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BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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Process ParametersSymbolsused inequ<strong>at</strong>ionSymbolsused inSPICEDescription Default Unit NoteAf af Flicker noise exponent 1 noneEf ef Flicker noise frequencyexponent1 noneKf kf Flicker noise coefficient 0 noneA.8 Process ParametersSymbolsused inequ<strong>at</strong>ionSymbolsused inSPICEDescription Default Unit NoteTox tox G<strong>at</strong>e oxide thickness 1.5e-8 mToxm toxm Tox <strong>at</strong> which parameters areextractedTox m nI-3Xj xj Junction Depth 1.5e-7 mγ1 gamma1 Body-effect coefficient near thesurfacecalcul<strong>at</strong>edV 1/2nI-5γ2 gamma2 Body-effect coefficient in thebulkcalcul<strong>at</strong>edV 1/2nI-6Nch nch Channel doping concentr<strong>at</strong>ion 1.7e17 1/cm 3 nI-4Nsub nsub Substr<strong>at</strong>e doping concentr<strong>at</strong>ion 6e16 1/cm 3Vbx vbx Vbs <strong>at</strong> which the depletionregion width equals xtcalcul<strong>at</strong>edVnI-7Xt xt Doping depth 1.55e-7 m<strong>BSIM3v3.2.2</strong> Manual Copyright © 1999 UC Berkeley A-13

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