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BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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I-V <strong>Model</strong>B.1.8 Polysilicon Depletion Effect21qNN g<strong>at</strong>e poly Xpolypoly = XpolyEpoly=2 2εsiε E = ε E = 2qεN g<strong>at</strong>e Vox ox si poly si poly polyV −V− Φ = V + VgsFBspolyox2( −V− Φ −V) −V= 0a VgsFBspolypolya =2εox22qεsiNg<strong>at</strong>eToxVgs_eff( V −V−Φ )2 ⎛2qε⎞siNg<strong>at</strong>eTox= +Φ +⎜ 2εox gs FB sVFBs1+−12 ⎜2εoxqεsiNg<strong>at</strong>eTox⎝⎠B.1.9 Effective Channel Length and WidthLeff= Ldrawn−2dLWeff= Wdrawn−2dW<strong>BSIM3v3.2.2</strong> Manual Copyright © 1999 UC Berkeley B-7

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