BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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Poly Gate Depletion EffectNgateFigure 2-7. Charge distribution in a MOSFET with the poly gate depletion effect.The device is in the strong inversion region.The effective gate voltage can be calculated in the following manner. Assume thedoping concentration in the poly gate is uniform. The voltage drop in the poly gate(V poly ) can be calculated as1qNN 2 gate poly Xpolypoly = XpolyEpoly=2 2εsi(2.9.1)where E poly is the maximum electrical field in the poly gate. The boundarycondition at the interface of poly gate and the gate oxide isε E = ε E = 2qεN gate Vox ox si poly si poly poly(2.9.2)2-34 BSIM3v3.2.2 Manual Copyright © 1999 UC Berkeley
Poly Gate Depletion Effectwhere E ox is the electrical field in the gate oxide. The gate voltage satisfiesV −V−Φ = V + VgsFBspolyox(2.9.3)where V ox is the voltage drop across the gate oxide and satisfies V ox = E ox T ox .According to the equations (2.9.1) to (2.9.3), we obtain the following2( −V−Φ −V) −V= 0aVgsFBspolypoly(2.9.4)where (2.9.5)a =2εox22qεsiNgateToxBy solving the equation (2.9.4), we get the effective gate voltage (V gs_eff ) which isequal to:Vgs_eff( V −V−Φ )2 ⎛2qε⎞siNgateTox= +Φ +⎜ 2εox gs FB sV1+−1⎟FB s2 ⎜2ε⎟oxqεsiNgateTox⎝⎠(2.9.6)Figure 2-8 shows V gs_eff / V gs versus the gate voltage. The threshold voltage isassumed to be 0.4V. If T ox = 40 Å, the effective gate voltage can be reduced by 6%due to the poly gate depletion effect as the applied gate voltage is equal to 3.5V.BSIM3v3.2.2 Manual Copyright © 1999 UC Berkeley 2-35
Page 1 and 2: BSIM3v3.2.2 MOSFET ModelUsers’ Ma
Page 5 and 6: Table of ContentsCHAPTER 1: Introdu
Page 7 and 8: CHAPTER 6: Parameter Extraction 6-1
Page 9 and 10: APPENDIX C: References C-1APPENDIX
Page 11 and 12: CHAPTER 1: Introduction1.1 General
Page 14 and 15: Non-Uniform Doping and Small Channe
Page 28 and 29: Mobility Modelµeffµ=01 + ( E E )e
Page 30 and 31: Bulk Charge Effectµ eff Ev = , E <
Page 32 and 33: Strong Inversion Drain Current (Lin
Page 34 and 35: Strong Inversion Current and Output
Page 42 and 43: Subthreshold Drain CurrentV1 PSCBE2
Page 44 and 45: Effective Channel Length and Widthd
Page 48 and 49: Poly Gate Depletion Effect1.00Tox=8
Page 50 and 51: Poly Gate Depletion EffectBSIM3v3.2
Page 52 and 53: Poly Gate Depletion Effect2-40 BSIM
Page 54 and 55: Unified Channel Charge Density Expr
Page 56 and 57: Unified Channel Charge Density Expr
Page 58 and 59: Unified Mobility Expression∆QVF(
Page 60 and 61: Unified Linear Current ExpressionI=
Page 62 and 63: Unified Vdsat ExpressionLet V ds =V
Page 64 and 65: Single Current Expression for All O
Page 67 and 68: KAPITEL 7RESULTAT OCH REKOMMENDATIO
Page 69 and 70: CHAPTER 4: Capacitance ModelingAccu
Page 71 and 72: Geometry Definition for C-V Modelin
Page 73 and 74: Methodology for Intrinsic Capacitan
Page 83 and 84: Charge-Thickness Capacitance Modelp
Page 85 and 86: Charge-Thickness Capacitance Modelw
Page 87 and 88: Extrinsic CapacitanceFigure 4-4 ill
Page 89 and 90: Extrinsic Capacitance2( V + δ ) 4
Page 91 and 92: CHAPTER 5: Non-Quasi Static Model5.
Page 93 and 94: Model FormulationFigure 5-1. Quasi-
Page 95 and 96: Model Formulationwhere elm is the E
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Model Formulationwhere i represents
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CHAPTER 6: Parameter ExtractionPara
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Extraction ProcedureWOrthogonal Set
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Extraction ProcedureInitial Guess o
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Extraction Procedureoptimization. (
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Extraction ProcedureStep 7Extracted
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Extraction ProcedureB0, B1Fitting T
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Extraction ProcedureStep 20Extracte
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Notes on Parameter Extraction6.4.2
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Notes on Parameter ExtractionnC-1.
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CHAPTER 6: Parameter ExtractionPara
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Extraction ProcedureWOrthogonal Set
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Extraction ProcedureInitial Guess o
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Extraction Procedureoptimization. (
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Extraction ProcedureStep 7Extracted
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Extraction ProcedureB0, B1Fitting T
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Extraction ProcedureStep 20Extracte
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Notes on Parameter Extraction6.4.2
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Notes on Parameter ExtractionnC-1.
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CHAPTER 7: Benchmark Test ResultsA
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Benchmark Test ResultsIds (A)1.E-02
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Benchmark Test Resultsgm/Ids (mho/A
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CHAPTER 8: Noise Modeling8.1 Flicke
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Flicker NoiseNlC=ox( V −V− min(
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Noise Model Flag8.3 Noise Model Fla
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CHAPTER 9: MOS Diode Modeling9.1 Di
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Diode IV ModelJssw= Js0sw⎛ E⎜
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MOS Diode Capacitance Model9.1.3 Mo
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MOS Diode Capacitance Model(9.18)Cj
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MOS Diode Capacitance Model(9.26)Cj
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MOS Diode Capacitance Model(9.32)
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APPENDIX A: Parameter ListA.1 Model
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DC ParametersSymbolsused inequation
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C-V Model ParametersSymbolsused ine
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dW and dL ParametersA.5 dW and dL P
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Temperature ParametersSymbolsused i
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Process ParametersSymbolsused inequ
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Model Parameter NotesK2( γ1−γ)(
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Model Parameter NotesCgdo = dlc * C
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APPENDIX B: Equation ListB.1 I-V Mo
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I-V ModelC C V C V D L effDL effdsc
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I-V ModelEsatsat= 2νµ effB.1.5 Ef
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I-V ModelB.1.8 Polysilicon Depletio
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Capacitance Model EquationsTRdsw( T
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Capacitance Model EquationsB.2.2.2
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Capacitance Model EquationsQ inv= 0
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Capacitance Model Equationsif (V ds
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Capacitance Model Equations⎡Q W L
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Capacitance Model EquationsVgsteff
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Capacitance Model Equations(i) 50/5
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Capacitance Model EquationsAbulk0
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Capacitance Model Equations(3) capM
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Capacitance Model EquationsδQsub=
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APPENDIX C: References[1] G.S. Gild
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[18] M.C. Jeng, "Design and Modelin
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[35] K.K. Hung et al, “A Physics-
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APPENDIX D: Model Parameter Binning
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Page 219 and 220:
Page 221 and 222:
AC and Capacitance ParametersD.3 AC
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NQS ParametersD.4 NQS ParametersSym
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Temperature ParametersD.6 Temperatu
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Process ParametersSymbolsused inequ
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BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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