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BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

BSIM3v3.2.2 MOSFET Model - The University of Texas at Dallas

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Extraction Procedure( m + 1) ( m) ( m)i i iP = P + ∆P(6.3.2)where i=1, 2, 3 for this example. <strong>The</strong> (m+1) parameter values for P 2 and P 3are obtained in an identical fashion. This process is repe<strong>at</strong>ed until theincremental parameter change in parameter values ∆P i (m) are smaller thana pre-determined value. At this point, the parameters P 1 , P 2 , and P 3 havebeen extracted.6.3.3 Extraction RoutineBefore any model parameters can be extracted, some process parametershave to be provided. <strong>The</strong>y are listed below in Table 6-1:Input Parameters NamesT oxN chTL drawnW drawnX jPhysical MeaningG<strong>at</strong>e oxide thicknessDoping concentr<strong>at</strong>ion in the channelTemper<strong>at</strong>ure <strong>at</strong> which the d<strong>at</strong>a is takenMask level channel lengthMask level channel widthJunction depthTable 6-1. Prerequisite input parameters prior to extraction process.<strong>The</strong> parameters are extracted in the following procedure. <strong>The</strong>se proceduresare based on a physical understanding <strong>of</strong> the model and based on local6-6 <strong>BSIM3v3.2.2</strong> Manual Copyright © 1999 UC Berkeley

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