BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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Model Control ParametersD.1 Model Control ParametersSymbolsused inequationSymbolsused inSPICEDescriptionCan BeBinned?None level The model selector NONone version Model version selector NONone binUnit Bining unit selector NONone param- Parameter value check NOChkmobMod mobMod Mobility model selector NOcapMod capMod Flag for the short channel NOcapacitance modelnqsMod nqsMod Flag for NQS model NOnoiMod noiMod Flag for Noise model NOD.2 DC ParametersSymbolsused inequationSymbolsused inSPICEDescriptionCan BeBinned?Vth0 vth0 Threshold voltage @V bs =0 for YESLarge L.VFB vfb Flat band voltage YESK1 k1 First order body effect coefficientYESK2 k2 Second order body effect coefficientYESD-2 BSIM3v3.2.2 Manual Copyright © 1999 UC Berkeley
DC ParametersSymbolsused inequationSymbolsused inSPICEDescriptionK3 k3 Narrow width coefficient YESK3b k3b Body effect coefficient of k3 YESW0 w0 Narrow width parameter YESNlx nlx Lateral non-uniform doping YESparameterDvt0 dvt0 first coefficient of short-channeleffect on VthYESDvt1 dvt1 Second coefficient of shortchanneleffect on VthDvt2 dvt2 Body-bias coefficient of shortchanneleffect on VthDvt0w dvt0w First coefficient of narrowwidth effect on Vth for smallchannel lengthDvt1w dvtw1 Second coefficient of narrowwidth effect on Vth for smallchannel lengthDvt2w dvt2w Body-bias coefficient of narrowwidth effect for small channellengthµ0 u0 Mobility at Temp = TnomNMOSFETPMOSFETUa ua First-order mobility degradationcoefficientUb ub Second-order mobility degradationcoefficientCan BeBinned?YESYESYESYESYESYESYESYESBSIM3v3.2.2 Manual Copyright © 1999 UC Berkeley D-3
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BSIM3v3.2.2 MOSFET ModelUsers’ Ma
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Table of ContentsCHAPTER 1: Introdu
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CHAPTER 6: Parameter Extraction 6-1
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APPENDIX C: References C-1APPENDIX
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CHAPTER 1: Introduction1.1 General
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Non-Uniform Doping and Small Channe
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Mobility Modelµeffµ=01 + ( E E )e
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Bulk Charge Effectµ eff Ev = , E <
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Strong Inversion Drain Current (Lin
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Strong Inversion Current and Output
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Subthreshold Drain CurrentV1 PSCBE2
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Effective Channel Length and Widthd
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Poly Gate Depletion EffectNgateFigu
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Poly Gate Depletion Effect1.00Tox=8
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Poly Gate Depletion EffectBSIM3v3.2
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Poly Gate Depletion Effect2-40 BSIM
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Unified Channel Charge Density Expr
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Unified Channel Charge Density Expr
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Unified Mobility Expression∆QVF(
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Unified Linear Current ExpressionI=
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Unified Vdsat ExpressionLet V ds =V
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Single Current Expression for All O
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KAPITEL 7RESULTAT OCH REKOMMENDATIO
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CHAPTER 4: Capacitance ModelingAccu
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Geometry Definition for C-V Modelin
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Methodology for Intrinsic Capacitan
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Charge-Thickness Capacitance Modelp
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Charge-Thickness Capacitance Modelw
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Extrinsic CapacitanceFigure 4-4 ill
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Extrinsic Capacitance2( V + δ ) 4
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CHAPTER 5: Non-Quasi Static Model5.
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Model FormulationFigure 5-1. Quasi-
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Model Formulationwhere elm is the E
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Model Formulationwhere i represents
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CHAPTER 6: Parameter ExtractionPara
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Extraction ProcedureWOrthogonal Set
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Extraction ProcedureInitial Guess o
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Extraction Procedureoptimization. (
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Extraction ProcedureStep 7Extracted
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Extraction ProcedureB0, B1Fitting T
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Extraction ProcedureStep 20Extracte
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Notes on Parameter Extraction6.4.2
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Notes on Parameter ExtractionnC-1.
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CHAPTER 6: Parameter ExtractionPara
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Extraction ProcedureWOrthogonal Set
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Extraction ProcedureInitial Guess o
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Extraction Procedureoptimization. (
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Extraction ProcedureStep 7Extracted
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Extraction ProcedureB0, B1Fitting T
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Extraction ProcedureStep 20Extracte
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Notes on Parameter Extraction6.4.2
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Notes on Parameter ExtractionnC-1.
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CHAPTER 7: Benchmark Test ResultsA
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Benchmark Test ResultsIds (A)1.E-02
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Benchmark Test Resultsgm/Ids (mho/A
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CHAPTER 8: Noise Modeling8.1 Flicke
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Flicker NoiseNlC=ox( V −V− min(
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Noise Model Flag8.3 Noise Model Fla
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CHAPTER 9: MOS Diode Modeling9.1 Di
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Diode IV ModelJssw= Js0sw⎛ E⎜
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MOS Diode Capacitance Model9.1.3 Mo
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MOS Diode Capacitance Model(9.18)Cj
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MOS Diode Capacitance Model(9.26)Cj
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MOS Diode Capacitance Model(9.32)
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APPENDIX A: Parameter ListA.1 Model
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Page 169 and 170: C-V Model ParametersSymbolsused ine
Page 171 and 172: dW and dL ParametersA.5 dW and dL P
Page 173 and 174: Temperature ParametersSymbolsused i
Page 175 and 176: Process ParametersSymbolsused inequ
Page 177 and 178: Model Parameter NotesK2( γ1−γ)(
Page 179 and 180: Model Parameter NotesCgdo = dlc * C
Page 181 and 182: APPENDIX B: Equation ListB.1 I-V Mo
Page 183 and 184: I-V ModelC C V C V D L effDL effdsc
Page 185 and 186: I-V ModelEsatsat= 2νµ effB.1.5 Ef
Page 187 and 188: I-V ModelB.1.8 Polysilicon Depletio
Page 189 and 190: Capacitance Model EquationsTRdsw( T
Page 191 and 192: Capacitance Model EquationsB.2.2.2
Page 193 and 194: Capacitance Model EquationsQ inv= 0
Page 195 and 196: Capacitance Model Equationsif (V ds
Page 197 and 198: Capacitance Model Equations⎡Q W L
Page 199 and 200: Capacitance Model EquationsVgsteff
Page 201 and 202: Capacitance Model Equations(i) 50/5
Page 203 and 204: Capacitance Model EquationsAbulk0
Page 205 and 206: Capacitance Model Equations(3) capM
Page 207 and 208: Capacitance Model EquationsδQsub=
Page 209 and 210: APPENDIX C: References[1] G.S. Gild
Page 211 and 212: [18] M.C. Jeng, "Design and Modelin
Page 213 and 214: [35] K.K. Hung et al, “A Physics-
Page 215: APPENDIX D: Model Parameter Binning
Page 221 and 222: AC and Capacitance ParametersD.3 AC
Page 223 and 224: NQS ParametersD.4 NQS ParametersSym
Page 225 and 226: Temperature ParametersD.6 Temperatu
Page 227 and 228: Process ParametersSymbolsused inequ
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BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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