Modelµeffµ=01 + ( E E )e
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Bulk Charge Effectµ eff Ev = , E <
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Strong Inversion Drain Current (Lin
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Strong Inversion Current and Output
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Subthreshold Drain CurrentV1 PSCBE2
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Effective Channel Length and Widthd
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Poly Gate Depletion EffectNgateFigu
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Poly Gate Depletion Effect1.00Tox=8
Page 50 and 51: Poly Gate Depletion EffectBSIM3v3.2
Page 52 and 53: Poly Gate Depletion Effect2-40 BSIM
Page 54 and 55: Unified Channel Charge Density Expr
Page 56 and 57: Unified Channel Charge Density Expr
Page 58 and 59: Unified Mobility Expression∆QVF(
Page 60 and 61: Unified Linear Current ExpressionI=
Page 62 and 63: Unified Vdsat ExpressionLet V ds =V
Page 64 and 65: Single Current Expression for All O
Page 67 and 68: KAPITEL 7RESULTAT OCH REKOMMENDATIO
Page 69 and 70: CHAPTER 4: Capacitance ModelingAccu
Page 71 and 72: Geometry Definition for C-V Modelin
Page 73 and 74: Methodology for Intrinsic Capacitan
Page 83 and 84: Charge-Thickness Capacitance Modelp
Page 85 and 86: Charge-Thickness Capacitance Modelw
Page 87 and 88: Extrinsic CapacitanceFigure 4-4 ill
Page 89 and 90: Extrinsic Capacitance2( V + δ ) 4
Page 91 and 92: CHAPTER 5: Non-Quasi Static Model5.
Page 93 and 94: Model FormulationFigure 5-1. Quasi-
Page 95 and 96: Model Formulationwhere elm is the E
Page 97 and 98: Model Formulationwhere i represents
Page 99: CHAPTER 6: Parameter ExtractionPara
Page 103 and 104: Extraction ProcedureInitial Guess o
Page 105 and 106: Extraction Procedureoptimization. (
Page 107 and 108: Extraction ProcedureStep 7Extracted
Page 109 and 110: Extraction ProcedureB0, B1Fitting T
Page 111 and 112: Extraction ProcedureStep 20Extracte
Page 113 and 114: Notes on Parameter Extraction6.4.2
Page 115 and 116: Notes on Parameter ExtractionnC-1.
Page 117 and 118: CHAPTER 6: Parameter ExtractionPara
Page 119 and 120: Extraction ProcedureWOrthogonal Set
Page 121 and 122: Extraction ProcedureInitial Guess o
Page 123 and 124: Extraction Procedureoptimization. (
Page 125 and 126: Extraction ProcedureStep 7Extracted
Page 127 and 128: Extraction ProcedureB0, B1Fitting T
Page 129 and 130: Extraction ProcedureStep 20Extracte
Page 131 and 132: Notes on Parameter Extraction6.4.2
Page 133 and 134: Notes on Parameter ExtractionnC-1.
Page 135 and 136: CHAPTER 7: Benchmark Test ResultsA
Page 137 and 138: Benchmark Test ResultsIds (A)1.E-02
Page 141 and 142: Benchmark Test Resultsgm/Ids (mho/A
Page 145 and 146: CHAPTER 8: Noise Modeling8.1 Flicke
Page 147 and 148: Flicker NoiseNlC=ox( V −V− min(
Page 149 and 150: Noise Model Flag8.3 Noise Model Fla
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CHAPTER 9: MOS Diode Modeling9.1 Di
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Diode IV ModelJssw= Js0sw⎛ E⎜
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MOS Diode Capacitance Model9.1.3 Mo
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MOS Diode Capacitance Model(9.18)Cj
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MOS Diode Capacitance Model(9.26)Cj
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MOS Diode Capacitance Model(9.32)
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APPENDIX A: Parameter ListA.1 Model
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DC ParametersSymbolsused inequation
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C-V Model ParametersSymbolsused ine
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dW and dL ParametersA.5 dW and dL P
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Temperature ParametersSymbolsused i
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Process ParametersSymbolsused inequ
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Model Parameter NotesK2( γ1−γ)(
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Model Parameter NotesCgdo = dlc * C
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APPENDIX B: Equation ListB.1 I-V Mo
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I-V ModelC C V C V D L effDL effdsc
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I-V ModelEsatsat= 2νµ effB.1.5 Ef
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I-V ModelB.1.8 Polysilicon Depletio
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Capacitance Model EquationsTRdsw( T
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Capacitance Model EquationsB.2.2.2
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Capacitance Model EquationsQ inv= 0
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Capacitance Model Equationsif (V ds
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Capacitance Model Equations⎡Q W L
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Capacitance Model EquationsVgsteff
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Capacitance Model Equations(i) 50/5
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Capacitance Model EquationsAbulk0
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Capacitance Model Equations(3) capM
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Capacitance Model EquationsδQsub=
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APPENDIX C: References[1] G.S. Gild
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[18] M.C. Jeng, "Design and Modelin
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[35] K.K. Hung et al, “A Physics-
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APPENDIX D: Model Parameter Binning
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AC and Capacitance ParametersD.3 AC
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NQS ParametersD.4 NQS ParametersSym
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Temperature ParametersD.6 Temperatu
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Process ParametersSymbolsused inequ
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